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31. 发明授权

US06663214B1 Micro liquid dispenser incorporating a liquid pillar injector and method for operating 失效
标题翻译：采用液柱喷射器的微型液体分配器和操作方法
公开(公告)号：US06663214B1
公开(公告)日：2003-12-16
申请号：US10197321
申请日：2002-07-16
申请人： Chung-Chu Chen , Chen-Kuei Chung , Shih-Hui Chen
发明人： Chung-Chu Chen , Chen-Kuei Chung , Shih-Hui Chen
IPC分类号： B41J2015
CPC分类号： B01L3/0262 , B01L2300/165 , B01L2400/0481
摘要： A micro liquid dispenser that incorporates a liquid pillar injector and a method for depositing liquid on a substrate by the micro liquid dispenser are disclosed. The micro liquid dispenser is constructed by a liquid storage chamber, a micro-actuator and an aperture formed in a semiconductor substrate, such as a silicon substrate. The method for depositing liquid on the substrate can be carried out by positioning a substrate juxtaposed to the aperture of the micro liquid dispenser and then actuating the actuator of the dispenser to inject a liquid pillar from the aperture toward the substrate. Only a tip portion of liquid pillar contacts and thereby attaches to the surface of the substrate while the remaining portion of the liquid pillar breaks off and retracted into the aperture or the liquid storage chamber of the dispenser.
摘要翻译：公开了一种结合液柱注射器的微型液体分配器和用于通过微型液体分配器将液体沉积在基底上的方法。微液体分配器由液体储存室，微致动器和形成在诸如硅衬底的半导体衬底中的孔构成。用于在衬底上沉积液体的方法可以通过将放置在微液体分配器的孔上的衬底放置并且然后致动分配器的致动器来将来自孔的液柱注入衬底来进行。只有液柱的尖端部分接触，从而附着到基板的表面，同时液柱的剩余部分脱落并缩回到分配器的孔或储液室中。

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