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    • 34. 发明授权
    • Method for forming self-aligned landing pads
    • 用于形成自对准着陆垫的方法
    • US6090695A
    • 2000-07-18
    • US145926
    • 1998-09-03
    • Jin-Hwa LeeChia-Wen Liang
    • Jin-Hwa LeeChia-Wen Liang
    • H01L21/60H01L21/768H01L21/44
    • H01L21/76897H01L21/76895
    • A method for forming self-aligned landing pads on a substrate containing a pre-formed first conducting layer and a pre-formed first insulator, wherein the substrate further includes a patterned second insulator to form contact openings exposing the substrate. A second conducting layer in formed on the substrate. A photoresist layer is formed on the second conducting layer and patterned to transfer the pattern onto the second conducting layer. The second conducting layer is patterned to expose the first insulator. Then, an etching back process is performed to selectively remove more of the second conducting layer in order to form the self-aligned landing pads.
    • 一种用于在包含预先形成的第一导电层和预成形的第一绝缘体的衬底上形成自对准着色焊盘的方法,其中所述衬底还包括图案化的第二绝缘体以形成暴露所述衬底的接触开口。 在基板上形成的第二导电层。 光致抗蚀剂层形成在第二导电层上并被图案化以将图案转移到第二导电层上。 将第二导电层图案化以暴露第一绝缘体。 然后,执行蚀刻回加工以选择性地去除更多的第二导电层,以便形成自对准着陆焊盘。
    • 35. 发明授权
    • Method for fabricating crown-shaped DRAM capacitor
    • 制造冠状DRAM电容器的方法
    • US5866450A
    • 1999-02-02
    • US991621
    • 1997-12-16
    • Jin-Hwa Lee
    • Jin-Hwa Lee
    • H01L21/8242H01L27/108
    • H01L27/10852H01L27/10817
    • A method for fabricating a crown-shaped DRAM capacitor comprising the steps of providing a substrate having transistors already formed thereon, then sequentially forming a first insulating layer and a second insulating layer over the substrate and the transistors. The second insulating layer has an upper opening that exposes portions of the first insulating layer, and the first insulating layer has a contact opening that exposes a source/drain region in the substrate. Thereafter, a first conducting layer is formed over the second insulating layer and the exposed first insulating layer. Then, spacers are formed on the sidewalls of the first conducting layer. Next, a second conducting layer is deposited over the first conducting layer and the spacers. Subsequently, the second conducting layer is etched to form conducting pillars next to the spacers. Finally, the spacers and the second insulating layer are removed to form a crown-shaped lower electrode for the capacitor. This invention allows a lower electrode having a large surface area. Therefore, a capacitor with high capacitance is obtained.
    • 一种用于制造冠状DRAM电容器的方法,包括以下步骤:提供其上已经形成有晶体管的衬底,然后在衬底和晶体管上依次形成第一绝缘层和第二绝缘层。 第二绝缘层具有暴露第一绝缘层的部分的上部开口,并且第一绝缘层具有暴露基板中的源极/漏极区域的接触开口。 此后,在第二绝缘层和暴露的第一绝缘层上形成第一导电层。 然后,在第一导电层的侧壁上形成间隔物。 接下来,在第一导电层和间隔物上沉积第二导电层。 随后,蚀刻第二导电层以在隔板旁边形成导电柱。 最后,去除间隔物和第二绝缘层以形成用于电容器的冠状下电极。 本发明允许具有大表面积的下电极。 因此,获得具有高电容的电容器。
    • 37. 发明授权
    • Fuel cell system and stack thereof
    • 燃料电池系统及其堆叠
    • US08802306B2
    • 2014-08-12
    • US13164547
    • 2011-06-20
    • Sang-Il HanKah-Young SongJin-Hwa LeeMyoung-Ki MinYoung-Mi Park
    • Sang-Il HanKah-Young SongJin-Hwa LeeMyoung-Ki MinYoung-Mi Park
    • H01M8/06H01M8/10H01M8/04H01M8/02
    • H01M8/04119H01M8/0247H01M8/1007Y02E60/521
    • A fuel cell system having improved driving performance is disclosed. The fuel cell system includes a stack, which may include a membrane electrode assembly, a separator and end plates provided on the both sides of the stacked membrane electrode assembly and the separator. The membrane electrode assembly may include an anode electrode, a cathode electrode, and an electrolyte membrane. The separator may be positioned with respect to the anode electrode and the cathode electrode, respectively. The end plate may include an oxidant inlet configured to supply oxidant to the cathode electrode, an unreacted oxidant outlet configured to output the unreacted oxidant from the cathode electrode, and a absorption member in fluid communication between the oxidant inlet and the unreacted oxidant outlet.
    • 公开了一种具有改进的驱动性能的燃料电池系统。 燃料电池系统包括堆叠,其可以包括设置在层叠的膜电极组件和分离器两侧的膜电极组件,分离器和端板。 膜电极组件可以包括阳极电极,阴极电极和电解质膜。 分离器可以分别相对于阳极电极和阴极电极定位。 端板可以包括被配置为向阴极电极供应氧化剂的氧化剂入口,构造成从阴极电极输出未反应的氧化剂的未反应氧化剂出口,以及在氧化剂入口和未反应的氧化剂出口之间流体连通的吸收构件。
    • 40. 发明申请
    • FUEL CELL STACK
    • 燃料电池堆
    • US20110305960A1
    • 2011-12-15
    • US12950957
    • 2010-11-19
    • Kah-Young SongSang-Il HanJin-Hwa LeeHee-Tak KimTae-Yoon KimSung-Yong ChoMyoung-Ki MinGeun-Seok Chai
    • Kah-Young SongSang-Il HanJin-Hwa LeeHee-Tak KimTae-Yoon KimSung-Yong ChoMyoung-Ki MinGeun-Seok Chai
    • H01M8/06H01M8/24
    • H01M8/0258H01M8/0267H01M8/04089H01M8/24H01M2008/1095
    • A fuel cell stack configured to alleviate pressure and decrease the flow rate of at least one of a fuel and an oxidant is disclosed. The fuel cell stack includes a membrane-electrode assembly, an anode separator, a cathode separator and a filing member. The membrane-electrode assembly may include an electrolyte membrane, an anode formed on a first surface of the electrolyte membrane, and a cathode formed on a second surface of the electrolyte membrane. The anode separator may include a fuel channel, a fuel inlet manifold in fluid communication with the fuel channel, and a fuel outlet manifold in fluid communication with the fuel channel. The cathode separator may include an oxidant channel, an oxidant inlet manifold in fluid communication with the oxidant channel, and an oxidant outlet manifold in fluid communication with the oxidant channel. The filling member may be positioned within at least one of the fuel inlet manifold and the oxidant inlet manifold.
    • 公开了一种构造成减轻压力并降低燃料和氧化剂中的至少一种的流量的燃料电池堆。 燃料电池堆包括膜 - 电极组件,阳极分离器,阴极分离器和归档构件。 膜 - 电极组件可以包括电解质膜,形成在电解质膜的第一表面上的阳极和形成在电解质膜的第二表面上的阴极。 阳极分离器可以包括燃料通道,与燃料通道流体连通的燃料入口歧管以及与燃料通道流体连通的燃料出口歧管。 阴极分离器可以包括氧化剂通道,与氧化剂通道流体连通的氧化剂入口歧管和与氧化剂通道流体连通的氧化剂出口歧管。 填充构件可以位于燃料入口歧管和氧化剂入口歧管中的至少一个内。