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31. 发明申请

US20100118382A1 ANALOG INTERFEROMETRIC MODULATOR DEVICE WITH ELECTROSTATIC ACTUATION AND RELEASE 失效
标题翻译：具有静电驱动和释放功能的模拟干涉仪调制器
公开(公告)号：US20100118382A1
公开(公告)日：2010-05-13
申请号：US12687850
申请日：2010-01-14
申请人： Manish Kothari , Lior Kogut , Jeffrey B. Sampsell
发明人： Manish Kothari , Lior Kogut , Jeffrey B. Sampsell
IPC分类号： G02B26/00
CPC分类号： G02B26/001
摘要： A microelectromechanical system (MEMS) device includes a first electrode, a second electrode electrically insulated from the first electrode, and a third electrode electrically insulated from the first electrode and the second electrode. The MEMS device also includes a support structure which separates the first electrode from the second electrode and a reflective element located and movable between a first position and a second position. The reflective element is in contact with a portion of the device when in the first position and is not in contact with the portion of the device when in the second position. An adhesive force is generated between the reflective element and the portion when the reflective element is in the first position. Voltages applied to the first electrode, the second electrode, and the third electrode at least partially reduce or counteract the adhesive force.
摘要翻译：微机电系统（MEMS）装置包括第一电极，与第一电极电绝缘的第二电极和与第一电极和第二电极电绝缘的第三电极。 MEMS器件还包括将第一电极与第二电极分开的支撑结构和位于第一位置和第二位置之间并可移动的反射元件。反射元件在处于第一位置时与装置的一部分接触，并且当处于第二位置时不与装置的部分接触。当反射元件处于第一位置时，在反射元件和部分之间产生粘合力。施加到第一电极，第二电极和第三电极的电压至少部分地减小或抵消粘附力。

32. 发明授权

US07684104B2 MEMS using filler material and method 有权
标题翻译： MEMS采用填充材料和方法
公开(公告)号：US07684104B2
公开(公告)日：2010-03-23
申请号：US11208809
申请日：2005-08-22
申请人： Clarence Chui , Jeffrey B. Sampsell
发明人： Clarence Chui , Jeffrey B. Sampsell
IPC分类号： G02B26/00
CPC分类号： G02B26/001 , B81B3/007 , B81B2201/042 , G09G3/3466
摘要： Described is an apparatus, method for manufacturing, and systems comprising a MEMS device, for example, an interferometric modulator, comprising a substrate, a movable mirror, a deformable layer, and a support structure. In some embodiments, the support structure comprises a plurality of support posts. A connector secures the movable mirror secured to the deformable layer. At least one of the connector and the support post is a composite comprising a first component and a second component, where at the first component forms at least a portion of at least one of the perimeter of the connector and support post.
摘要翻译：描述了一种包括MEMS器件（例如干涉式调制器）的MEMS器件，制造方法和系统，该器件包括衬底，可移动镜，可变形层和支撑结构。在一些实施例中，支撑结构包括多个支撑柱。连接器将可移动镜固定在可变形层上。连接器和支撑柱中的至少一个是包括第一部件和第二部件的复合材料，其中在第一部件形成连接器和支撑柱的周边中的至少一个的至少一部分。

33. 发明授权

US07492502B2 Method of fabricating a free-standing microstructure 失效
标题翻译：制造独立显微组织的方法
公开(公告)号：US07492502B2
公开(公告)日：2009-02-17
申请号：US11198127
申请日：2005-08-05
申请人： Clarence Chui , Jeffrey B. Sampsell
发明人： Clarence Chui , Jeffrey B. Sampsell
IPC分类号： G02B26/00 , G02B26/08 , G02F1/29
CPC分类号： B81C1/00142 , B81B2201/042 , G02B26/001
摘要： Provided is a MEMS device comprising an integrated post and deformable layer. In some embodiments, the transition between the post and deformable layer comprises substantially a single arcuate or convex surface, thereby providing a mechanically robust structure. Some embodiments provide a method for fabricating a MEMS device comprising the use of a self-planarizing sacrificial material, which provides a surface conducive to the formation of a relatively uniform deformable layer thereon.
摘要翻译：提供了一种包括集成的柱和可变形层的MEMS装置。在一些实施例中，柱和可变形层之间的过渡基本上包括单个弓形或凸形表面，由此提供机械坚固的结构。一些实施例提供了一种用于制造MEMS器件的方法，其包括使用自平面化牺牲材料，其提供有助于在其上形成相对均匀的可变形层的表面。

