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    • 31. 发明授权
    • Method for real time monitoring and verifying optical proximity correction model and method
    • 用于实时监测和验证光学邻近校正模型和方法的方法
    • US07392502B2
    • 2008-06-24
    • US11169616
    • 2005-06-30
    • Gökhan PercinRam RamanujamFranz Xaver ZachKoichi Suzuki
    • Gökhan PercinRam RamanujamFranz Xaver ZachKoichi Suzuki
    • G06F17/50
    • G03F1/84G03F1/36G03F1/44G03F7/70441G03F7/70683
    • This invention relates to a method for real time monitoring and verifying optical proximity correction (OPC) models and methods in production. Prior to OPC is performed on the integrated circuit layout, a model describing the optical, physical and chemical processes involving lithography should be obtained accurately and precisely. In general, the model is calibrated using the measurements obtained by running wafers through the same lithography, patterning, and etch processes. In this invention, a novel real time method for verifying and monitoring the calibrated model on a production or monitor wafer is presented: optical proximity corrected (OPC-ed) test and verification structures are placed on scribe lines or cut lines of the production or monitor wafer, and with pre-determined schedule, the critical dimensions and images of these test and verification structures are monitored across wafer and across exposure field.
    • 本发明涉及一种用于实时监测和验证生产中的光学邻近校正(OPC)模型和方法的方法。 在对集成电路布局进行OPC之前,应准确准确地描述涉及光刻的光学,物理和化学过程的模型。 通常,使用通过相同的光刻,图案化和蚀刻工艺运行晶片获得的测量来校准模型。 在本发明中,提出了一种用于在生产或监控晶圆上验证和监测校准模型的新型实时方法:将光学邻近校正(OPC-ed)测试和验证结构放置在生产或监视器的划线或切割线上 晶圆,并且具有预定的时间表,这些测试和验证结构的关键尺寸和图像在晶片和曝光场之间进行监控。
    • 34. 发明申请
    • Optical information reproducing method
    • 光信息再现方法
    • US20070121445A1
    • 2007-05-31
    • US11491991
    • 2006-07-25
    • Koichiro NishimuraTsuyoshi TodaMitsuru HaraiKoichi SuzukiToru Kawashima
    • Koichiro NishimuraTsuyoshi TodaMitsuru HaraiKoichi SuzukiToru Kawashima
    • G11B20/10
    • G11B7/005G11B7/1263
    • Disclosed is a method of reproducing optical information by applying laser light to the medium while rotating a recording medium having concentric information tracks or a spiral information track so that the linear velocity of the medium is constant, and thereby reproducing the information recorded on the recording medium by the reflected light. In this method, in moving a reproduction radial position to a second radial position different from the current position, a laser power is changed to second laser power, which is different from current laser power, and then the light spot is moved to the second radial position. This method can prevent degradation of a medium in reproduction light resistance caused by substantially high power reproduction, and erasing or destruction of already recorded data that may be caused, in high-speed recording of a rewritable-type or write-once-type optical disc, when the linear velocity at the time of reproduction becomes slow, e.g. , in an access operation at the time of reproduction with a constant linear velocity and in a return operation from rotational stop due to a standby state.
    • 公开了一种通过在旋转具有同心信息轨道或螺旋信息轨道的记录介质的同时向介质施加激光以使介质的线速度恒定从而再现记录在记录介质上的信息来再现光学信息的方法 通过反射光。 在这种方法中,在将再现径向位置移动到与当前位置不同的第二径向位置时,将激光功率改变为与当前激光功率不同的第二激光功率,然后将光斑移动到第二径向 位置。 这种方法可以防止在可重写型或一次写入式光盘的高速记录中由于基本上高功率再现引起的再现光阻中介质的劣化,以及擦除或破坏可能引起的已经记录的数据 当再现时的线速度变慢时,例如, 在以一定的线速度进行再现时的访问操作和由于待机状态的旋转停止的返回操作。