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    • 36. 发明授权
    • Method for forming a multi-gap liquid crystal display
    • US06628366B2
    • 2003-09-30
    • US09842037
    • 2001-04-25
    • Ivan WuDai-Liang Ting
    • Ivan WuDai-Liang Ting
    • G02F1133
    • G02F1/133371
    • The invention provides a method for forming a multi-gap liquid crystal display. The method includes providing a substrate. A first insulating layer is formed on the substrate. Several bus lines are formed on the first insulating layer. A second insulating layer is formed on the first insulating layer and the bus lines. The bus lines divides the substrate into a first color region, a second color region, and a third color region. A photoresist layer covers the second color region and the third color region, where the photoresist layer at the second color region is thinner than that at the third color region. A portion of the first insulating layer and the second insulating layer is etched to expose the substrate at the first color region. A portion of the photoresist layer at the second color region is removed, whereby the second insulating layer is exposed and the remaining photoresist layer still covers the third color region and the bus lines. The second insulating layer is etched to expose the first insulating at the second color region, using the remaining photoresist layer as a mask. Alternatively, the first step of etching can only remove a portion or the whole of the second insulating layer in the first color region, and then the second step of etching removes the first insulating layer to expose the substrate.
    • 37. 发明授权
    • Method of making a color filter plate with multi-gap for LCD
    • 制造LCD多重间隙滤色片的方法
    • US06037084A
    • 2000-03-14
    • US133516
    • 1998-08-12
    • Dai-Liang TingYong-Hong Lu
    • Dai-Liang TingYong-Hong Lu
    • G02F1/1333G02F1/1335
    • G02F1/133516G02F1/133371G02F1/133514
    • The method includes patterning red, green and blue pixels (R, G, B) on a substrate. A transparent positive type photoresist is coated on the color pixels. A first exposure is performed by an illumination using a photomask having an opening aligned to the red pixels (R). Next, the photomask is relatively shift to a position such that the opening is aligned to the green pixels (g). Then, a second exposure is carried out to expose the positive photoresist. Similarly, the photomask is also shift such that the opening is aligned to the blue pixels. Subsequently, the positive photoresist is exposed by the illumination by using the photomask. The positive photoresist is exposed by controlling the intensity of the illumination, exposure time or the combination thereof. Then, the positive photoresist is developed by conventional manner. Subsequently, a color filter plate with multi-gap for LCD is formed.
    • 该方法包括在衬底上图案化红色,绿色和蓝色像素(R,G,B)。 透明正型光致抗蚀剂涂覆在彩色像素上。 通过使用具有与红色像素(R)对准的开口的光掩模的照明来执行第一曝光。 接下来,光掩模相对地移动到使得开口与绿色像素(g)对准的位置。 然后,进行第二曝光以曝光正性光致抗蚀剂。 类似地,光掩模也移动,使得开口对准蓝色像素。 随后,通过使用光掩模通过照明曝光正性光致抗蚀剂。 通过控制照明的强度,曝光时间或其组合来曝光正性光致抗蚀剂。 然后,通过常规方式显影正性光致抗蚀剂。 随后,形成具有用于LCD的多间隙的滤色器板。