专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

31. 发明申请

US20080056628A1 Active oscillation isolation system by means of a hysteresis-free pneumatic bearing 有权
标题翻译：主动振荡隔离系统采用无滞后气动轴承
公开(公告)号：US20080056628A1
公开(公告)日：2008-03-06
申请号：US11839383
申请日：2007-08-15
申请人： Peter Heiland
发明人： Peter Heiland
IPC分类号： F16C32/06 , H03M1/20
CPC分类号： F16F15/0275 , F16F15/002 , G03F7/709
摘要： Method and arrangement for oscillation isolation by means of an air bearing. The electropneumatic valves (4) for the compressed-air supply to the air bearing are subjected to a dither signal. This causes additional vibration of the mass 1 to be isolated. A compensation signal transmitter (12) ensures that additional vibration of the mass (1) is suppressed, by controlling actuators (10). Overall, hysteresis effects are avoided in the control of the compressed-air flow.
摘要翻译：通过空气轴承进行振动隔离的方法和装置。用于向空气轴承供应的压缩空气的电动气动阀（4）经受抖动信号。这导致质量块1的额外振动被隔离。补偿信号发送器（12）通过控制致动器（10）来确保质量（1）的附加振动被抑制。总之，在压缩空气流的控制中避免了滞后效应。

32. 发明申请

US20080012559A1 Magnetic filed compensation system with increased bandwidth 有权
标题翻译：磁场补偿系统带宽增加
公开(公告)号：US20080012559A1
公开(公告)日：2008-01-17
申请号：US11770948
申请日：2007-06-29
申请人： Peter Heiland
发明人： Peter Heiland
IPC分类号： G01R33/04
CPC分类号： G01R33/02
摘要： The invention relates to a device for compensating for magnetic fields which has two sensors which are active in different frequency ranges and thus allows regulation with a bandwidth from 0 to 20 kHz.
摘要翻译：本发明涉及一种用于补偿磁场的装置，该装置具有两个在不同频率范围内有效的传感器，从而允许以0至20kHz的带宽进行调节。

33. 发明申请

US20070233325A1 Method and apparatus for regulating vibration isolation systems 有权
标题翻译：用于调节隔振系统的方法和装置
公开(公告)号：US20070233325A1
公开(公告)日：2007-10-04
申请号：US11692918
申请日：2007-03-29
申请人： Peter Heiland
发明人： Peter Heiland
IPC分类号： G05D19/00
CPC分类号： F16F15/002 , G05B5/01
摘要： The invention relates to the control and regulation of a vibration isolation system with a number of vibration signal transducers for providing analogue sensor signals and a number of actuators for suppressing vibrations by processing the sensor signals to form actuator actuation signals for driving the actuators. One object of the invention is to demonstrate a way which enables high-quality parameterizability and regulating performance over a considerably wider frequency bandwidth of a vibration isolation system to be regulated. The invention proposes digitizing some of the sensor signals provided and processing them to form digital actuator actuation signals and processing other sensor signals provided in an analogue manner to form analogue actuator actuation signals and combining the digital actuator actuation signals and the analogue actuator actuation signals to form common actuator actuation signals which are supplied to the actuators in order to drive them.
摘要翻译：本发明涉及具有多个用于提供模拟传感器信号的振动信号传感器的振动隔离系统的控制和调节，以及用于通过处理传感器信号来形成用于驱动致动器的致动器致动信号来抑制振动的多个致动器。本发明的一个目的是演示一种能够在要调节的隔振系统的相当宽的频率带宽上实现高质量参数化和调节性能的方式。本发明提出数字化所提供的一些传感器信号并对其进行处理以形成数字致动器致动信号并且处理以模拟方式提供的其它传感器信号，以形成模拟致动器致动信号并组合数字致动器致动信号和模拟致动器致动信号以形成通常的致动器致动信号被提供给致动器以驱动它们。

34. 发明申请

US20070052946A1 Supporting device for supporting vibration sensitive components 有权
标题翻译：支持振动敏感元件的支撑装置
公开(公告)号：US20070052946A1
公开(公告)日：2007-03-08
申请号：US11457582
申请日：2006-07-14
申请人： Peter Heiland
发明人： Peter Heiland
IPC分类号： G03B27/42 , G03B27/62 , F16M13/00 , G03B27/64
CPC分类号： F16F15/04 , F16F15/0275 , G03F7/70716 , G03F7/709
摘要： The invention is in particular a supporting device for relative supporting loads with respect to a base comprising a load side part, a base side part, and an intermediate part giving support to the load side part, and thus defining a supporting direction with reference to the base and the load side, including a pressure chamber bounded by chamber walls.
摘要翻译：本发明特别地涉及一种用于相对于基座的相对承载负载的支撑装置，该基座包括负载侧部分，基部侧部分和向负载侧部分提供支撑的中间部分，并且因此限定了支撑方向基座和负载侧，包括由室壁限定的压力室。

