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31. 发明申请

US20130199280A1 Thermal Flow Meter 有权
标题翻译：热流量计
公开(公告)号：US20130199280A1
公开(公告)日：2013-08-08
申请号：US13813094
申请日：2011-07-28
申请人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
IPC分类号： G01F1/692
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/699
摘要： An object of the present invention is to provide a thermal type flow rate sensor that offers high sensitivity and improved reliability. A sensor element according to the present invention includes a semiconductor substrate, a cavity portion formed on the semiconductor substrate, a heating resistor formed on the cavity portion via an electrically insulating film, a heating temperature sensor for detecting heating temperature of the heating resistor, and a driving circuit for controlling the heating temperature of the heating resistor using the temperature detected by the heating temperature sensor. The heating temperature sensor comprises temperature-sensitive resistors having resistance values varying according to temperature and disposed upstream and downstream of a direction of flow of a fluid to be measured relative to the heating resistor and on upper and lower sides in a direction perpendicular to the direction of flow of the fluid to be measured relative to the heating resistor.
摘要翻译：本发明的目的是提供一种提供高灵敏度和改善的可靠性的热式流量传感器。根据本发明的传感器元件包括半导体衬底，形成在半导体衬底上的空腔部分，通过电绝缘膜形成在空腔部分上的发热电阻器，用于检测加热电阻器的加热温度的加热温度传感器，以及使用由加热温度传感器检测到的温度来控制加热电阻器的加热温度的驱动电路。加热温度传感器包括具有根据温度变化的电阻值的温度敏感电阻器，并且设置在相对于加热电阻器的被测量流体的流动方向的上游和下游以及垂直于该方向的方向上下侧要测量的流体相对于加热电阻器的流动。

32. 发明授权

US08359919B2 Thermal humidity sensor 有权
标题翻译：热湿度传感器
公开(公告)号：US08359919B2
公开(公告)日：2013-01-29
申请号：US12855347
申请日：2010-08-12
申请人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Masamichi Yamada
发明人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Masamichi Yamada
IPC分类号： G01N27/12 , G01N27/18 , G01F1/69
CPC分类号： G01N27/18
摘要： Provided is a high-precision, mechanically robust thermal humidity sensor. A detecting element 1 of the thermal humidity sensor of the present invention has a diaphragm (a bridge structure) 2 formed on a planar substrate which is formed from a material with high thermal conductivity such as silicon or ceramic. Formed on the diaphragm 2 are temperature detecting resistors 4, 5, 6, and 7 and a heating resistor 3 arranged in a manner surrounding the temperature detecting resistors. Humidity is detected based on the outputs of the temperature detecting resistors 4, 5, 6, and 7. Accordingly, humidity measurement errors that can possibly occur due to the leakage of heat through the diaphragm 2 to the planar substrate can be reduced.
摘要翻译：提供了一种高精度，机械坚固的热湿度传感器。本发明的热湿度传感器的检测元件1具有形成在由诸如硅或陶瓷等导热性高的材料形成的平面基板上的隔膜（桥结构）2。形成在隔膜2上的是温度检测电阻4,5,6和7以及围绕温度检测电阻器布置的加热电阻3。基于温度检测电阻4,5,6和7的输出检测湿度。因此，可以减少由于通过隔膜2的热量泄漏到平面基板而可能发生的湿度测量误差。

33. 外观设计

USD674303S1 Physical amount sensor for air 有权
公开(公告)号：USD674303S1
公开(公告)日：2013-01-15
申请号：US29411773
申请日：2012-01-26
申请人： Takayuki Saito , Keiji Hanzawa , Takayuki Yogo
设计人： Takayuki Saito , Keiji Hanzawa , Takayuki Yogo

