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    • 33. 发明授权
    • Apparatus wherein diffracted light does not return to the source
    • 衍射光不返回到源的装置
    • US5424829A
    • 1995-06-13
    • US939209
    • 1992-09-02
    • Soichi SatoMasaki TomiyaTatsuo Itabashi
    • Soichi SatoMasaki TomiyaTatsuo Itabashi
    • G01D5/38G01C9/02
    • G01D5/38
    • A lattice interference-type displacement detection device including a scale having a penetration-type diffraction lattice formed on one side thereof, and an optical system positioned adjacent to the diffraction lattice and remote from the scale. The optical system includes a light source which emits a light beam along a light source optical path, a light beam divergence arrangement for branching the light beam into first and second divergence beams along first and second optical paths, respectively, and for causing the first and second divergence beams to be incident at a diffraction point on the diffraction lattice, a light beam mixing arrangement for generating first and second mixing light beams from a first group of diffraction light beams generated at the diffraction point, and an arrangement for converting the first and second mixing light beams into respective electrical signals. The scale also includes a light reflection surface remote from the optical system with respect to the diffraction lattice. The light reflection surface reflects the first group of diffraction light beams generated at the diffraction point to the light beam mixing arrangement along third and fourth optical paths, respectively. The optical system is arranged so that a second group of diffraction light beams generated at the diffraction point are not reflected back along the light source optical path to the light source. The light beam divergence arrangement and light beam mixing arrangement are constructed of a single prism.
    • 一种格子干涉型位移检测装置,其包括在其一侧形成有穿透型衍射格栅的标尺,以及与衍射格子相邻且远离刻度尺的光学系统。 光学系统包括沿着光源光路发射光束的光源,分别用于将光束分别沿着第一和第二光路分支成第一和第二发散光束的光束发散装置,并且用于使第一和第二光路 第二发散光束入射在衍射光栅上的衍射点处,用于从衍射点处产生的第一组衍射光束产生第一和第二混合光束的光束混合装置,以及用于将第一和第 将光束二次混合成各自的电信号。 该刻度还包括相对于衍射晶格远离光学系统的光反射表面。 光反射表面分别将沿衍射点产生的第一组衍射光束沿第三和第四光路反射到光束混合装置。 光学系统被布置成使得在衍射点处产生的第二组衍射光束不沿着到光源的光源光路反射回。 光束发散布置和光束混合装置由单个棱镜构成。