专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

31. 发明申请

US20090136381A1 Ternary nickel eutectic alloy 有权
标题翻译：三元镍共晶合金
公开(公告)号：US20090136381A1
公开(公告)日：2009-05-28
申请号：US12230561
申请日：2008-09-02
申请人： Sammy Tin , Robert J. Mitchell
发明人： Sammy Tin , Robert J. Mitchell
IPC分类号： C22C19/05
CPC分类号： C22C19/05
摘要： A ternary nickel eutectic alloy consisting of 4.5 to 11 wt % chromium, 1 to 6 wt % cobalt, 1 to 4 wt % aluminium, 0 to 1.5 wt % titanium, 0 to 3 wt % tantalum, 16 to 22 wt % niobium, 0 to 3 wt % molybdenum, 0 to 4 wt % tungsten, 0 to 1 wt % hafnium, 0 to 0.1 wt % zirconium, 0 to 0.1 wt % silicon, 0.01 to 0.1 wt % carbon, 0 to 0.01 wt % boron and the balance nickel plus incidental impurities.
摘要翻译：三元镍共晶合金，其由4.5至11重量％的铬，1至6重量％的钴，1至4重量％的铝，0至1.5重量％的钛，0至3重量％的钽，16至22重量％的铌，0 至3重量％的钼，0至4重量％的钨，0至1重量％的铪，0至0.1重量％的锆，0至0.1重量％的硅，0.01至0.1重量％的碳，0至0.01重量％的硼，镍加附带杂质。

32. 发明申请

US20080138175A1 High throughput wafer notch aligner 有权
标题翻译：高通量晶圆缺口对准器
公开(公告)号：US20080138175A1
公开(公告)日：2008-06-12
申请号：US11634697
申请日：2006-12-06
申请人： Robert J. Mitchell , Joseph Ferrara
发明人： Robert J. Mitchell , Joseph Ferrara
IPC分类号： H01L21/677 , B65H1/00 , G06F7/00
CPC分类号： H01L21/681 , H01L21/67265 , H01L21/67745
摘要： An ion implantation apparatus, system, and method are provided for a transferring a plurality of workpieces between vacuum and atmospheric pressures, wherein an alignment mechanism is operable to align a plurality of workpieces for generally simultaneous transportation to a dual-workpiece load lock chamber. The alignment mechanism comprises a characterization device, an elevator, and two vertically-aligned workpiece supports for supporting two workpieces. First and second atmospheric robots are configured to generally simultaneously transfer two workpieces at a time between load lock modules, the alignment mechanism, and a FOUP. Third and fourth vacuum robots are configured to transfer one workpiece at a time between the load lock modules and a process module.
摘要翻译：提供一种用于在真空和大气压之间传送多个工件的离子注入装置，系统和方法，其中对准机构可操作以将多个工件对准，以便大体上同时传送到双工件加载锁定室。对准机构包括表征装置，电梯和用于支撑两个工件的两个垂直对齐的工件支撑件。第一和第二大气机器人被配置为一般在负载锁定模块，对准机构和FOUP之间同时传送两个工件。第三和第四真空机器人被配置为在加载锁模块和处理模块之间一次传送一个工件。

33. 发明申请

US20120269646A1 NICKEL BASE SUPERALLOY 审中-公开
标题翻译：镍基超级合金
公开(公告)号：US20120269646A1
公开(公告)日：2012-10-25
申请号：US13538184
申请日：2012-06-29
申请人： Robert J. MITCHELL , Mark C. HARDY
发明人： Robert J. MITCHELL , Mark C. HARDY
IPC分类号： C22C19/05 , C22C30/00 , F01D5/14 , B22F3/00
CPC分类号： C22C19/056 , C22C1/0433 , C22C1/0491 , C22C19/07 , C22C30/00
摘要： A nickel base superalloy consisting of 20 to 40 wt % cobalt, 10 to 15 wt % chromium, 3 to 6 wt % molybdenum, 0 to 5 wt % tungsten, 2.5 to 4 wt % aluminium, 3.4 to 5 wt % titanium, 1.35 to 2.5 wt % tantalum, 0 to 2 wt % niobium, 0.5 to 1 wt % hafnium, 0 to 0.1 wt % zirconium, 0.01 to 0.05 wt % carbon, 0.01 to 0.05 wt % boron, 0 to 2 wt % silicon and the balance nickel plus incidental impurities. The gamma prime phase comprises (Ni/Co)3 (Al/Ti/Ta).
摘要翻译：由20〜40重量％的钴，10〜15重量％的铬，3〜6重量％的钼，0〜5重量％的钨，2.5〜4重量％的铝，3.4〜5重量％的钛，1.35〜 2.5重量％的钽，0至2重量％的铌，0.5至1重量％的铪，0至0.1重量％的锆，0.01至0.05重量％的碳，0.01至0.05重量％的硼，0至2重量％的硅，加附加杂质。 γ'相包括（Ni / Co）3（Al / Ti / Ta）。

