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    • 31. 发明申请
    • LIGHT DETECTION DEVICE
    • 光检测装置
    • US20140291486A1
    • 2014-10-02
    • US14350647
    • 2012-08-02
    • Terumasa NaganoNoburo HosokawaTomofumi SuzukiTakashi Baba
    • Terumasa NaganoNoburo HosokawaTomofumi SuzukiTakashi Baba
    • H01L27/144
    • H01L27/14643H01L27/1446H01L27/14618H01L27/14636H01L27/14658H01L31/107
    • A light detection device 1 has a semiconductor light detection element having a semiconductor substrate, and a mounting substrate arranged as opposed to the semiconductor light detection element. The semiconductor light detection element includes a plurality of avalanche photodiodes operating in Geiger mode and formed in the semiconductor substrate, and electrodes electrically connected to the respective avalanche photodiodes and arranged on a second principal surface side of the semiconductor substrate. The mounting substrate includes a plurality of electrodes arranged corresponding to the respective electrodes on a third principal surface side, and quenching resistors electrically connected to the respective electrodes and arranged on the third principal surface side. The electrodes and the electrodes are connected through bump electrodes.
    • 光检测装置1具有半导体光检测元件,该半导体光检测元件具有半导体衬底和与半导体光检测元件相对布置的安装衬底。 半导体光检测元件包括以Geiger模式操作并形成在半导体衬底中的多个雪崩光电二极管,以及电连接到各个雪崩光电二极管并且布置在半导体衬底的第二主表面侧上的电极。 安装基板包括在第三主面侧对应于各个电极布置的多个电极,并且电连接到各个电极并且布置在第三主表面侧上的淬火电阻。 电极和电极通过凸块电极连接。
    • 37. 发明申请
    • OPTICAL MODULE
    • 光学模块
    • US20100188728A1
    • 2010-07-29
    • US12689413
    • 2010-01-19
    • Yoshihisa WARASHINATomofumi Suzuki
    • Yoshihisa WARASHINATomofumi Suzuki
    • G02B26/00
    • B81B7/0067B81B2201/042B81B2207/096G01B9/02051
    • An optical module 1A is an optical module, which is manufactured from an SOI substrate having a support substrate 10 and a semiconductor layer 14 disposed on a surface 10a of the support substrate 10 via an insulating layer 12, the optical module including a movable mirror 22 in which a mirror surface 22a is formed on a side face intersecting with a Y-direction, that is movable in the Y-direction, a photodiode 32 which is provided on the surface 10a of the support substrate 10, and is optically coupled to the mirror surface 22a of the movable mirror 22, a cap member 34 which is provided on the surface 10a of the support substrate 10, that airtight-seals the movable mirror 22 and the photodiode 32, and an element electrode part 36 which is provided through the support substrate 10 and the insulating layer 12, and is electrically connected to the photodiode 32. Thereby, it is possible to realize an optical module which is capable of enhancing the airtightness of an optical system including a movable mirror, and which also can be downsized.
    • 光学模块1A是通过绝缘层12由具有支撑基板10和配置在支撑基板10的表面10a上的半导体层14的SOI基板制造的光学模块,该光学模块包括可移动反射镜22 其中镜面22a形成在与Y方向上可移动的Y方向的侧面上,设置在支撑基板10的表面10a上的光电二极管32,并且光学耦合到 可动镜22的镜面22a,设置在支撑基板10的表面10a上的盖构件34,气密密封可动镜22和光电二极管32,元件电极部36通过 支撑基板10和绝缘层12,并且电连接到光电二极管32.因此,可以实现能够增强光学系统的气密性的光学模块,包括 并且还可以减小尺寸。