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    • 39. 发明申请
    • Surface shape recognition sensor
    • 表面形状识别传感器
    • US20050259850A1
    • 2005-11-24
    • US10528283
    • 2004-08-12
    • Toshishige ShimamuraHiroki MorimuraSatoshi ShigematsuNorio SatoMasami UranoKatsuyuki Machida
    • Toshishige ShimamuraHiroki MorimuraSatoshi ShigematsuNorio SatoMasami UranoKatsuyuki Machida
    • G01B7/28G06K9/00
    • G06K9/0002G06K9/0012
    • A detection element (1A) having a detection electrode (11A) connected to a surface shape detection unit (2) and a detection electrode (12A) connected to a common potential, and a detection element (1B) having a detection electrode (11B) connected to the surface shape detection unit (2) and a detection electrode (12B) connected to a biometric recognition unit (3) are arranged. The surface shape detection unit (2) outputs a signal representing the three-dimensional pattern of the surface shape corresponding to the contact portion to each detection element on the basis of individual capacitances obtained from the detection elements (1A, 1B). The biometric recognition unit (3) determines whether an object (9) is a living body, on the basis of a signal corresponding to the impedance of the object (9) connected between the detection electrode (12B) of the detection element (1B) and the detection electrode (12A) of the detection element (1A).
    • 具有连接到表面形状检测单元(2)的检测电极(11A)和与公共电位连接的检测电极(12A)的检测元件(1A)和具有检测元件 连接到表面形状检测单元(2)的电极(11B)和连接到生物识别单元(3)的检测电极(12B)。 表面形状检测单元(2)基于从检测元件(1A,1B)获得的各个电容,将表示与接触部分相对应的表面形状的三维图案的信号输出到每个检测元件。 生物识别单元(3)基于与检测元件(1)的检测电极(12B)之间连接的物体(9)的阻抗相对应的信号来判定物体(9)是活体, B)和检测元件(1A)的检测电极(12A)。
    • 40. 发明授权
    • Surface shape recognition sensor and method of manufacturing the same
    • 表面形状识别传感器及其制造方法
    • US06727561B2
    • 2004-04-27
    • US10299523
    • 2002-11-19
    • Norio SatoKatsuyuki MachidaSatoshi ShigematsuHiroki MorimuraHakaru Kyuragi
    • Norio SatoKatsuyuki MachidaSatoshi ShigematsuHiroki MorimuraHakaru Kyuragi
    • H01L2982
    • G06K9/0002
    • A surface shape recognition sensor includes a plurality of capacitive detection elements, a support electrode, and a protective film. The capacitive detection elements are formed from lower electrodes and a deformable plate-like upper electrode made of a metal. The lower electrodes are insulated and isolated from each other and stationarily laid out on a single plane of an interlevel dielectric formed on a semiconductor substrate. The upper electrode is laid out above the lower electrodes at a predetermined interval and has a plurality of opening portions. The support electrode is laid out around the lower electrodes while being insulated and isolated from the lower electrodes, and formed to be higher than the lower electrodes to support the upper electrode. The protective film is formed on the upper electrode to close the opening portions. The opening portions of the upper electrode are laid out in a region other than regions on a main part of the lower electrode and on the support electrode. A method of manufacturing the surface shape recognition sensor is also disclosed.
    • 表面形状识别传感器包括多个电容检测元件,支撑电极和保护膜。 电容检测元件由下电极和由金属制成的可变形的板状上电极形成。 下电极彼此绝缘并隔离并且固定地布置在形成在半导体衬底上的层间电介质的单个平面上。 上电极以预定间隔布置在下电极上方,并具有多个开口部分。 支撑电极围绕下电极布置,同时与下电极绝缘和隔离,并且形成为高于下电极以支撑上电极。 保护膜形成在上电极上以封闭开口部分。 上电极的开口部分布置在下电极的主要部分和支撑电极上的区域之外的区域中。 还公开了一种制造表面形状识别传感器的方法。