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31. 发明授权

US06911136B2 Method for regulating the electrical power applied to a substrate during an immersion process 有权
标题翻译：用于调节在浸入过程中施加到基底的电功率的方法
公开(公告)号：US06911136B2
公开(公告)日：2005-06-28
申请号：US10135546
申请日：2002-04-29
申请人： Bo Zheng , Rajeev Bajaj , Zhonghui Alex Wang
发明人： Bo Zheng , Rajeev Bajaj , Zhonghui Alex Wang
IPC分类号： C25D7/12 , C25D21/12 , H01L21/288 , H01L21/768
CPC分类号： C25D7/123 , C25D17/001 , C25D21/12 , H01L21/2885 , H01L21/76877
摘要： A method and apparatus for providing a uniform current density across an immersed surface of a substrate during an immersion process. The method includes the steps of determining a time varying area of an immersed portion of the substrate during the immersion process, and supplying a time varying current to the substrate during the immersion process, wherein the time varying current is proportional to the time varying area and is configured to provide a constant current density to the immersed portion of the substrate.
摘要翻译：一种用于在浸入工艺期间在衬底的浸入表面上提供均匀电流密度的方法和装置。该方法包括以下步骤：在浸入过程期间确定衬底的浸入部分的时变面积，以及在浸入过程期间向衬底提供时变电流，其中时变电流与时变面积成正比，被配置为向衬底的浸没部分提供恒定的电流密度。

32. 发明授权

US6050506A Pattern of apertures in a showerhead for chemical vapor deposition 失效
标题翻译：用于化学气相沉积的喷头中的孔的图案
公开(公告)号：US6050506A
公开(公告)日：2000-04-18
申请号：US23437
申请日：1998-02-13
申请人： Xin Sheng Guo , Keith Koai , Ling Chen , Mohan K. Bhan , Bo Zheng
发明人： Xin Sheng Guo , Keith Koai , Ling Chen , Mohan K. Bhan , Bo Zheng
IPC分类号： C23C16/44 , C23C16/455 , B05B1/14
CPC分类号： C23C16/45565 , C23C16/455
摘要： A showerhead used for dispensing gas over a wafer in chemical vapor deposition (CVD), especially for CVD of metals. The patterns of holes is tailored to compensate for thermal and other effects, in particular by increasing the density of holes toward the periphery of the wafer in three or more zones. Such a variable pattern is particularly useful for liquid precursors that are atomized in a carrier gas, in which case a second perforated plate in back of the showerhead face can be eliminated, thereby reducing the flow impedance and the required pressure of the liquid-entrained gas, which tends to deposit out at higher pressures. The reduce flow impedance is particularly useful for CVD of copper.
摘要翻译：用于在化学气相沉积（CVD）中分散气体在晶片上的喷头，特别是用于金属CVD。孔的图案被定制以补偿热和其他效果，特别是通过在三个或更多个区域中增加朝向晶片周边的孔的密度。这种可变图案对于在载气中被雾化的液体前体特别有用，在这种情况下可以消除喷头表面背面的第二个穿孔板，从而减少液体夹带气体的流动阻抗和所需的压力，其倾向于在较高压力下沉积。减少流阻抗对于铜的CVD特别有用。

33. 发明授权

US09350810B2 Constructing an integrated road network 有权
标题翻译：构建综合道路网
公开(公告)号：US09350810B2
公开(公告)日：2016-05-24
申请号：US13979012
申请日：2011-01-18
申请人： Guiheng Zhou , Yizhen Zhao , Bo Zheng
发明人： Guiheng Zhou , Yizhen Zhao , Bo Zheng
IPC分类号： G06G7/48 , H04L29/08 , G01C21/34 , G01C21/32 , G06F17/50
CPC分类号： H04L67/12 , G01C21/32 , G01C21/3484 , G06F17/509
摘要： Information about different road networks is retrieved from different sources. Applicable rules and parameter values for constructing an integrated road network are determined for each road network. Roads are first extended at their endpoints. Intersection points among the extended roads are detected. Roads are then divided into road segments at the detected intersection points, and shorted by removing road segments extended beyond intersection points. To process a large scale of road information, extended roads are divided into road segments and distributed to reducers based on their geographic locations for the reducers to detect intersection points among the received road segments. The resulting road segments are then distributed to reducers based on the roads they belong to for the reducers to first reassemble the road segments, then divide the reassembled roads at the detected intersection points, and finally remove road segments extended beyond intersection points.
摘要翻译：从不同来源检索有关不同道路网络的信息。为每个道路网络确定用于构建综合道路网络的适用规则和参数值。道路首先在其终点延伸。检测到延长道路之间的交点。然后将道路在检测的交叉点分成道路段，并通过移除超出交叉点的道路段进行短路。为了处理大量的道路信息，扩展道路被划分为道路段，并根据其地理位置分配给减速器，以减少接收路段之间的交点。然后将所得到的路段分配到减速机，基于其所属的道路用于减速机，以首先重新组装路段，然后将重新组装的道路划分在检测的交叉点，最后移除超出交叉点的道路段。

