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    • 40. 发明授权
    • Method of producing anti-corrosion member and anti-corrosion member
    • 生产防腐蚀部件和防腐蚀部件的方法
    • US06406799B1
    • 2002-06-18
    • US09494987
    • 2000-01-31
    • Yasufumi AiharaKeiichiro WatanabeKiyoshi Araki
    • Yasufumi AiharaKeiichiro WatanabeKiyoshi Araki
    • B21D3900
    • C23C8/06C23C8/62Y10T428/12556
    • A base member made of a metal in which aluminum is included, ceramics in which an aluminum element is included, or a composition member constructed by a metal in which aluminum and ceramics are included, is provided in a container in which a solid fluorine compound such as NaHF2 is filled. Then, the container is heated at a temperature higher than a decomposition temperature of the solid fluorine compound. After that, the base member is subjected to a heat treatment with the decomposed gas of the solid fluorine compound to form a fluoride layer on a surface of the base member. In this manner, it is possible to obtain an anti-corrosion member which shows a high corrosion property with respect to the corrosion gas of halogen series and its plasma, particularly with respect to chlorine gas and its plasma.
    • 在其中包含固体氟化合物的容器中设置由包含铝的金属制成的基材,包含铝元素的陶瓷或包含铝和陶瓷的金属构成的组合物构件 因为填充了NaHF2。 然后,在高于固体氟化合物的分解温度的温度下加热容器。 之后,用固体氟化合物的分解气体对基材进行热处理,在基材的表面形成氟化物层。 以这种方式,可以获得相对于卤素系列及其等离子体的腐蚀气体具有高腐蚀性的防腐蚀部件,特别是对于氯气及其等离子体。