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31. 发明授权

US08593037B1 Resonator with a fluid cavity therein 有权
标题翻译：谐振器内有流体腔
公开(公告)号：US08593037B1
公开(公告)日：2013-11-26
申请号：US13434144
申请日：2012-03-29
申请人： Randall L. Kubena , Tsung-Yuan Hsu
发明人： Randall L. Kubena , Tsung-Yuan Hsu
IPC分类号： H01L41/053 , H01L41/047 , H01L41/107 , H01L41/113 , G01P3/26 , G01L7/00
CPC分类号： H04R17/00 , Y10T29/42 , Y10T29/49165 , Y10T29/49401
摘要： A quartz resonator flow cell has a piezoelectric quartz wafer with an electrode, pads, and interconnects disposed on a first side thereof. The piezoelectric quartz wafer has a second electrode disposed on a second side thereof, the second electrode opposing the first electrode. A substrate is provided having fluid ports therein and the piezoelectric quartz wafer is mounted to the substrate such that the second side thereof faces the substrate with a cavity being formed between the substrate and the wafer. The fluid ports in the substrate are aligned with the electrode on the second side of the piezoelectric quartz wafer which is in contact with the cavity.
摘要翻译：石英谐振器流通池具有压电石英晶片，其具有设置在其第一侧上的电极，焊盘和互连。压电石英晶片具有设置在其第二侧上的第二电极，第二电极与第一电极相对。提供了一种衬底，其中具有流体端口，并且将压电石英晶片安装到衬底上，使得其第二面面对衬底，在衬底和晶片之间形成空腔。衬底中的流体端口与压电石英晶片的与空腔接触的第二侧上的电极对齐。

32. 发明授权

US08151640B1 MEMS on-chip inertial navigation system with error correction 有权
标题翻译：具有误差校正的MEMS片上惯性导航系统
公开(公告)号：US08151640B1
公开(公告)日：2012-04-10
申请号：US12027247
申请日：2008-02-06
申请人： Randall L. Kubena
发明人： Randall L. Kubena
IPC分类号： G01C19/00
CPC分类号： G01C19/5684
摘要： An on-chip navigation system, optionally combined with GPS (Global Positioning System) and/or an imaging array, which incorporates MEMS (MicroElectroMechanical Systems) components is possible by the use of careful material selection and novel bonding techniques used during fabrication. The use of MEMS components permits many of the components of a typical inertial navigation system to reside on a single chip. Because the components are in close proximity, the components can then be used to monitor the environmental changes of the chip, such as temperature and vibration, and correct for the resulting offsets of other components. This allows improved system performance even if the individual sensor components are not ideal.
摘要翻译：通过使用仔细的材料选择和在制造期间使用的新型结合技术，可以选择结合使用MEMS（微电子机械系统）部件的GPS（全球定位系统）和/或成像阵列的片上导航系统。使用MEMS组件允许典型惯性导航系统的许多组件驻留在单个芯片上。由于组件非常接近，因此可以使用组件来监视芯片的环境变化，例如温度和振动，并纠正其他组件产生的偏移。这样即使各个传感器组件不理想，也可以提高系统性能。

33. 发明授权

US07282834B2 Micro electrical mechanical system (MEMS) tuning using focused ion beams 失效
标题翻译：使用聚焦离子束的微机电系统（MEMS）调谐
公开(公告)号：US07282834B2
公开(公告)日：2007-10-16
申请号：US11148389
申请日：2005-06-07
申请人： Randall L. Kubena , Richard J. Joyce
发明人： Randall L. Kubena , Richard J. Joyce
IPC分类号： H01L41/08
CPC分类号： H03H3/0077
摘要： A method for tuning an electro-mechanical device such as a MEMS device is disclosed. The method comprises operating a MEMS device in a depressurized system and using FIB micromachining to remove a portion of the MEMS device. Additionally, a method for tuning a plurality of MEMS devices by depositing an active layer and then removing a portion of the active layer using FIB micromachining. Also, a method for tuning a MEMS device and vacuum packaging the MEMS device in situ are provided.
摘要翻译：公开了一种用于调整诸如MEMS器件的机电装置的方法。该方法包括在减压系统中操作MEMS装置，并使用FIB微机械加工来去除MEMS装置的一部分。另外，一种用于通过沉积有源层然后使用FIB微加工来去除一部分有源层来调谐多个MEMS器件的方法。此外，提供了一种用于调谐MEMS器件并原位真空封装MEMS器件的方法。