34. 发明申请

US20080314866A1 MIRROR AND MIRROR LAYER FOR OPTICAL MODULATOR AND METHOD 失效
标题翻译：光学调制器和方法的镜和镜面层
公开(公告)号：US20080314866A1
公开(公告)日：2008-12-25
申请号：US12190520
申请日：2008-08-12
申请人： Clarence Chui , Jeffrey B. Sampsell
发明人： Clarence Chui , Jeffrey B. Sampsell
IPC分类号： H01B13/00 , B05D3/10
CPC分类号： G02B26/0841 , G02B26/001
摘要： Described herein are systems, devices, and methods relating to packaging electronic devices, for example, microelectromechanical systems (MEMS) devices, including optical modulators such as interferometric optical modulators. The interferometric modulator disclosed herein comprises a movable mirror. Some embodiments of the disclosed movable mirror exhibit a combination of improved properties compared to known mirrors, including reduced moving mass, improved mechanical properties, and reduced etch times.
摘要翻译：这里描述了与包装电子设备有关的系统，设备和方法，例如包括光学调制器（例如干涉式光学调制器）的微机电系统（MEMS）设备。本文公开的干涉式调制器包括可移动反射镜。所公开的可移动镜的一些实施例与已知反射镜相比具有改进的性能的组合，包括减少的移动质量，改进的机械性能和减少的蚀刻时间。

35. 发明授权

US08226836B2 Mirror and mirror layer for optical modulator and method 失效
标题翻译：用于光学调制器和方法的镜和镜层
公开(公告)号：US08226836B2
公开(公告)日：2012-07-24
申请号：US12190520
申请日：2008-08-12
申请人： Clarence Chui , Jeffrey B. Sampsell
发明人： Clarence Chui , Jeffrey B. Sampsell
IPC分类号： B29D11/00 , C23F1/00 , H01L27/148
CPC分类号： G02B26/0841 , G02B26/001
摘要： Described herein are systems, devices, and methods relating to packaging electronic devices, for example, microelectromechanical systems (MEMS) devices, including optical modulators such as interferometric optical modulators. The interferometric modulator disclosed herein comprises a movable mirror. Some embodiments of the disclosed movable mirror exhibit a combination of improved properties compared to known mirrors, including reduced moving mass, improved mechanical properties, and reduced etch times.
摘要翻译：这里描述了与包装电子设备有关的系统，设备和方法，例如包括光学调制器（例如干涉式光学调制器）的微机电系统（MEMS）设备。本文公开的干涉式调制器包括可移动反射镜。所公开的可移动镜的一些实施例与已知反射镜相比具有改进的性能的组合，包括减少的移动质量，改进的机械性能和减少的蚀刻时间。

36. 发明授权

US07342705B2 Spatial light modulator with integrated optical compensation structure 有权
标题翻译：具有集成光学补偿结构的空间光调制器
公开(公告)号：US07342705B2
公开(公告)日：2008-03-11
申请号：US11036965
申请日：2005-01-14
申请人： Clarence Chui , Jeffrey B. Sampsell , William J. Cummings , Ming-Hau Tung
发明人： Clarence Chui , Jeffrey B. Sampsell , William J. Cummings , Ming-Hau Tung
IPC分类号： G02B26/00
CPC分类号： G02F1/21 , G02B26/001 , G02F1/1335 , G02F2001/13356
摘要： A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure. The optical compensation structure may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film.
摘要翻译：空间光调制器包括集成的光学补偿结构，例如，布置在基板和多个可单独寻址的光调制元件之间的光学补偿结构，或位于光调制元件的相对侧上的光学补偿结构基质。可单独寻址的光调制元件被配置为调制透射通过或从透明基板反射的光。制造这种空间光调制器的方法包括在衬底上制造光学补偿结构，并在光学补偿结构上制造多个单独可寻址的光调制元件。光学补偿结构可以是无源光学补偿结构。光学补偿结构可以包括补充前照明光源，漫射器，黑色掩模，衍射光学元件，滤色器，抗反射层，散射光的结构，微透镜阵列和全息图中的一个或多个电影。

37. 发明申请

US20120099177A1 SPATIAL LIGHT MODULATOR WITH INTEGRATED OPTICAL COMPENSATION STRUCTURE 有权
标题翻译：具有综合光学补偿结构的空间光调制器
公开(公告)号：US20120099177A1
公开(公告)日：2012-04-26
申请号：US13337494
申请日：2011-12-27
申请人： Clarence Chui , Jeffrey B. Sampsell , William J. Cummings , Ming-Hau Tung
发明人： Clarence Chui , Jeffrey B. Sampsell , William J. Cummings , Ming-Hau Tung
IPC分类号： G02B26/00
CPC分类号： G02F1/21 , G02B26/001 , G02F1/1335 , G02F2001/13356
摘要： A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure. The optical compensation structure may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film.
摘要翻译：空间光调制器包括集成的光学补偿结构，例如，布置在基板和多个可单独寻址的光调制元件之间的光学补偿结构，或位于光调制元件的相对侧上的光学补偿结构基质。可单独寻址的光调制元件被配置为调制透射通过或从透明基板反射的光。制造这种空间光调制器的方法包括在衬底上制造光学补偿结构，并在光学补偿结构上制造多个单独可寻址的光调制元件。光学补偿结构可以是无源光学补偿结构。光学补偿结构可以包括补充前照明光源，漫射器，黑色掩模，衍射光学元件，滤色器，抗反射层，散射光的结构，微透镜阵列和全息图中的一个或多个电影。

