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    • 38. 发明授权
    • Vacuum robot adapted to grip and transport a substrate and method thereof with passive bias
    • 适于夹持和输送基底的真空机器人及其被动偏压的方法
    • US09401296B2
    • 2016-07-26
    • US13688635
    • 2012-11-29
    • Persimmon Technologies Corporation
    • Martin Hosek
    • H01L21/687H01L21/683B25J15/00B25J15/08B25J15/10
    • H01L21/683B25J15/0014B25J15/083B25J15/10H01L21/68707
    • A vacuum robot adapted to grip and transport a substrate. The robot includes a robot drive coupled to an arm and having an end-effector adapted to support the substrate. A robot gripper system includes a front support having at least one hard stop, a movable contact element coupled to the end-effector, a bias device and at least one actuator coupled to the end-effector configured to move the contact element between a release position and a grip position. The bias device is configured to passively bias the contact element in the grip position such that the contact element contacts an edge of the substrate to urge the substrate against the at least one hard stop to secure the substrate in the grip position and to passively bias the contact element in the release position such that the contact element is retained in the release position.
    • 适于夹持和输送基底的真空机器人。 机器人包括耦合到臂并具有适于支撑衬底的端部执行器的机器人驱动器。 机器人夹持器系统包括具有至少一个硬止动件的前支撑件,联接到末端执行器的可动触头元件,偏置装置和联接到端部执行器的至少一个致动器,该致动器构造成使接触元件在释放位置 和抓地位置。 偏置装置被配置为被动地将接触元件偏置在把手位置,使得接触元件接触衬底的边缘以将衬底推靠在至少一个硬止动器上以将衬底固定在把手位置中,并且被动偏置 接触元件处于释放位置,使得接触元件保持在释放位置。