34. 发明申请

US20110072897A1 Heating Resistance Type Air Flow Rate Measuring Device 审中-公开
标题翻译：加热电阻型空气流量测量装置
公开(公告)号：US20110072897A1
公开(公告)日：2011-03-31
申请号：US12829105
申请日：2010-07-01
申请人： Rintaro MINAMITANI , Keiji Hanzawa , Akio Yasukawa , Yasuo Onose
发明人： Rintaro MINAMITANI , Keiji Hanzawa , Akio Yasukawa , Yasuo Onose
IPC分类号： G01F1/692
CPC分类号： G01F1/692 , G01F1/6845 , G01F15/006 , G01F15/12
摘要： A temperature of the heating resistor is set at a temperature equal to or higher than a temperature, at which liquid droplets contacting a surface of the heating resistor evaporate and disappear by film boiling. Alternatively, when a heating resistance type air flow rate measuring device starts to operate or stops operating, the temperature of the heating resistor may be set at a temperature equal to or higher than the temperature, at which liquid droplets contacting a surface of the heating resistor evaporate and disappear by film boiling. Moreover, a water-repellent and oil-repellent protective coating may be provided on the surface of the heating resistor.
摘要翻译：加热电阻器的温度被设定为等于或高于与加热电阻器的表面接触的液滴蒸发并通过薄膜沸腾而消失的温度。或者，当加热电阻型空气流量测量装置开始运行或停止运行时，加热电阻器的温度可以设定在等于或高于液滴接触加热电阻器的表面的温度通过薄膜沸腾蒸发并消失。此外，可以在加热电阻器的表面上设置防水和防油涂层。

35. 发明申请

US20110023597A1 THERMAL FLOW METER 有权
标题翻译：热流量计
公开(公告)号：US20110023597A1
公开(公告)日：2011-02-03
申请号：US12844429
申请日：2010-07-27
申请人： Hiroshi NAKANO , Masahiro Matsumoto , Keiji Hanzawa
发明人： Hiroshi NAKANO , Masahiro Matsumoto , Keiji Hanzawa
IPC分类号： G01F1/69
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/698 , G01F1/699
摘要： Provided is a heating temperature adjustment circuit in a thermal flow meter capable of adjusting fluctuations of a heating temperature of a heat-generating resistor due to fluctuations of resistances with high accuracy and low cost. The thermal flow meter comprises: a heat-generating resistor that generates heat when a current flows therethrough; a first temperature measuring resistor, a second resistor, a third resistor, and a fourth resistor whose resistance values vary due to temperature; and a fixed resistance having a resistance temperature coefficient lower than that of the first temperature measuring resistor, and measuring a flow rate of a fluid by controlling the heating temperature of the heat-generating resistor. The thermal flow meter includes: a first series circuit in which the fixed resistance, the first temperature measuring resistor, and the second resistor are connected to one another in series; and a second series circuit in which the third resistor and the fourth resistor are connected to each other in series, and generates a voltage to be added to the second series circuit based on voltages at both ends of the fixed resistance.
摘要翻译：提供一种热流量计中的加热温度调节电路，其能够以高精度和低成本由于电阻的波动而调节发热电阻器的加热温度的波动。热流量计包括：当电流流过其中时产生热量的发热电阻器; 第一温度测量电阻器，第二电阻器，第三电阻器和电阻值由温度变化的第四电阻器; 以及电阻温度系数低于第一温度测量电阻器的固定电阻，并且通过控制发热电阻器的加热温度来测量流体的流量。热流量计包括：第一串联电路，其中固定电阻，第一温度测量电阻器和第二电阻器串联连接; 以及第二串联电路，其中第三电阻器和第四电阻器串联连接，并且基于固定电阻两端的电压产生要添加到第二串联电路的电压。

