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    • 34. 发明授权
    • Shaft fastening
    • 轴紧固
    • US5716156A
    • 1998-02-10
    • US765516
    • 1996-12-30
    • Thomas BayerWerner Hofmann
    • Thomas BayerWerner Hofmann
    • F16D1/06F16D1/072F16B11/00
    • F16D1/072Y10T403/4949Y10T403/4966Y10T403/7035
    • In a shaft fixture in which a toothed and especially knurled region (B) of a shaft (2) is pressed into a drilling (3) in a seat (4) to form a positive fit with great centric precision via two separate centering sections (A, C), the solidity of the fixture is to be increased in that the shaft has a toothed region (D) outside the section to be introduced into a securing drilling. This toothed region may in particular be a pinion (1) which is pressed via a shaped shaft (2) with a hurled region (B) into a seat drilling (3) to provide a positive fit. To this end the end sections of the gaps between the teeth in the pinion region (D) can terminate in the adjacent shaft region (C) so that the diameter of the shaft may be made larger in relation to that of the pinion than if the sections did not so terminate.
    • PCT No.PCT / DE96 / 00440 Sec。 371日期1996年12月30日第 102(e)日期1996年12月30日PCT 1996年3月8日PCT公布。 出版物WO96 / 35885 日期1996年11月14日在轴固定装置中,其中将轴(2)的带齿且特别滚花的区域(B)压入座(4)中的钻孔(3)中以形成具有高精度中心精度的正配合 两个单独的定心部分(A,C),要增加固定装置的坚固性,因为轴具有在引导到固定钻孔中的部分之外的齿形区域(D)。 这个齿形区域可以特别地是经由具有倾倒区域(B)的成形轴(2)压入座椅钻孔(3)中以提供正配合的小齿轮(1)。 为此,小齿轮区域(D)中的齿之间的间隙的端部部分可以在相邻的轴区域(C)中终止,使得轴的直径可以相对于小齿轮的直径大于如果 部分没有这样终止。
    • 35. 发明授权
    • Micromechanical sensor fabrication process
    • 微机械传感器制造工艺
    • US5282924A
    • 1994-02-01
    • US034639
    • 1993-03-22
    • Thomas BayerJohann Greschner
    • Thomas BayerJohann Greschner
    • G01Q70/10B44C1/22B81C1/00C03C15/00C23F4/00G01B7/34G01B21/30G01Q60/04G01Q60/08G01Q60/16G01Q60/38G01Q70/16H01J9/14H01J37/00H01J37/28H01L21/306C03C25/06
    • G01Q60/38B82Y35/00G01Q60/04G01Q60/08G01Q60/16Y10S977/878
    • A method for producing micromechanical sensors for the AFM/STM/MFM profilometry is described in which a multiple step mask of cantilever beam and tip is transferred step by step into the wafer substrate by reactive ion etching. A particular highly anisotropic etching step is used for etching and shaping of the tip. This process step uses an Ar/C12 ambient at a pressure of about 100 .sup.6 bar and a self bias voltage of about 300 V DC. The ratio of pressure to self bias voltage determines the concave shape of the tip side-walls. This etching step is followed by a thermal oxidation step. The oxidation is carried out for a time until the oxidation fronts at the thinnest point of the tip shaft touch each other. A stripping process with buffered hydrofluoric acid gently removes the thermally grown oxide. The oxidation process allows--via oxidation time--a modification of tip height and angle in an extremely controllable manner. To prevent sticking of the tip to the structure to be profiled the ratio of tip diameter to tip height should be about 1:10. Should this ratio be exceeded the tip has to be arranged on a pedestal. The structure, comprising a cantilever beam and a tip on pedestal, can be produced with the same but slightly modified process of the invention.
    • 描述了用于AFM / STM / MFM轮廓测量法的微机械传感器的制造方法,其中悬臂梁和尖端的多步骤掩模通过反应离子蚀刻逐步转移到晶片衬底中。 特别是高度各向异性的蚀刻步骤用于尖端的蚀刻和成型。 该工艺步骤在约100 6bar的压力和约300V DC的自偏压下使用Ar / C12环境。 压力与自偏压的比率决定了顶端侧壁的凹形。 该蚀刻步骤之后是热氧化步骤。 氧化进行一段时间,直到尖端轴的最薄点处的氧化前沿相互接触。 用缓冲氢氟酸的汽提过程轻轻地除去热生长的氧化物。 氧化过程允许通过氧化时间 - 以极其可控的方式改变尖端高度和角度。 为了防止尖端粘附到待成型的结构上,尖端直径与尖端高度的比率应为约1:10。 如果超过该比率,则必须将尖端布置在基座上。 包括悬臂梁和基座上的尖端的结构可以用本发明的相同但略微改进的方法制造。