35. 发明申请

US20050076725A1 Method and apparatus of vibration isolation, in particular for electron beam metrology tools 有权
标题翻译：振动隔离的方法和装置，特别是电子束计量工具
公开(公告)号：US20050076725A1
公开(公告)日：2005-04-14
申请号：US10949069
申请日：2004-09-24
申请人： Peter Heiland
发明人： Peter Heiland
IPC分类号： G01B15/00 , F16F15/02 , G01B21/00 , G01N23/225 , G05D19/02 , H01J37/02 , H01J37/20 , H01J37/26 , G21K5/10 , G01D11/10
CPC分类号： H01J37/20 , H01J37/02 , H01J2237/0216
摘要： There is provided a method and an apparatus for isolating mechanical vibrations reacting to beam metrology tools. The apparatus includes an outer structure for supporting a metrology instrument, and a chuck for holding a specimen with respect to the metrology instrument in an intended defined position for performing measurements on the specimen by the metrology instrument,. The apparatus also includes at least one active vibration isolator means coupled to the chuck for compensating relative movement between the specimen and the metrology instrument. A method is also provided that includes detecting a change of position of the specimen in response to mechanical vibrations, and effectuating an active modification of the position of the chuck in response to the detection for counteracting a relative displacement between the specimen and the metrology instrument.
摘要翻译：提供了一种用于隔离对梁计量工具反应的机械振动的方法和装置。该装置包括用于支撑计量仪器的外部结构和用于相对于计量仪器将样本保持在用于由计量仪器对样本进行测量的预定限定位置的卡盘。该装置还包括耦合到卡盘的至少一个主动隔振装置，用于补偿试样和计量仪器之间的相对运动。还提供了一种方法，其包括响应于机械振动来检测样本的位置变化，并且响应于用于抵消样本和计量仪器之间的相对位移的检测而实现卡盘的位置的有效修改。

36. 发明授权

US06758312B2 Apparatus and method for vibration-isolating bearing of loads 有权
标题翻译：负载隔振轴承的装置和方法
公开(公告)号：US06758312B2
公开(公告)日：2004-07-06
申请号：US10131297
申请日：2002-04-23
申请人： Peter Heiland
发明人： Peter Heiland
IPC分类号： H01J3700
CPC分类号： F16F15/005 , F16F15/08
摘要： An active system for isolating vibrations includes: at least one first vibratio-isolating device, arranged between a load and a sstanding surface, for at least partially decoupling the static and dynamic forces acting between the load and the standing surface, the first vibration-isolating device includes a passively isolating coupling element for mechanically decoupling the static and dynamic forces including a natural frequency; at least one second vibration-isolating device, assigned to the load, for imparting control forces to the load for actively damping the substantially decoupled dynamic forces, the second fibratio-isolating device including a coupling element for dynamically coupling said second vibration-isolating device to the load and the first isolating device
摘要翻译：用于隔离振动的主动系统包括：至少一个第一振动隔离装置，布置在负载和听表面之间，用于至少部分地解耦作用在负载和站立表面之间的静态和动态力，第一隔振装置包括用于机械地去耦合包括固有频率的静态力和动态力的被动隔离耦合元件; 分配给所述负载的至少一个第二隔振装置，用于向所述负载施加控制力以主动地阻尼所述基本上分离的动态力，所述第二纤维隔离装置包括用于将所述第二隔振装置动态地联接到负载和第一隔离装置<耦合元件包括固有频率; 用于调节第二振动隔离装置的控制力和固有频率的装置，其中第二隔振装置的控制力和固有频率通过特性曲线来确定，该特性曲线描述了控制力对被动隔离耦合元件的固有频率和固有频率的比值。

