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    • 35. 发明授权
    • Film forming apparatus and jetting nozzle
    • 成膜装置和喷嘴
    • US07866578B2
    • 2011-01-11
    • US11467039
    • 2006-08-24
    • Motohiro YasuiJun Akedo
    • Motohiro YasuiJun Akedo
    • B05B1/14
    • B05B7/1486B05B7/0012B05B7/025B05B7/1404B05B7/1472C23C4/00C23C4/02C23C4/04C23C4/073C23C4/18C23C30/00
    • A film forming apparatus includes an aerosol generating section which generates an aerosol; a jetting nozzle having an internal passage formed therein and through which the aerosol flows, the internal passage having one end serving as a supply port of the aerosol and having other end serving as a jetting port of the aerosol; a narrowed channel which is provided in the internal passage and which has a channel area narrower than a channel area on an upstream of the narrowed channel; and a collision portion which is provided in the internal passage on a downstream of the narrowed channel, and against which a flow of the aerosol passed through the narrowed channel collides. Since the aggregated particles are crushed and supplied from the jetting nozzle in the form of fine particles, a thin and uniform film can be formed on the process-objective material.
    • 成膜装置包括产生气溶胶的烟雾发生部, 喷嘴,其内部通道形成在其中并且气溶胶通过该喷嘴喷嘴,内部通道具有一端用作气溶胶的供应口,另一端用作气溶胶的喷射口; 所述通道设置在所述内部通路中,并且具有比所述变窄通道的上游侧的通道区域窄的通道区域; 以及碰撞部分,其在所述内部通道中设置在所述狭窄通道的下游,并且所述气溶胶流过所述狭窄通道的流动与所述碰撞部分碰撞。 由于聚集的颗粒被粉碎并以细颗粒的形式从喷射嘴供应,所以可以在工艺目标材料上形成薄而均匀的膜。
    • 38. 发明授权
    • Light-beam scanning device
    • 光束扫描装置
    • US07394583B2
    • 2008-07-01
    • US11258103
    • 2005-10-26
    • Jun AkedoLebedev Maxim
    • Jun AkedoLebedev Maxim
    • G02B26/08G06K7/10
    • G02B26/0858G02B26/085
    • A light-beam scanning device includes a base plate having a torsion beam portion formed therein, and a mirror portion supported by the torsion beam portion and adapted to be oscillated. The light-beam scanning device includes one of a piezoelectric member, a magnetostrictive member and a permanent magnet member, which is fixed to or formed as a portion of the base plate. The mirror portion supported by the torsion beam portion is oscillated by a plate wave that is induced in the base plate by applying a voltage or electric field to the piezoelectric, magnetostrictive or permanent magnet member. The light-beam scanning device can efficiently generate a torsional oscillation in the mirror portion in a simplified structure.
    • 光束扫描装置包括其中形成有扭转梁部分的基板和由扭转梁部分支撑并适于摆动的反射镜部分。 光束扫描装置包括固定到基板或形成为基板的一部分的压电元件,磁致伸缩元件和永久磁铁元件中的一种。 由扭转梁部分支撑的镜面部分通过在压电,磁致伸缩或永磁体构件施加电压或电场而在基板中感应的平板波振荡。 光束扫描装置可以以简化的结构有效地在反射镜部分产生扭转振荡。