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31. 发明授权

US5028780A Preparation and observation method of micro-section 失效
标题翻译：微切片的制备及观察方法
公开(公告)号：US5028780A
公开(公告)日：1991-07-02
申请号：US444716
申请日：1989-12-01
申请人： Takashi Kaito , Tatsuya Adachi
发明人： Takashi Kaito , Tatsuya Adachi
IPC分类号： G01N23/04 , G01N1/32 , H01J37/252 , H01J37/305 , H01J37/317 , H01L21/66
CPC分类号： H01J37/3056 , G01N1/32 , H01J37/317
摘要： The method of preparing and observing a microsection utilizes a focused ion beam device composed of an ion tube for producing a scanned and focused ion beam, a sample stage including an XY displacement mechanism and an inclination mechanism, a gas gun for injecting deposition material gas onto a surface of a sample and a secondary charged particle detector such that the focused ion beam device has three functions, i.e., a scanning ion microscope function, a maskless etching function and a maskless deposition function. The method is directed to sequentially carry out highly accurate preparation of a section in a particular area of the sample and observation of the prepared section according to first step of determining a position of the cutting edge on the sample surface by the scanning ion microscope function, a second step of depositing a film locally on an area containing the cutting edge position by the maskless deposition function, a third step of forming a rectangular groove by the maskless etching function such that one sidewall of the rectangular groove is registered with the cutting edge so as to prepare and expose a section, a fourth step of inclining the sample stage to face the section in an observation direction, and a fifth step of carrying out observation of the section in the formed groove by the scanning ion microscope function.
摘要翻译：制备和观察显微切片的方法利用由离子管构成的聚焦离子束装置，用于产生扫描和聚焦离子束，包括XY位移机构和倾斜机构的样品台，用于将沉积材料气体注入到样品的表面和二次带电粒子检测器，使得聚焦离子束装置具有扫描离子显微镜功能，无掩模蚀刻功能和无掩模沉积功能三个功能。该方法是按照第一步骤，通过扫描离子显微镜功能确定样品表面上的切割边缘的位置，依次执行样品的特定区域中的截面的高精度准备和准备部分的观察，通过无掩模沉积功能在包含切割边缘位置的区域上局部沉积膜的第二步骤;通过无掩模蚀刻功能形成矩形凹槽的第三步骤，使得矩形凹槽的一个侧壁与切割边缘对齐，从而为了准备曝光部，在观察方向上使样本台倾斜的第四步骤，以及通过扫描离子显微镜功能对形成的槽中的截面进行观察的第五步骤。

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