34. 发明申请

US20130290400A1 Constructing an Integrated Road Network 有权
标题翻译：建设综合道路网
公开(公告)号：US20130290400A1
公开(公告)日：2013-10-31
申请号：US13979012
申请日：2011-01-18
申请人： Guiheng Zhou , Yizhen Zhao , Bo Zheng
发明人： Guiheng Zhou , Yizhen Zhao , Bo Zheng
IPC分类号： H04L29/08
CPC分类号： H04L67/12 , G01C21/32 , G01C21/3484 , G06F17/509
摘要： Information about different road networks is retrieved from different sources. Applicable rules and parameter values for constructing an integrated road network are determined for each road network. Roads are first extended at their endpoints. Intersection points among the extended roads are detected. Roads are then divided into road segments at the detected intersection points, and shorted by removing road segments extended beyond intersection points. To process a large scale of road information, extended roads are divided into road segments and distributed to reducers based on their geographic locations for the reducers to detect intersection points among the received road segments. The resulting road segments are then distributed to reducers based on the roads they belong to for the reducers to first reassemble the road segments, then divide the reassembled roads at the detected intersection points, and finally remove road segments extended beyond intersection points.
摘要翻译：从不同来源检索有关不同道路网络的信息。为每个道路网络确定用于构建综合道路网络的适用规则和参数值。道路首先在其终点延伸。检测到延长道路之间的交点。然后将道路在检测的交叉点分成道路段，并通过移除超出交叉点的道路段进行短路。为了处理大量的道路信息，扩展道路被划分为道路段，并根据其地理位置分配给减速器，以减少接收路段之间的交点。然后将所得到的路段分配到减速机，基于其所属的道路用于减速机，以首先重新组装路段，然后将重新组装的道路划分在检测的交叉点，最后移除超出交叉点的道路段。

35. 发明授权

US08429204B2 Short point-of-interest title generation 有权
标题翻译：短期利益标题产生
公开(公告)号：US08429204B2
公开(公告)日：2013-04-23
申请号：US13549340
申请日：2012-07-13
申请人： Jiang Qian , Vincent Zhou , Bo Zheng , Yu Zheng
发明人： Jiang Qian , Vincent Zhou , Bo Zheng , Yu Zheng
IPC分类号： G06F17/30 , G06F17/28
CPC分类号： G06F17/2745
摘要： Short POI titles are generated by removing unnecessary administrative area prefixes from existing POI titles and replacing necessary administrative area prefixes with shorter aliases. Administrative area prefixes are identified and analyzed to determine whether they are necessary. The analysis includes determining (1) whether the remainders with the prefixes excluded include a common suffix as a prefix, and (2) whether the remainders are unique in an applicable metropolis area. If a remainder does not include as a prefix a common suffix and is unique in the applicable metropolis area, the corresponding prefix is determined unnecessary and removed from the existing POI title to generate a short POI title. Otherwise, the corresponding prefix is determined necessary and replaced with a shorter alias to generate a short POI title.
摘要翻译：通过从现有POI标题中删除不必要的管理区域前缀，并用较短的别名替换必要的管理区域前缀来生成简短的POI标题。对行政区域前缀进行识别和分析，以确定它们是否必要。分析包括确定（1）排除前缀的余数是否包括作为前缀的公共后缀，以及（2）在适用的大都会区域中剩余部分是否是唯一的。如果余数不包括作为前缀的公共后缀，并且在适用的大都市区域中是唯一的，则相应的前缀被确定为不必要的并且从现有POI标题中移除以生成短的POI标题。否则，相应的前缀被确定为必需，并用较短的别名替换以生成短的POI标题。

