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    • 31. 发明申请
    • CONTACT AREA MEASUREMENT DEVICE AND METHOD FOR MEASURING CONTACT AREA
    • 接触面积测量装置和测量接触区域的方法
    • US20110013835A1
    • 2011-01-20
    • US12736163
    • 2009-02-23
    • Masao EguchiTakashi ShibamiyaManabu SawayanagiTomoyuki Miyazaki
    • Masao EguchiTakashi ShibamiyaManabu SawayanagiTomoyuki Miyazaki
    • G06K9/00
    • G01B11/28G01B11/285G01N21/45G01N2015/1075
    • A novel contact area measuring apparatus is provided. The contact area measuring apparatus includes a light transmissive substrate 6 in contact with a specimen 7, illumination means for illuminating the light transmissive substrate 6 with white light from the opposite side of the light transmissive substrate 6 to the specimen 7, interference image acquisition means 11 for acquiring an interference image produced by the light reflected off the specimen 7 and the light reflected off the light transmissive substrate 6, intensity histogram creation means for creating an intensity histogram from information on the intensity of the interference image, and contact area computation means for calculating a contact area from the intensity histogram. The interference image acquisition means 11 acquires an interference image and information on the intensity of the interference image. The intensity histogram creation means forms separate RGB intensity information from the information on the intensity of the interference image and creates a G-intensity histogram. The contact area computation means separates the intensity histogram into a plurality of normal distributions by using optimized approximation of complex normal distribution and calculates the contact area from the lowest-intensity normal distribution.
    • 提供了一种新颖的接触面积测量装置。 接触区域测量装置包括与样本7接触的透光基板6,用于将透光基板6从透光基板6的相反侧的白光照射到样本7的照明装置,干涉图像获取装置11 用于获取由从样本7反射的光产生的干涉图像和从透光基板6反射的光产生的干涉图像;强度直方图生成装置,用于根据关于干涉图像的强度的信息创建强度直方图;以及接触面积计算装置, 从强度直方图计算接触面积。 干涉图像获取装置11获取干涉图像和关于干涉图像的强度的信息。 强度直方图生成装置根据关于干涉图像的强度的信息形成分离的RGB强度信息,并创建G强度直方图。 接触面积计算装置通过使用复正态分布的优化近似将强度直方图分离为多个正态分布,并从最低强度正态分布计算接触面积。