36. 发明授权

US07472591B2 Thermal gas flow and control device for internal-combustion engine using the same 失效
标题翻译：内燃机用热气流量控制装置
公开(公告)号：US07472591B2
公开(公告)日：2009-01-06
申请号：US11781569
申请日：2007-07-23
申请人： Yasuhiro Kanamaru , Keiji Hanzawa
发明人： Yasuhiro Kanamaru , Keiji Hanzawa
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/688 , G01F15/006
摘要： An object of the invention is to realize a thermal gas flow sensor capable of reducing time fluctuation of a heating resistor. A heating resistor 3 and thermometric resistors 4 and 14 are formed on a surface of a thin-wall portion 2. Electrode drawn wires 18 to 23 and pad portions 8 to 13 are formed so as to draw signal lines from the heating resistor 3 and the thermometric resistors 4 and 14. Contact portions 24 to 29 are formed to come in contact with the heating resistor 3, the thermometric resistors 4 and 14, and the electrode drawn wires 18 to 23. The heating resistor 3 and the thermometric resistors 4 and 14 are covered with protective films 30a, 30b, and 31a and insulating films 31b and 30c. The protective films 31a and 31b are formed of a dense film formed of nitride or the like. A part coming in contact with a drawn wire portion 34 and the heating resistor 3 is covered with a contact barrier metal film 36 (titanium-based electrical conductor such as titanium nitride, titanium tungsten, and titanium). The titanium-based electrical conductor is a dense film and resistant to hydrogen. Therefore, it is possible to reduce a time fluctuation of the heating resistor.
摘要翻译：本发明的目的是实现能够减少加热电阻器的时间波动的热气流量传感器。在薄壁部分2的表面上形成加热电阻器3和温度测量电阻器4和14.形成电极拉丝18至23和焊盘部分8至13，以便从加热电阻器3和形成温度计电阻器4和14.接触部分24至29与加热电阻器3，测温电阻器4和14以及电极拉丝18至23接触。加热电阻器3和测温电阻器4和14 覆盖有保护膜30a，30b和31a以及绝缘膜31b和30c。保护膜31a和31b由氮化物等形成的致密膜形成。与拉丝部分34和加热电阻器3接触的部分被接触阻挡金属膜36（钛基电导体，例如氮化钛，钛钨和钛）覆盖。钛基电导体是致密膜并且耐氢。因此，可以减少加热电阻器的时间波动。

37. 发明授权

US07426154B2 Sensor adjusting circuit 有权
标题翻译：传感器调节电路
公开(公告)号：US07426154B2
公开(公告)日：2008-09-16
申请号：US11430975
申请日：2006-05-10
申请人： Masahiro Matsumoto , Satoshi Shimada , Seikou Suzuki , Akihiko Saito , Atsushi Miyazaki , Keiji Hanzawa
发明人： Masahiro Matsumoto , Satoshi Shimada , Seikou Suzuki , Akihiko Saito , Atsushi Miyazaki , Keiji Hanzawa
IPC分类号： G11C8/00 , G06F9/46
CPC分类号： G01D3/022 , G01D3/02
摘要： A sensor adjusting circuit for adjusting a digital sensor, whose circuit scale is small and which can maintain high accuracy in a wide adjustment range is provided. A sensor adjusting circuit for adjusting an analog input signal inputted from a sensor and outputting it as another analog output signal in accordance with a physical quantity to be sensed, comprises: a first analog-to-digital converter having an analog integrator (2) for integrating the analog input signal, a comparator (3) for comparing an output of the analog integrator with a predetermined value, and a D/A converter (7) for outputting an output of the comparator as the input signal; and a second digital-to-analog converter (5) for converting the output of the comparator and outputting it as the analog output signal.
摘要翻译：提供了一种用于调整数字传感器的传感器调节电路，其电路规模小并且可以在宽的调节范围内保持高精度。一种传感器调节电路，用于调节从传感器输入的模拟输入信号，并根据要感测的物理量将其输出为另一个模拟输出信号，包括：第一模数转换器，具有模拟积分器（2），用于积分模拟输入信号，比较器（3），用于将模拟积分器的输出与预定值进行比较;以及D / A转换器（7），用于输出比较器的输出作为输入信号; 以及用于转换比较器的输出并将其作为模拟输出信号输出的第二数模转换器（5）。

