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    • 32. 发明申请
    • Manufacturing method of composite sheet material using ultrafast laser pulses
    • 使用超快激光脉冲的复合片材的制造方法
    • US20060267211A1
    • 2006-11-30
    • US11501542
    • 2006-08-09
    • Chen-Hsiung ChengXinbing LiuAtsushi SogamiKazuo Nishimura
    • Chen-Hsiung ChengXinbing LiuAtsushi SogamiKazuo Nishimura
    • H01L23/48
    • H01L51/0017H01L51/0009H01L51/56Y10S438/94
    • A patterned, multi-layered thin film structure is patterned using ultra-fast lasers and absorption spectroscopy without damaging underlying layers of the layered structure. The structure is made by selecting ablatable layers based on their thermal, strength and absorption spectra and by using an ultra-fast laser programmed with the appropriate wavelength (λ), pulse width (τ), spectral width (Δλ), spot size, bite size and fluence. The end structure may have features (such as vias, insulating areas, or inkjet printed areas) patterned in the last (top) layer applied or at deeper layers within the layered structure, and can be used as components of organic light emitting didoes (OLEDs) and organic thin film transistors (OTFTs). The method of the present invention includes determining the product's specifications, providing a substrate, selecting a layer, applying the layer, patterning the layer and determining if more layers need to be added to the multi-layered thin film structure.
    • 使用超快速激光和吸收光谱对图案化的多层薄膜结构进行图案化,而不会损坏层状结构的下层。 该结构通过基于它们的热,强度和吸收光谱选择可烧蚀层并通过使用用适当波长(λ),脉冲宽度(τ),光谱宽度(Deltalambda),斑点大小,咬合而编程的超快激光 大小和注量。 端部结构可以具有在分层结构中施加的最后(顶部)层中或更深层上图案化的特征(例如通孔,绝缘区域或喷墨印刷区域),并且可以用作有机发光二极管(OLED) )和有机薄膜晶体管(OTFT)。 本发明的方法包括确定产品的规格,提供衬底,选择一层,施加该层,图案化层,以及确定是否需要将更多的层加入多层薄膜结构中。