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    • 33. 发明授权
    • Batch fabricated servo write head having low write-gap linewidth
variation
    • 具有低写入间隙线宽变化的批量制造的伺服写入头
    • US6018444A
    • 2000-01-25
    • US959509
    • 1997-10-28
    • Patricia A. BeckPaul W. PoormanGeorge M. Clifford, Jr.Richard H. Henze
    • Patricia A. BeckPaul W. PoormanGeorge M. Clifford, Jr.Richard H. Henze
    • G11B5/127G11B5/187G11B5/48G11B5/584G11B15/62G11B5/23
    • G11B5/187G11B15/62G11B5/584G11B5/1871G11B5/4893Y10T29/49032Y10T29/49043Y10T29/49048Y10T29/49055Y10T29/4906Y10T29/49789Y10T29/49798
    • A batch fabrication technique is described that increases the manufacturing efficiency of servo write heads and also improves servo pattern definition for fine features, while reducing tape and head wear. Multiple heads are fabricated as a batch from one or more ferrite wafers. A nominally flat, large wafer surface and a contour suitable for uniform photoresist application and planar photolithography permit fine servo pattern definition with low linewidth variation. Non-magnetic material is photolithographically defined to produce gaps above the spacer. The non-magnetic material may be photoresist, semiconductor materials, glass, metal or the like. The material may even be removed later to leave air gaps. The non-magnetic material forms a region where the field loops out to intersect the passing tape, thereby transferring a magnetic pattern to tape. Additionally, a lower ferrite wafer may be mated to the upper ferrite wafer to complete a magnetic circuit around the gaps. The upper or lower ferrite wafer may have a channel through which an inductive winding passes. Multiple heads may be formed through batch processing of the upper and lower ferrite wafers.
    • 描述了一种批量制造技术,其提高了伺服写入头的制造效率,并且还改善了精细特征的伺服模式定义,同时减少了磁带和磁头磨损。 多个头部从一个或多个铁氧体晶片制成批次。 标称平坦,大的晶片表面和适用于均匀光刻胶应用和平面光刻的轮廓允许具有低线宽变化的精细伺服模式定义。 非磁性材料被光刻定义以在间隔物上方产生间隙。 非磁性材料可以是光致抗蚀剂,半导体材料,玻璃,金属等。 材料甚至可以稍后移除以留下空隙。 非磁性材料形成区域,其中磁场循环出来以与通过的磁带相交,从而将磁性图案转印到磁带上。 此外,下部铁氧体晶片可以与上部铁氧体晶片配合,以在该间隙周围形成磁路。 上或下铁素体晶片可以具有感应绕组通过的通道。 可以通过上下铁素体晶片的批量处理形成多个头。