38. 发明申请

US20060070436A1 Heating resistance flow rate measuring apparatus 失效
标题翻译：耐热流量测量装置
公开(公告)号：US20060070436A1
公开(公告)日：2006-04-06
申请号：US11283778
申请日：2005-11-22
申请人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
发明人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , F02D41/187 , G01F1/692 , G01F1/696 , G01F1/699
摘要： A heating resistance flow rate measuring apparatus which can use a power source of an ECU in an automobile without requiring an expensive protective circuit and regulator. Heating of temperature detecting resistors themselves causes temperature changes on the windward and leeward sides, and these temperature changes depend on the amounts of heat generated by the temperature detecting resistors. The amounts of heat generated by the temperature detecting resistors depend on a voltage value of the ECU power source applied to the temperature detecting resistors, and an error is caused in a sensor output depending on a variation in the voltage of the ECU power source. Based on the finding that suppressing the amount of heat generated by the temperature detecting resistors is effective in avoiding the sensor output error caused depending on a variation in the output voltage of the ECU power source, means for suppressing the amount of heat generated by the temperature detecting resistors is disposed.
摘要翻译：一种能够在汽车中使用ECU的电源而不需要昂贵的保护电路和调节器的加热电阻流量测量装置。温度检测电阻本身的加热引起迎风侧风和背风侧的温度变化，这些温度变化取决于温度检测电阻产生的热量。由温度检测电阻器产生的热量取决于施加到温度检测电阻器的ECU电源的电压值，并且根据ECU电源的电压变化在传感器输出中引起误差。基于这样的发现，抑制由温度检测电阻产生的热量对于避免根据ECU电源的输出电压的变化而导致的传感器输出误差是有效的，用于抑制由温度产生的热量的装置设置检测电阻器。

39. 发明授权

US07010971B2 Heating resistor type flow-measuring device having a heating resistor and a thermoresistance, whose resistance value varies in response to the ambient temperature 有权
标题翻译：具有加热电阻器和耐热电阻的加热电阻器型流量测量装置，其电阻值响应于环境温度而变化
公开(公告)号：US07010971B2
公开(公告)日：2006-03-14
申请号：US10921206
申请日：2004-08-19
申请人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Izumi Watanabe , Keiji Hanzawa , Ryo Sato
发明人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Izumi Watanabe , Keiji Hanzawa , Ryo Sato
IPC分类号： G01F1/68
CPC分类号： G01F1/692 , G01F1/6845 , G01F1/699 , G01K7/20
摘要： A heating resistor type flow-measuring device is capable of adjusting heating temperature of a heating resistor according to the ambient temperature as well as making the initial adjustment. A heating resistor, a thermoresistance, a group of the resistors, and an amplifier constitute a bridge circuit, and leading terminals of the group of resistors are connected to one of input terminals of an amplifier for amplifying an error voltage through MOS transistors. The heating temperature of the heating resistor can be changed by selecting one of the MOS transistors and turning it on.
摘要翻译：加热电阻式流量测量装置能够根据环境温度调节加热电阻器的加热温度，并进行初始调整。加热电阻器，热电阻器，一组电阻器和放大器构成桥式电路，并且该组电阻器的引线端子连接到放大器的一个输入端子，用于通过MOS晶体管放大误差电压。可以通过选择一个MOS晶体管并将其加热来改变加热电阻器的加热温度。

40. 发明授权

US06904379B1 Thermal air flowmeter 有权
标题翻译：热空气流量计
公开(公告)号：US06904379B1
公开(公告)日：2005-06-07
申请号：US10221577
申请日：2000-09-04
申请人： Keiji Hanzawa , Masahiro Matsumoto , Shinya Igarashi
发明人： Keiji Hanzawa , Masahiro Matsumoto , Shinya Igarashi
IPC分类号： G01F1/696 , G01F1/698 , G01F1/00 , G01F23/00 , G06F19/00
CPC分类号： G01F1/6965 , G01F1/698
摘要： A thermal type air flowmeter arranges a temperature-dependent heating resistance element in an air flow path and measures the air flow rate from the output of a gauge circuit containing the heating resistance element. A calculation circuit in the flowmeter is provided for correcting the output characteristic by a polynomial expression higher than a quadratic expression. Thereby, high flowmeter measuring accuracy is achieved in lieu of laser trimming and with small-scale circuit composition.
摘要翻译：热式空气流量计在气流路径中设置与温度相关的加热电阻元件，并且从包含加热电阻元件的量规电路的输出测量空气流量。提供流量计中的计算电路，用于通过高于二次表达式的多项式表达式校正输出特性。因此，实现了高流量计测量精度以代替激光修整和小规模电路组成。

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