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    • 37. 发明授权
    • Optoelectronic semiconductor device with mesa
    • 光电半导体器件与台面
    • US5408105A
    • 1995-04-18
    • US19223
    • 1993-02-18
    • Hideo AdachiKenichi Matsuda
    • Hideo AdachiKenichi Matsuda
    • H01S5/026H01S5/183H01S5/42H01L33/00
    • H01S5/423H01S5/0261H01S5/0262H01S5/18305H01S5/18341
    • There are disclosed a low driving voltage surface emitting semiconductor laser and an optoelectronic integrated which comprises a two-dimensional array of such surface emitting semiconductor lasers which are modulatable with input signals of small voltage amplitudes. In an embodiment of the present invention, an optical semiconductor device includes a GaAs substrate 105, and an epitaxial growth layer structure on the GaAs substrate, the epitaxial growth layer structure including in the named order a p type GaAs/AlAs multilayer semiconductor mirror layer 104, an active layer 103 and an n type GaAs/AlAs multilayer semiconductor mirror layer 102. The epitaxial growth layer structure is etched to the depth of the active layer in forming a mesa, while the p type mirror layer remains unetched throughout a top surface of the semiconductor substrate.
    • 公开了低驱动电压表面发射半导体激光器和光电集成,其包括这样的表面发射半导体激光器的二维阵列,其可以用小的电压幅度的输入信号进行调制。 在本发明的一个实施例中,光学半导体器件包括GaAs衬底105和GaAs衬底上的外延生长层结构,外延生长层结构包括按照命名顺序ap型GaAs / AlAs多层半导体镜层104, 有源层103和n型GaAs / AlAs多层半导体镜层102.外延生长层结构在形成台面时蚀刻到有源层的深度,而p型反射镜层在整个顶表面保持未蚀刻 半导体衬底。