34. 发明授权

US08020398B2 Fluid delivery mechanism for vacuum wafer processing system 有权
标题翻译：真空晶圆处理系统的流体输送机构
公开(公告)号：US08020398B2
公开(公告)日：2011-09-20
申请号：US12243983
申请日：2008-10-02
申请人： Roger B. Fish , Robert J. Mitchell
发明人： Roger B. Fish , Robert J. Mitchell
IPC分类号： C23F1/00
CPC分类号： H01L21/67213 , H01J37/20 , H01J37/3171 , H01J2237/006 , H01J2237/0216 , H01J2237/2001 , H01L21/67109 , Y10T279/23
摘要： The fluid delivery mechanism of the present disclosure provides a solution for use in a single axis of motion that allows the connection of one or more fluid flow paths over a wide range of temperatures into a vacuum environment. The mechanism does not employ flexible tubing that is prone to fatigue, especially at very low temperatures. In one embodiment, a tube is axially moved within a sealed piston to allow for fluid delivery. In a second embodiment, bellows are used to provide the required functionality. In another embodiment, it is possible to achieve movement in two or more axis of motion by utilizing two or more appropriately configured mechanisms.
摘要翻译：本公开的流体输送机构提供了用于单个运动轴线的解决方案，其允许在宽范围的温度下将一个或多个流体流动路径连接到真空环境中。该机构不使用容易疲劳的柔性管，特别是在非常低的温度下。在一个实施例中，管在密封活塞内轴向移动以允许流体输送。在第二实施例中，波纹管用于提供所需的功能。在另一个实施例中，可以通过利用两个或更多个适当配置的机构实现两个或更多个运动轴的运动。

35. 发明申请

US20110198001A1 METHOD OF HEAT TREATING A SUPERALLOY COMPONENT AND AN ALLOY COMPONENT 有权
标题翻译：加热处理超级组件和合金部件的方法
公开(公告)号：US20110198001A1
公开(公告)日：2011-08-18
申请号：US13097567
申请日：2011-04-29
申请人： Robert J. MITCHELL , David U. FURRER , Joseph A. LEMSKY , Mark C. HARDY
发明人： Robert J. MITCHELL , David U. FURRER , Joseph A. LEMSKY , Mark C. HARDY
IPC分类号： C22C19/03 , C22C14/00
CPC分类号： C21D1/70 , C21D1/26 , C21D9/0068 , C21D2221/00
摘要： A method of heat treating a superalloy component includes solution heat treating the component at a temperature below the gamma prime solvus temperature to produce a fine grain structure. Insulation is placed over a first area to form an insulated assembly that is placed in a furnace at a temperature below the solvus temperature and maintained at that temperature for a predetermined time to achieve a uniform temperature. The temperature is increased at a predetermined rate to a temperature above the solvus temperature to maintain a fine grain structure in a first region, produce a coarse grain structure in a second region and produce a transitional structure in a third region between the first and second regions. The insulated assembly is removed from the furnace when the second region has been above the solvus temperature for a predetermined time and/or the first region has reached a predetermined temperature.
摘要翻译：热处理超合金部件的方法包括在低于γ'固溶温度的温度下对组分进行固溶热处理以产生细晶粒结构。将绝缘材料放置在第一区域上以形成绝缘组件，其被放置在低于固溶温度的温度下的炉中，并在该温度下保持预定时间以达到均匀的温度。将温度以预定的速率增加到高于溶剂温度的温度以保持第一区域中的细晶粒结构，在第二区域中产生粗晶粒结构，并在第一和第二区域之间的第三区域中产生过渡结构。当第二区域已经超过固溶温度达预定时间和/或第一区域已经达到预定温度时，将绝热组件从炉中移出。