34. 发明授权

US07232700B1 Integrated all-Si capacitive microgyro with vertical differential sense and control and process for preparing an integrated all-Si capacitive microgyro with vertical differential sense 失效
标题翻译：集成全硅电容式微型电机具有垂直差分感应和控制以及用于制备具有垂直差分感的集成全硅电容式微型电机
公开(公告)号：US07232700B1
公开(公告)日：2007-06-19
申请号：US11008715
申请日：2004-12-08
申请人： Randall L. Kubena
发明人： Randall L. Kubena
IPC分类号： H01L21/00
CPC分类号： G01C19/5719
摘要： The present invention relates to a method of manufacturing a cloverleaf microgyroscope containing an integrated post comprising: attaching a post wafer to a resonator wafer, forming a bottom post from the post wafer being attached to the resonator wafer, attaching the resonator wafer to a base wafer, wherein the bottom post fits into a post hole in the base wafer, forming a top post from the resonator wafer, wherein the bottom and top post are formed symmetrically around the same axis, preparing a cap with backside metallization, and attaching a cap wafer on top of the base wafer. The present invention relates further to a gyroscope containing an integrated post with on or off-chip electronics.
摘要翻译：本发明涉及一种制造含有一体式立柱的三叶草微陀螺仪的方法，该方法包括：将后晶片连接到共振器晶片，从后晶片形成底柱，附着于谐振晶片，将谐振晶片连接到基片，其中所述底柱装配到所述基底晶片中的柱孔中，从所述谐振器晶片形成顶部柱，其中所述底部和顶部柱围绕相同轴线对称地形成，制备具有背侧金属化的盖，并且附接盖片在基础晶片的顶部。本发明还涉及一种包含具有片上或片外电子器件的集成柱的陀螺仪。

35. 发明授权

US08522612B1 MEMS on-chip inertial navigation system with error correction 有权
标题翻译：具有误差校正的MEMS片上惯性导航系统
公开(公告)号：US08522612B1
公开(公告)日：2013-09-03
申请号：US13410998
申请日：2012-03-02
申请人： Randall L. Kubena
发明人： Randall L. Kubena
IPC分类号： G01C19/00
CPC分类号： G01C19/5684
摘要： An on-chip navigation system, optionally combined with GPS (Global Positioning System) and/or an imaging array, which incorporates MEMS (MicroElectroMechanical Systems) components is possible by the use of careful material selection and novel bonding techniques used during fabrication. The use of MEMS components permits many of the components of a typical inertial navigation system to reside on a single chip. Because the components are in close proximity, the components can then be used to monitor the environmental changes of the chip, such as temperature and vibration, and correct for the resulting offsets of other components. This allows improved system performance even if the individual sensor components are not ideal.
摘要翻译：通过使用仔细的材料选择和在制造期间使用的新型结合技术，可以选择结合使用MEMS（微电子机械系统）部件的GPS（全球定位系统）和/或成像阵列的片上导航系统。使用MEMS组件允许典型惯性导航系统的许多组件驻留在单个芯片上。由于组件非常接近，因此可以使用组件来监视芯片的环境变化，例如温度和振动，并纠正其他组件产生的偏移。这样即使各个传感器组件不理想，也可以提高系统性能。

