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    • 33. 发明授权
    • Heat-resistant nickel-based alloy excellent in weldability
    • 耐热镍基合金,焊接性优良
    • US5882586A
    • 1999-03-16
    • US899587
    • 1997-07-24
    • Itaru TamuraKazunori TokoroTakashi KawabataTsuyoki KokubunToshio MochizukiShuichi SakashitaHisataka KawaiIkuo OkadaIchiro TsujiKouji TakahashiTaiji Torigoe
    • Itaru TamuraKazunori TokoroTakashi KawabataTsuyoki KokubunToshio MochizukiShuichi SakashitaHisataka KawaiIkuo OkadaIchiro TsujiKouji TakahashiTaiji Torigoe
    • C22C19/05
    • C22C19/056
    • A heat-resistant nickel-based alloy having excellent welding properties, said nickel-based alloy consisting essentially of, in terms of wt. %, 0.05 to 0.25% of C, 18 to 25% of Cr, 15 to 25% of Co, at least one selected from the group consisting of up to 3.5% of Mo and 5 to 10% of W, with W+1/2Mo being 5 to 10%, 1.0 to 5.0% of Ti, 1.0 to 4.0% of Al, 0.5 to 4.5% of Ta, 0.2 to 3.0% of Nb, 0.005 to 0.10% of Zr, 0.001 to 0.01% of B and the balance being Ni and unavoidable impurities, wherein the (Al+Ti) content and the (W+1/2Mo) content are within the range surrounded by the lines connecting points A (Al+Ti: 5%, W+1/2Mo: 10%), B (Al+Ti: 5%, W+1/2Mo: 5%), C (Al+Ti: 7%, W+1/2Mo: 5%), and D (Al+Ti: 7%, W+1/2Mo: 10%) excluding the line A-B in FIG. 1. Another alloy has substantially the same composition as described above except that the Cr content is 10 to 20% and the (Al+Ti) content and the (W+1/2Mo) content are within the range surrounded by the lines connecting points A, B, E (Al+Ti: 4%, W+1/2Mo: 5%), F (Al+Ti: 4%, W+1/2Mo: 0.5%), G (Al+Ti: 7%, W+1/2Mo: 0.5%) and D, excluding the line A-B-E, in FIG. 1.
    • 一种具有优异焊接性能的耐热镍基合金,所述镍基合金基本上以重量计。 ,0.05〜0.25%的C,18〜25%的Cr,15〜25%的Co,至少1种选自高达3.5%的Mo和5〜10%的W,W + E,fra 1/2 + EE Mo为5〜10%,Ti为1.0〜5.0%,Al为1.0〜4.0%,Ta为0.5〜4.5%,Nb为0.2〜3.0%,Zr为0.005〜0.10% 0.001〜0.01%的B,余量为Ni和不可避免的杂质,其中(Al + Ti)含量和(W ++ E,fra 1/2 + EE Mo)含量在连接点 A(Al + Ti:5%,W ++ E,fra 1/2 + EE Mo:10%),B(Al + Ti:5%,W ++ E,fra 1/2 + EE Mo: ),C(Al + Ti:7%,W ++ E,fra 1/2 + EE Mo:5%)和D(Al + Ti:7%,W ++ E, :10%),不包括图1中的线AB。 另一种合金具有与上述基本相同的组成,不同之处在于Cr含量为10〜20%,(Al + Ti)含量和(W ++ E,fra 1/2 + EE Mo)含量在 连接点A,B,E(Al + Ti:4%,W ++ E,fra 1/2 + EE Mo:5%),F(Al + Ti:4%,W ++ E ,1/2 + EE Mo:0.5%),G(Al + Ti:7%,W ++ E,fra 1/2 + EE Mo:0.5%)和D,不包括线ABE。 1。
    • 38. 发明授权
    • X-ray source and X-ray lithography method
    • X射线源和X射线光刻法
    • US4635282A
    • 1987-01-06
    • US699402
    • 1985-02-07
    • Ikuo OkadaYasunao SaitohHideo YoshiharaSatoshi Nakayama
    • Ikuo OkadaYasunao SaitohHideo YoshiharaSatoshi Nakayama
    • H01J35/22G03F7/20H01L21/027H05G2/00G21K5/00
    • H05G2/003B82Y10/00G03F7/70033G03F7/70808
    • A gas injection type plasma X-ray source has a gas plenum for storing a discharging gas at a pressure in the range of 150 Torr and 1000 Torr, the stored gas being injected between a pair of electrodes through a gas valve. The electrodes are opposed to each other in a vacuum vessel, so that a gas jet for the production of a plasma is formed. A voltage is applied between the electrodes, so that a discharge plasma is produced between said electrodes. A linear plasma with a high temperature and a high density is produced by the pinch of the plasma due to its own magnetic field produced by the current flowing through the plasma, so that X-rays are emitted from the linear plasma. The X-ray source has a high conversion efficiency and a high discharge timing margin, and accordingly the stability and reproducibility of discharges are improved and the X-ray output is increased.
    • 气体注入型等离子体X射线源具有用于储存在150乇和1000乇范围内的压力下的放电气体的气体增压室,所述储存气体通过气阀注入一对电极之间。 电极在真空容器中彼此相对,从而形成用于产生等离子体的气体射流。 在电极之间施加电压,使得在所述电极之间产生放电等离子体。 由于其自身通过流过等离子体的电流产生的磁场,由于等离子体的夹紧而产生具有高温和高密度的线性等离子体,从而从线性等离子体发射X射线。 X射线源具有高转换效率和高放电时间裕度,因此放电的稳定性和再现性得到改善,并且X射线输出增加。