36. 发明授权

US07949425B2 High throughput wafer notch aligner 有权
标题翻译：高通量晶圆缺口对准器
公开(公告)号：US07949425B2
公开(公告)日：2011-05-24
申请号：US11634697
申请日：2006-12-06
申请人： Robert J. Mitchell , Joseph Ferrara
发明人： Robert J. Mitchell , Joseph Ferrara
IPC分类号： G07F7/00
CPC分类号： H01L21/681 , H01L21/67265 , H01L21/67745
摘要： An ion implantation apparatus, system, and method are provided for a transferring a plurality of workpieces between vacuum and atmospheric pressures, wherein an alignment mechanism is operable to align a plurality of workpieces for generally simultaneous transportation to a dual-workpiece load lock chamber. The alignment mechanism comprises a characterization device, an elevator, and two vertically-aligned workpiece supports for supporting two workpieces. First and second atmospheric robots are configured to generally simultaneously transfer two workpieces at a time between load lock modules, the alignment mechanism, and a FOUP. Third and fourth vacuum robots are configured to transfer one workpiece at a time between the load lock modules and a process module.
摘要翻译：提供一种用于在真空和大气压之间传送多个工件的离子注入装置，系统和方法，其中对准机构可操作以将多个工件对准，以便大体上同时传送到双工件加载锁定室。对准机构包括表征装置，电梯和用于支撑两个工件的两个垂直对准的工件支撑件。第一和第二大气机器人被配置为一般在负载锁定模块，对准机构和FOUP之间同时传送两个工件。第三和第四真空机器人被配置为在加载锁模块和处理模块之间一次传送一个工件。

37. 发明申请

US20110066409A1 NETWORK ATTACK VISUALIZATION AND RESPONSE THROUGH INTELLIGENT ICONS 有权
标题翻译：网络通过智能图标进行可视化和响应
公开(公告)号：US20110066409A1
公开(公告)日：2011-03-17
申请号：US12882637
申请日：2010-09-15
申请人： Scott C. Evans , T. Stephen Markham , Richard Bejtlich , Bruce G. Barnett , Bernhard J. Scholz , Robert J. Mitchell, JR. , Weizhong Yan , Jeremy Impson , Eric Steinbrecher
发明人： Scott C. Evans , T. Stephen Markham , Richard Bejtlich , Bruce G. Barnett , Bernhard J. Scholz , Robert J. Mitchell, JR. , Weizhong Yan , Jeremy Impson , Eric Steinbrecher
IPC分类号： G06F3/048 , G06F7/60
CPC分类号： H04L67/36 , G06F21/577 , G06F2221/2101 , H04L63/1416
摘要： A network activity visualization system can include an MDL grammar database adapted to store a plurality of MDL grammars, and a pattern matching module adapted to match a received network activity data set against the MDL grammars by calculating a distance of the network activity data set from each MDL grammar. The system can also include an intelligent icon module adapted to receive the MDL grammars and distances of a network data set from each respective MDL grammar, and adapted to generate intelligent icons based on the MDL grammars and distances. The system can further include a display system adapted to display the intelligent icons so as to provide a visual indication of network security.
摘要翻译：网络活动可视化系统可以包括适于存储多个MDL语法的MDL语法数据库，以及模式匹配模块，其适于通过计算每个网络活动数据集的距离来匹配所接收的网络活动数据集与MDL语法 MDL语法该系统还可以包括适于从每个相应的MDL语法接收MDL语法和网络数据集的距离的智能图标模块，并且适于基于MDL语法和距离生成智能图标。该系统还可以包括适于显示智能图标的显示系统，以提供网络安全性的可视指示。

38. 发明申请

US20090302281A1 METHOD AND APPARATUS FOR PRODUCING A DISLOCATION-FREE CRYSTALLINE SHEET 有权
标题翻译：用于生产无分离晶体薄片的方法和装置
公开(公告)号：US20090302281A1
公开(公告)日：2009-12-10
申请号：US12478513
申请日：2009-06-04
申请人： Peter L. Kellerman , Frank Sinclair , Frederick Carlson , Nicholas P.T. Bateman , Robert J. Mitchell
发明人： Peter L. Kellerman , Frank Sinclair , Frederick Carlson , Nicholas P.T. Bateman , Robert J. Mitchell
IPC分类号： H01B1/02 , C01B33/02 , B29C55/02 , B29C61/00
CPC分类号： C30B11/003 , C30B11/001 , C30B28/06 , C30B29/06 , C30B29/60
摘要： A dislocation-free sheet may be formed from a melt. A sheet of material with a first width is formed on a melt of the material using a cooling plate. This sheet has dislocations. The sheet is transported with respect to the cooling plate and the dislocations migrate to an edge of the sheet. The first width of the sheet is increased to a second width by the cooling plate. The sheet does not have dislocations at the second width. The cooling plate may have a shape with two different widths in one instance. The cooling plate may have segments that operate at different temperatures to increase the width of the sheet in another instance. The sheet may be pulled or flowed with respect to the cooling plate.
摘要翻译：可以由熔体形成无位错的片材。使用冷却板在材料的熔体上形成具有第一宽度的材料片。这张纸有位错。片材相对于冷却板输送，并且位错迁移到片材的边缘。片材的第一宽度通过冷却板增加到第二宽度。片材在第二个宽度上不具有位错。在一种情况下，冷却板可以具有两种不同宽度的形状。冷却板可以具有在不同温度下操作的段，以在另一种情况下增加片材的宽度。片材可以相对于冷却板拉动或流动。