36. 发明授权

US08345927B2 Registration processing apparatus, registration method, and storage medium 有权
标题翻译：注册处理装置，注册方法和存储介质
公开(公告)号：US08345927B2
公开(公告)日：2013-01-01
申请号：US12431193
申请日：2009-04-28
申请人： Ryo Ishikawa , Katsushi Ikeuchi , Jun Takamatsu , Takeshi Ohishi , Bo Zheng
发明人： Ryo Ishikawa , Katsushi Ikeuchi , Jun Takamatsu , Takeshi Ohishi , Bo Zheng
IPC分类号： G06K9/00 , G09G5/00 , A61B6/00
CPC分类号： G06K9/48 , G06T3/00 , G06T3/0068 , G06T7/33 , G06T2207/10072 , G06T2207/10116 , G06T2207/10132 , G06T2207/30004 , G09G5/14 , G09G2340/0414 , G09G2340/0421 , G09G2340/0471 , G09G2340/0478 , G09G2380/08
摘要： A registration processing apparatus generates a polynomial to calculate a value corresponding to a distance from the surface of a target object in a first image, and acquires a plurality of position coordinates on the surface of the target object in a second image. Then the apparatus respectively calculates a value corresponding to the distance from the surface of the target object in the first image using the polynomial, for position coordinates obtained by coordinate conversion of the plurality of position coordinates. The apparatus coordinate-converts the position coordinates of the second image by a coordinate conversion method for the plurality of position coordinates determined based on the calculated values.
摘要翻译：登记处理装置生成用于计算与第一图像中的与目标对象的表面的距离对应的值的多项式，并且在第二图像中获取目标对象的表面上的多个位置坐标。然后，该装置分别使用多项式计算与第一图像中的目标物体的表面的距离对应的值，对于通过多个位置坐标的坐标转换而获得的位置坐标。该装置通过用于基于计算值确定的多个位置坐标的坐标转换方法来对第二图像的位置坐标进行坐标转换。

37. 发明申请

US20120288373A1 ROTOR WITH ASYMMETRIC BLADE SPACING 审中-公开
标题翻译：具有不对称叶片间距的转子
公开(公告)号：US20120288373A1
公开(公告)日：2012-11-15
申请号：US13107374
申请日：2011-05-13
申请人： Loc Quang Duong , Xiaolan Hu , Nagamany Thayalakhandan , Bo Zheng , Benjamin E. Fishler , Gao Yang , Anthony C. Jones , James C. Napier , Jay M. Francisco
发明人： Loc Quang Duong , Xiaolan Hu , Nagamany Thayalakhandan , Bo Zheng , Benjamin E. Fishler , Gao Yang , Anthony C. Jones , James C. Napier , Jay M. Francisco
IPC分类号： F01D5/22
CPC分类号： F04D29/284 , F01D5/048 , F01D5/141 , F01D5/16 , F04D29/30 , F04D29/666 , F05D2250/30 , F05D2260/961 , Y02T50/672 , Y02T50/673
摘要： A turbine apparatus comprises a rotor with a hub section defined about a rotational axis and a plurality of blades attached to the hub section. The plurality of blades comprises a first group having a first angular spacing in a first circumferential sector of the rotor, and a second group having a second angular spacing in a second circumferential sector of the rotor. The first angular spacing is different from the second angular spacing, and the rotor blades are asymmetric about the rotational axis.
摘要翻译：涡轮机装置包括转子，其具有围绕旋转轴线限定的毂部分以及附接到轮毂部分的多个叶片。多个叶片包括在转子的第一圆周扇形区域中具有第一角度间隔的第一组和在转子的第二圆周部分中具有第二角度间隔的第二组。第一角度间隔与第二角度间隔不同，并且转子叶片围绕旋转轴线是不对称的。