38. 发明授权

US08111445B2 Spatial light modulator with integrated optical compensation structure 失效
标题翻译：具有集成光学补偿结构的空间光调制器
公开(公告)号：US08111445B2
公开(公告)日：2012-02-07
申请号：US12014657
申请日：2008-01-15
申请人： Clarence Chui , Jeffrey B. Sampsell , William J. Cummings , Ming-Hau Tung
发明人： Clarence Chui , Jeffrey B. Sampsell , William J. Cummings , Ming-Hau Tung
IPC分类号： G02B26/00
CPC分类号： G02F1/21 , G02B26/001 , G02F1/1335 , G02F2001/13356
摘要： A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure. The optical compensation structure may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film.
摘要翻译：空间光调制器包括集成的光学补偿结构，例如，布置在基板和多个可单独寻址的光调制元件之间的光学补偿结构，或位于光调制元件的相对侧上的光学补偿结构基质。可单独寻址的光调制元件被配置为调制透射通过或从透明基板反射的光。制造这种空间光调制器的方法包括在衬底上制造光学补偿结构，并在光学补偿结构上制造多个单独可寻址的光调制元件。光学补偿结构可以是无源光学补偿结构。光学补偿结构可以包括补充前照明光源，漫射器，黑色掩模，衍射光学元件，滤色器，抗反射层，散射光的结构，微透镜阵列和全息图中的一个或多个电影。

39. 发明授权

US07289259B2 Conductive bus structure for interferometric modulator array 有权
标题翻译：用于干涉式调制器阵列的导电总线结构
公开(公告)号：US07289259B2
公开(公告)日：2007-10-30
申请号：US11057045
申请日：2005-02-11
申请人： Clarence Chui , Jeffrey B. Sampsell
发明人： Clarence Chui , Jeffrey B. Sampsell
IPC分类号： G02B26/00
CPC分类号： G02B26/001 , B81B3/0086 , G09G3/3466 , Y10T29/49117
摘要： Embodiments of an interferometric modulator are disclosed having various enhancements and features including a conductive bus. In certain embodiments, the interferometric modulator has a first conductive layer suspended over a second electrode layer. In certain embodiments, a second conductive layer is provided over the first conductive layer. One of the first and/or second conductive buses may further connect to the first electrode layer and/or the second electrode layer. Other disclosed features can be incorporated into embodiments of the interferometric modulator to improve response time, power consumption, and image resolution.
摘要翻译：公开了具有包括导电总线的各种增强和特征的干涉式调制器的实施例。在某些实施例中，干涉式调制器具有悬挂在第二电极层上的第一导电层。在某些实施例中，在第一导电层上提供第二导电层。第一和/或第二导电总线之一可以进一步连接到第一电极层和/或第二电极层。其他公开的特征可并入干涉式调制器的实施例中以改善响应时间，功耗和图像分辨率。

40. 发明申请

US20110234603A1 CONDUCTIVE BUS STRUCTURE FOR INTERFEROMETRIC MODULATOR ARRAY 失效
标题翻译：用于干涉式调制器阵列的导电总线结构
公开(公告)号：US20110234603A1
公开(公告)日：2011-09-29
申请号：US13155264
申请日：2011-06-07
申请人： Clarence Chui , Jeffrey B. Sampsell
发明人： Clarence Chui , Jeffrey B. Sampsell
IPC分类号： G06F15/00 , G02B26/00 , H01R43/00
CPC分类号： G02B26/001 , B81B3/0086 , G09G3/3466 , Y10T29/49117
摘要： Embodiments of an interferometric modulator are disclosed having various enhancements and features including a conductive bus. In certain embodiments, the interferometric modulator has a first conductive layer suspended over a second electrode layer. In certain embodiments, a second conductive layer is provided over the first conductive layer. One of the first and/or second conductive buses may further connect to the first electrode layer and/or the second electrode layer. Other disclosed features can be incorporated into embodiments of the interferometric modulator to improve response time, power consumption, and image resolution.
摘要翻译：公开了具有包括导电总线的各种增强和特征的干涉式调制器的实施例。在某些实施例中，干涉式调制器具有悬挂在第二电极层上的第一导电层。在某些实施例中，在第一导电层上提供第二导电层。第一和/或第二导电总线之一可以进一步连接到第一电极层和/或第二电极层。其他公开的特征可并入干涉式调制器的实施例中以改善响应时间，功耗和图像分辨率。

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