39. 发明授权

US07010388B2 Work-piece treatment system having load lock and buffer 有权
标题翻译：具有加载锁定和缓冲功能的工件处理系统
公开(公告)号：US07010388B2
公开(公告)日：2006-03-07
申请号：US10444019
申请日：2003-05-22
申请人： Robert J. Mitchell , Allan D. Weed , Richard Gueler
发明人： Robert J. Mitchell , Allan D. Weed , Richard Gueler
IPC分类号： G06F7/00
CPC分类号： H01L21/67763 , H01L21/67213 , H01L21/67745 , Y10S414/139 , Y10S414/141
摘要： A transfer system for use with a tool for treating a work-piece at sub-atmospheric pressure such as an ion implanter for implanting silicon wafers. An enclosure defines a low pressure region for treatment of work-pieces placed at a work-piece treatment station within the low pressure region. Multiple work-piece isolation load locks transfer work-pieces, one or two at a time, from a higher pressure region to the lower pressure for treatment and back to said higher pressure subsequent to said treatment. A first robot transfers work-pieces within the low pressure region from the load locks to a treatment station within the low pressure region. Multiple other robots positioned outside the low pressure region transfers work-pieces to and from the multiple work-piece isolation load locks from a source of said work-pieces prior to treatment and to a destination of said work-pieces after said treatment.
摘要翻译：一种用于处理亚大气压下的工件的工具的转移系统，例如用于植入硅晶片的离子注入机。外壳限定了用于处理放置在低压区域内的工件处理站的工件的低压区域。多个工件隔离负载锁将工件一次一个或两个从较高压力区域传递到较低压力以进行处理，并在所述处理之后返回到所述较高压力。第一机器人将低压区域内的工件从负载锁转移到低压区域内的处理站。定位在低压区域之外的多个其它机器人在处理之前将工件从多个工件隔离负载锁转移到所述工件的源并在所述处理之后传送到所述工件的目的地。

40. 发明授权

US06740894B1 Adjustable implantation angle workpiece support structure for an ion beam implanter utilizing a linear scan motor 有权
标题翻译：使用线性扫描电机的离子束注入机的可调植入角度工件支撑结构
公开(公告)号：US06740894B1
公开(公告)日：2004-05-25
申请号：US10371606
申请日：2003-02-21
申请人： Robert J. Mitchell
发明人： Robert J. Mitchell
IPC分类号： H01J37317
CPC分类号： H01J37/20 , H01J37/3171 , H01J2237/202
摘要： An ion beam implanter includes an ion beam source for generating an ion beam moving along a beam line and a vacuum or implantation chamber wherein a workpiece is positioned to intersect the ion beam for ion implantation of a surface of the workpiece by the ion beam. The ion beam implanter further includes a workpiece support structure coupled to the implantation chamber and supporting the workpiece. The workpiece support structure includes a rotation member rotatably affixed to the implantation chamber. Rotation of the rotation member with respect to the implantation chamber changes an implantation angle of the workpiece with respect to the portion of the ion beam beam line within the implantation chamber. The workpiece support structure further includes a translation member disposed within the implantation chamber, movably coupled to the rotation member and supporting the workpiece for linear movement along a path of travel. The translation member includes a linear motor.
摘要翻译：离子束注入机包括用于产生沿着束线移动的离子束的离子束源和真空或注入室，其中工件被定位成与离子束相交，用于通过离子束离子注入工件的表面。离子束注入机还包括耦合到注入室并支撑工件的工件支撑结构。工件支撑结构包括可旋转地固定到植入室的旋转构件。旋转构件相对于注入室的旋转改变了工件相对于植入室内的离子束束线的部分的注入角度。所述工件支撑结构还包括设置在所述注入室内的平移构件，所述平移构件可移动地联接到所述旋转构件并且支撑所述工件以沿着行进路径线性移动。平移构件包括线性电动机。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式