37. 发明授权

US08851250B2 Active vibration isolation system 有权
标题翻译：主动隔振系统
公开(公告)号：US08851250B2
公开(公告)日：2014-10-07
申请号：US11697292
申请日：2007-04-05
申请人： Peter Heiland
发明人： Peter Heiland
IPC分类号： F16F7/10 , F16F15/02 , G05D19/02
CPC分类号： G05D19/02 , F16F15/02
摘要： The invention relates to an active vibration isolation system which detects structural vibration of the mass to be isolated via a sensor and also takes account of these disturbance variables.
摘要翻译：本发明涉及一种通过传感器检测待隔离物质的结构振动的主动隔振系统，并且还考虑了这些干扰变量。

38. 发明授权

US08751050B2 Combined motion control system 有权
标题翻译：组合运动控制系统
公开(公告)号：US08751050B2
公开(公告)日：2014-06-10
申请号：US11927244
申请日：2007-10-29
申请人： Peter Heiland
发明人： Peter Heiland
IPC分类号： G05D23/00 , G05B13/02 , G06F19/00 , G06F7/00 , F16M13/00 , G21K5/10
CPC分类号： G03F7/709 , G03F7/70525 , G03F7/70725
摘要： An examination and processing machine, in particular a lithography appliance, for use in the semiconductor industry, comprising a machine frame (1), an examination or processing device (5) for a work piece (4), a carriage (3) which is mounted on the machine frame (1) and can hold the work piece (4), a handling device (6) for positioning the work piece (4) on the carriage (3) and for removing it from the carriage (3), a series of oscillation isolators (2) for low-oscillation mounting of the machine frame (1), and individual control devices (30, 40, 20) for controlling the carriage (3), the handling device (6) and the oscillation isolators (2). These control devices (20, 30, 40) are subordinate to an overall control device (50), which acts as a host system, via a real-time bus (60).
摘要翻译：一种用于半导体工业的检查和加工机器，特别是光刻设备，包括机架（1），用于工件（4）的检查或处理装置（5），托架（3）安装在机架（1）上并且可以保持工件（4），用于将工件（4）定位在托架（3）上并将其从托架（3）移除的处理装置（6）用于机架（1）的低振荡安装的一系列振动隔离器（2）和用于控制滑架（3）的个别控制装置（30,40,20），操纵装置（6）和振动隔离器 2）。这些控制装置（20,30,40）从属于通过实时总线（60）充当主机系统的总体控制装置（50）。

39. 发明授权

US08282281B2 Air bearing with consideration of high-frequency resonances 有权
标题翻译：考虑高频共振的空气轴承
公开(公告)号：US08282281B2
公开(公告)日：2012-10-09
申请号：US12030811
申请日：2008-02-13
申请人： Peter Heiland
发明人： Peter Heiland
IPC分类号： F16C32/06 , F16F5/00 , F16M11/00
CPC分类号： G03F7/709 , F16C32/0603 , F16C32/0688
摘要： A vertically and horizontally effective air bearing comprising a base, an interface part that is movably arranged on the base, a piston that is movably arranged inside the interface part and supports a load, and a coupling element that couples the piston with the load. The load is supported in a manner to be isolated from vibration in the horizontal and vertical directions with respect to the base, and the coupling element preferably comprises a pin that is coupled to the piston. The coupling element is spaced from the load by at least one quarter of the length of the piston.
摘要翻译：一种垂直和水平有效的空气轴承，包括基座，可移动地设置在基座上的接口部分，活动件，其可移动地布置在接口部分内并支撑负载;以及联接元件，其将活塞与负载相连接。负载以相对于基座在水平和垂直方向上的振动隔离的方式被支撑，并且联接元件优选地包括联接到活塞的销。联接元件与负载间隔活塞长度的至少四分之一。

40. 发明授权

US08170225B2 Method for adapting a vibration isolation system 有权
标题翻译：适应隔振系统的方法
公开(公告)号：US08170225B2
公开(公告)日：2012-05-01
申请号：US12030806
申请日：2008-02-13
申请人： Peter Heiland
发明人： Peter Heiland
IPC分类号： G10K11/16 , G10K11/178 , F16F15/03 , G10K1/00 , F16F15/00
CPC分类号： F16F15/02 , G03F7/709
摘要： The invention relates to a method for adapting a vibration isolation system as well as to an arrangement with a vibration isolation system. By constructive measures in the environment of the vibration isolation system, particularly plane-parallel surfaces areas are avoided and thereby disturbing environmental influences are reduced.
摘要翻译：本发明涉及一种用于适应隔振系统以及具有隔振系统的装置的方法。通过在隔振系统的环境中的建设性措施，特别是平面平行的表面区域被避免，从而减少了对环境的影响。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式