36. 发明授权

US08402824B1 Frequency locking of resonators for improved temperature control of gyroscopes 有权
标题翻译：谐振器的频率锁定，用于改善陀螺仪的温度控制
公开(公告)号：US08402824B1
公开(公告)日：2013-03-26
申请号：US12636931
申请日：2009-12-14
申请人： Randall L. Kubena
发明人： Randall L. Kubena
IPC分类号： G01C19/56
CPC分类号： G01C19/5783
摘要： A precision gyroscope includes a semiconductor substrate, a gyroscope integrated on the substrate, and a quartz resonator clock integrated on the substrate. In another embodiment the substrate is a quartz substrate.
摘要翻译：精密陀螺仪包括半导体衬底，集成在衬底上的陀螺仪和集成在衬底上的石英谐振器时钟。在另一个实施例中，衬底是石英衬底。

37. 发明授权

US06698287B2 Microgyro tuning using focused ion beams 有权
标题翻译：使用聚焦离子束进行微型调谐
公开(公告)号：US06698287B2
公开(公告)日：2004-03-02
申请号：US10285886
申请日：2002-11-01
申请人： Randall L. Kubena , Richard Joyce , Robert Thomas M'Closkey , A. Dorian Challoner
发明人： Randall L. Kubena , Richard Joyce , Robert Thomas M'Closkey , A. Dorian Challoner
IPC分类号： G01C1900
CPC分类号： G01C19/5719 , G01P2015/084
摘要： The present invention discloses methods of manufacturing mechanical resonator microgyroscopes using focused ion beam machining and the mechanical resonator gyroscopes produced therefrom. An exemplary method of tuning a mechanical resonator gyroscope, includes the steps of mounting a mechanical resonator gyroscope in a vacuum chamber with a controllable focused ion beam where the gyroscope includes exciting and sensing elements for measuring a resonant frequency of the gyroscope. The exciting and sensing elements are activated to measure the resonant frequency of the mechanical resonator gyroscope and the resonant frequency of the gyroscope is adjusted to a desired resonant frequency value by controlling the focused ion beam to remove material of the gyroscope.
摘要翻译：本发明公开了使用聚焦离子束加工和由其制造的机械谐振器陀螺仪制造机械谐振器微型光学器件的方法。调谐机械谐振器陀螺仪的示例性方法包括以下步骤：将机械谐振器陀螺仪安装在具有可控聚焦离子束的真空室中，其中陀螺仪包括用于测量陀螺仪的谐振频率的激励和感测元件。激励和感测元件被激活以测量机械谐振器陀螺仪的谐振频率，并且通过控制聚焦离子束以去除陀螺仪的材料，将陀螺仪的谐振频率调整到期望的谐振频率值。

38. 发明授权

US06238539B1 Method of in-situ displacement/stress control in electroplating 有权
标题翻译：电镀中原位位移/应力控制方法
公开(公告)号：US06238539B1
公开(公告)日：2001-05-29
申请号：US09344729
申请日：1999-06-25
申请人： Richard J. Joyce , Ronghua Wei , Randall L. Kubena , Robert E. Doty
发明人： Richard J. Joyce , Ronghua Wei , Randall L. Kubena , Robert E. Doty
IPC分类号： C25D2112
CPC分类号： C25D21/12
摘要： The dominant physical parameter that affects the internal stress of electroplated metals on substrates have been identified and their effects have been systematically studied. Thin electroplated metals have very high internal stresses, even though the substrate displacements are small. Increasing the electroplated metal's thickness greatly reduces the magnitude of the stress, which can be either tensile or compressive depending on the plating conditions, but it may not necessarily reduce the displacement of the substrate. Based on the research done in connection to this application, the relationship between the plating temperatures and the current density needed to obtain near-zero-stress state for electroplated nickel on silicon substrate can be deduced.
摘要翻译：影响电镀金属对衬底内应力的主要物理参数已被确定，并对其影响进行了系统研究。薄的电镀金属具有非常高的内应力，即使衬底位移较小。增加电镀金属的厚度大大减小了应力的大小，其可以根据电镀条件而拉伸或压缩，但是它可能不一定会降低基板的位移。基于与本申请相关的研究，可以推导出电镀温度与电解镍在硅衬底上获得接近零应力状态所需的电流密度之间的关系。