38. 发明申请

US20120276740A1 METHODS FOR PRECLEANING A SUBSTRATE PRIOR TO METAL SILICIDE FABRICATION PROCESS 有权
标题翻译：用于预处理金属硅化物制造工艺前的基板的方法
公开(公告)号：US20120276740A1
公开(公告)日：2012-11-01
申请号：US13097016
申请日：2011-04-28
申请人： Bo Zheng , Arvind Sundarrajan , Manish Hamkar
发明人： Bo Zheng , Arvind Sundarrajan , Manish Hamkar
IPC分类号： H01L21/3205
CPC分类号： H01L21/28506 , H01L21/0206 , H01L21/02068 , H01L21/28518 , H01L21/67207
摘要： Methods for precleaning native oxides or other contaminants from a surface of a substrate prior to forming a metal silicide layer on the substrate. In one embodiment, a method for removing native oxides from a substrate includes transferring a substrate having an oxide layer disposed thereon into a processing chamber, performing a pretreatment process on the substrate by supplying a pretreatment gas mixture into the processing chamber, performing an oxide removal process on the substrate by supplying a cleaning gas mixture into the processing chamber, wherein the cleaning gas mixture includes at least an ammonium gas and a nitrogen trifluoride, and performing a post treatment process on the cleaned substrate by supplying a post treatment gas mixture into the processing chamber
摘要翻译：在衬底上形成金属硅化物层之前，从衬底的表面预清洁天然氧化物或其它污染物的方法。在一个实施方案中，从衬底去除天然氧化物的方法包括将其上设置有氧化物层的衬底转移到处理室中，通过将预处理气体混合物供给到处理室中，对衬底进行预处理过程，执行氧化物去除通过向处理室供给清洁气体混合物而在基板上进行处理，其中清洗气体混合物至少包含铵气体和三氟化氮，并且通过将后处理气体混合物供应到清洗的基板上而对清洁的基板进行后处理处理室

39. 外观设计

USD628104S1 Alcoholometer with LCD 有权
公开(公告)号：USD628104S1
公开(公告)日：2010-11-30
申请号：US29342766
申请日：2009-09-01
申请人： Bo Zheng
设计人： Bo Zheng

40. 发明申请

US20100003406A1 APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION 有权
标题翻译：用于原子层沉积的装置和方法
公开(公告)号：US20100003406A1
公开(公告)日：2010-01-07
申请号：US12494901
申请日：2009-06-30
申请人： Hyman Lam , Bo Zheng , Hua Ai , Michael Jackson , Xiaoxiong (John) Yuan , Hou Gong Wang , Salvador P. Umotoy , Sang Ho Yu
发明人： Hyman Lam , Bo Zheng , Hua Ai , Michael Jackson , Xiaoxiong (John) Yuan , Hou Gong Wang , Salvador P. Umotoy , Sang Ho Yu
IPC分类号： C23C16/34
CPC分类号： C23C16/45565 , C23C16/4412 , C23C16/45536 , C23C16/45544 , C23C16/4558 , H01J37/32449 , Y10T137/87265
摘要： Embodiments of the invention provide apparatuses and methods for atomic layer deposition (ALD), such as plasma-enhanced ALD (PE-ALD). In some embodiments, a PE-ALD chamber is provided which includes a chamber lid assembly coupled with a chamber body having a substrate support therein. In one embodiment, the chamber lid assembly has an inlet manifold assembly containing an annular channel encompassing a centralized channel, wherein the centralized channel extends through the inlet manifold assembly, and the inlet manifold assembly further contains injection holes extending from the annular channel, through a sidewall of the centralized channel, and to the centralized channel. The chamber lid assembly further contains a showerhead assembly disposed below the inlet manifold assembly, a water box disposed between the inlet manifold assembly and the showerhead assembly, and a remote plasma system (RPS) disposed above and coupled with the inlet manifold assembly, and in fluid communication with the centralized channel.
摘要翻译：本发明的实施例提供了诸如等离子体增强型ALD（PE-ALD）的原子层沉积（ALD）的装置和方法。在一些实施例中，提供了一种PE-ALD室，其包括与其中具有基板支撑件的室主体耦合的室盖组件。在一个实施例中，室盖组件具有入口歧管组件，其包含围绕集中通道的环形通道，其中集中通道延伸穿过入口歧管组件，并且入口歧管组件还包含从环形通道延伸的注入孔，集中通道侧壁，集中通道。腔室盖组件还包括设置在入口歧管组件下方的喷头组件，设置在入口歧管组件和喷头组件之间的水箱，以及设置在入口歧管组件上方并与入口歧管组件耦合的远程等离子体系统（RPS）与集中通道的流体通信。

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