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    • 39. 发明申请
    • STRESS MEASUREMENTS DURING LARGE-MISMATCH EPITAXIAL PROCESSES
    • 在大型MISMATCH外部过程中的应力测量
    • US20080206902A1
    • 2008-08-28
    • US11678870
    • 2007-02-26
    • David BourJacob Grayson
    • David BourJacob Grayson
    • H01L21/66B05C11/00
    • H01L22/12
    • A substrate is disposed within a processing chamber. A nitrogen precursor and a group-III precursor are flowed into the processing chamber. A layer is deposited over the substrate with a thermal chemical-vapor-deposition process at an elevated temperature within the processing chamber using the nitrogen precursor and the group-III precursor. Light beams are directed to a surface of the layer and light spots corresponding to reflections of the light beams are received from the surface at a position-sensitive detector. Positions of the light spots on the position-sensitive detector are determined from photocurrent induced in a photodiode in the position-sensitive detector. A curvature of the layer is determined from the positions of the light spots.
    • 衬底设置在处理室内。 氮气前体和III族前体流入处理室。 使用氮前体和III族前体,在处理室内的高温下,通过热化学气相沉积工艺在衬底上沉积一层。 光束被引导到层的表面,并且在位置敏感检测器处从表面接收与光束的反射相对应的光点。 位置敏感检测器上的光点的位置由在位置敏感检测器中的光电二极管中感应的光电流确定。 从光斑的位置确定层的曲率。