39. 发明授权

US08176607B1 Method of fabricating quartz resonators 有权
标题翻译：石英谐振器的制造方法
公开(公告)号：US08176607B1
公开(公告)日：2012-05-15
申请号：US12575634
申请日：2009-10-08
申请人： Randall L. Kubena , Tsung-Yuan Hsu
发明人： Randall L. Kubena , Tsung-Yuan Hsu
IPC分类号： H04R17/10 , B21D53/76
CPC分类号： H04R17/00 , Y10T29/42 , Y10T29/49165 , Y10T29/49401
摘要： A method for fabricating VHF and/or UHF quartz resonators (for higher sensitivity) in a cartridges design with the quartz resonators requiring much smaller sample volumes than required by conventional resonators, and also enjoying smaller size and more reliable assembly. MEMS fabrication approaches are used to fabricate with quartz resonators in quartz cavities with electrical interconnects on a top side of a substrate for electrical connection to the electronics preferably through pressure pins in a plastic module. An analyte is exposed to grounded electrodes on a single side of the quartz resonators, thereby preventing electrical coupling of the detector signals through the analyte. The resonators can be mounted on the plastic cartridge or on arrays of plastic cartridges with the use of inert bonding material, die bonding or wafer bonding techniques. This allows the overall size, cost, and required biological sample volume to be reduced while increasing the sensitivity for detecting small mass changes.
摘要翻译：一种用于在墨盒设计中制造VHF和/或UHF石英谐振器（用于更高灵敏度）的方法，其中石英谐振器比常规谐振器要求的样品体积要小得多，并且还具有更小的尺寸和更可靠的组装。 MEMS制造方法用于在石英腔中制造石英谐振器，在基底的顶侧具有电互连，用于通过塑料模块中的压力引脚电连接到电子装置。分析物暴露于石英谐振器单侧的接地电极，从而防止检测器信号通过分析物的电耦合。谐振器可以使用惰性接合材料，管芯接合或晶片接合技术安装在塑料盒或塑料盒阵列上。这允许减小整体尺寸，成本和所需的生物样品体积，同时增加用于检测小质量变化的灵敏度。

40. 发明授权

US06730978B2 Single crystal, dual wafer, tunneling sensor and a method of making same 失效
标题翻译：单晶，双晶，隧道传感器及其制造方法
公开(公告)号：US06730978B2
公开(公告)日：2004-05-04
申请号：US10429988
申请日：2003-05-06
申请人： Randall L. Kubena , Michael J. Little , LeRoy H. Hackett
发明人： Randall L. Kubena , Michael J. Little , LeRoy H. Hackett
IPC分类号： H01L2714
CPC分类号： B81C1/0015 , B81B2201/0292 , B81C2203/036 , H01H59/0009
摘要： A method of making a micro electromechanical switch or tunneling sensor. A cantilevered beam structure and a mating structure are defined on a first substrate or wafer; and at least one contact structure and a mating structure are defined on a second substrate or wafer, the mating structure on the second substrate or wafer being of a complementary shape to the mating structure on the first substrate or wafer. A bonding layer, preferably a eutectic bonding layer, is provided on at least one of the mating structures. The mating structure of the first substrate is moved into a confronting relationship with the mating structure of the second substrate or wafer. Pressure is applied between the two substrates so as to cause a bond to occur between the two mating structures at the bonding or eutectic layer. Then the first substrate or wafer is removed to free the cantilevered beam structure for movement relative to the second substrate or wafer.
摘要翻译：制造微机电开关或隧道传感器的方法。在第一基板或晶片上限定悬臂梁结构和配合结构; 并且在第二衬底或晶片上限定至少一个接触结构和配合结构，所述第二衬底或晶片上的配合结构与第一衬底或晶片上的配合结构互补形状。在至少一个配合结构上提供粘合层，优选共晶粘合层。第一基板的配合结构被移动成与第二基板或晶片的配合结构面对面的关系。在两个基板之间施加压力，以便在接合或共晶层处在两个配合结构之间发生结合。然后移除第一衬底或晶片以释放悬臂梁结构以相对于第二衬底或晶片移动。

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