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31. 发明授权

US4952272A Method of manufacturing probing head for testing equipment of semi-conductor large scale integrated circuits 失效
标题翻译：制造半导体大规模集成电路检测设备探测头的方法
公开(公告)号：US4952272A
公开(公告)日：1990-08-28
申请号：US358252
申请日：1989-05-30
申请人： Hironobu Okino , Akio Fujiwara , Yutaka Akiba , Susumu Kasukabe , Tsuyoshi Fujita , Masao Mitani , Kazuo Hirota
发明人： Hironobu Okino , Akio Fujiwara , Yutaka Akiba , Susumu Kasukabe , Tsuyoshi Fujita , Masao Mitani , Kazuo Hirota
IPC分类号： G01R31/26 , G01R1/073 , G01R31/28 , H01L21/66
CPC分类号： G01R1/07314
摘要： A probe head for use with equipment for testing a semiconductor device such as a large scale integrated circuit (LSI) includes electrode pads are formed on a circuit substrate, and a pad protecting conductive layer formed on the pads. A probe pin forming material is grown which is worked into a pin-like configuration, thereby improving a pin assembling property of a probe head portion and this realizes highly accurate pinning with high reliability.
摘要翻译：用于测试诸如大规模集成电路（LSI）的半导体器件的设备的探针头包括在电路基板上形成电极焊盘，以及形成在焊盘上的衬垫保护导电层。生长探针形成材料，其被加工成针状结构，从而提高探针头部分的针组装性能，从而实现高度可靠的高精度钉扎。

32. 发明授权

US4517444A Thermal printhead 失效
标题翻译：热敏打印头
公开(公告)号：US4517444A
公开(公告)日：1985-05-14
申请号：US572519
申请日：1984-01-20
申请人： Tsuneyoshi Kawahito , Katsuo Abe , Tsuneaki Kamei , Kazuyuki Fujimoto , Masao Mitani , Shigetoshi Hiratsuka
发明人： Tsuneyoshi Kawahito , Katsuo Abe , Tsuneaki Kamei , Kazuyuki Fujimoto , Masao Mitani , Shigetoshi Hiratsuka
IPC分类号： H01L49/00 , B41J2/335 , H01C7/00 , H01C17/06 , H01L49/02 , H05B3/10 , G01D15/10 , H01C1/012 , H05B3/00
CPC分类号： B41J2/33515 , B41J2/3355 , B41J2/3357 , H01L49/02 , H05B3/10
摘要： Disclosed is a thermal printhead made of an insulating substrate, and a heat generating resistor layer formed on the substrate, and wherein the heat generating resistor layer is supplied with electric current. The heat generating resistor layer is made of Cr-Si-SiO alloy, and with the Cr, Si and SiO contents falling within a region defined by points A, B, C and D in a triangular diagram, where the points A, B, C and D are determined as follows:______________________________________ Cr (mol %) (Si (mol %) SiO (mol %) ______________________________________ A 79.4 2.1 18.5 B 58.6 40.9 0.5 C 10.1 89.4 0.5 D 24.4 3.7 71.9. ______________________________________
摘要翻译：公开了一种由绝缘基板制成的热打印头和形成在基板上的发热电阻层，并且其中发热电阻层被供应电流。发热电阻层由Cr-Si-SiO合金制成，并且Cr，Si和SiO含量在三角形图中落在由点A，B，C，D所定义的区域内，其中点A，B， C和D如下确定：-Cr（mol％）（Si（mol％）SiO（mol％）-A 79.4 2.1 18.5 -B 58.6 40.9 0.5 -C 10.1 89.4 0.5 -D 24.4 3.7 71.9。

33. 发明授权

US4343986A Thermal printhead 失效
标题翻译：热敏打印头
公开(公告)号：US4343986A
公开(公告)日：1982-08-10
申请号：US245511
申请日：1981-03-19
申请人： Masao Mitani , Toyoji Tsunoda , Tsuneyoshi Kawahito , Tsuneaki Kamei , Akira Yabushita
发明人： Masao Mitani , Toyoji Tsunoda , Tsuneyoshi Kawahito , Tsuneaki Kamei , Akira Yabushita
IPC分类号： H01C7/00 , B41J2/335 , H01L49/02 , H04N1/032 , H05B1/00
CPC分类号： H04N1/032 , H01L49/02
摘要： A thermal printhead comprising a substrate, heat generating thin film resistor bodies formed on the substrate and electric conductors for supplying the heat generating thin film resistor bodies with electric power, characterized in that the heat generating thin film resistor bodies are made of a Cr-Si alloy subjected to a stabilization aging heat treatment.
摘要翻译：一种热敏打印头，包括基板，形成在基板上的发热薄膜电阻体和用于向发热薄膜电阻体供电的导电体，其特征在于，所述发热薄膜电阻体由Cr-Si 合金进行稳定化时效热处理。

34. 发明授权

US06663227B2 Semiconductor device and process for producing the same 失效
公开(公告)号：US06663227B2
公开(公告)日：2003-12-16
申请号：US10056043
申请日：2002-01-28
申请人： Ryoichi Yamamoto , Masao Mitani
发明人： Ryoichi Yamamoto , Masao Mitani
IPC分类号： B41J205
CPC分类号： B41J2/1643 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632
摘要： The semiconductor device is in the form of a semiconductor chip formed as a recording head of an ink-jet printer or in the form of a semiconductor wafer having at least two semiconductor chips. The semiconductor chip has at least an ink ejection unit, an integrated circuit composed of a drive circuit for driving the ink ejection unit, bonding pads and a metal film covering at least part of an upper layer of the integrated circuit. The metal film is formed to extend from the integrated circuit to an edge of the semiconductor chip. The semiconductor wafer further has at least one grounding pad being formed of the metal film in a region peripheral to the semiconductor wafer and which is outside the semiconductor chips. The metal film is formed not only to extend from each of the integrated circuits to the edge of each of the semiconductor chips but also in a region between the semiconductor chips and the metal films formed to extend to edges of all the semiconductor chips are interconnected via the region between the semiconductor chips and also connected to the grounding pad.

35. 发明授权

US06598957B2 Recording head and process for producing the same 失效
标题翻译：记录头及其制作方法
公开(公告)号：US06598957B2
公开(公告)日：2003-07-29
申请号：US10054707
申请日：2002-01-24
申请人： Ryoichi Yamamoto , Masao Mitani
发明人： Ryoichi Yamamoto , Masao Mitani
IPC分类号： B41J2135
CPC分类号： B41J2/1628 , B41J2/1433 , B41J2/1606 , B41J2/162 , B41J2/1623 , B41J2/1642 , B41J2/1646 , Y10T29/42
摘要： The recording head of an ink-jet printer includes a main body having ink ejection devices and a device for driving the ink ejection devices independently and an orifice plate attached to the main body having ink ejection orifices opened in positions corresponding to the ink ejection devices. At least one side of the orifice plate is made of fluoroplastic, a surface of one side of the orifice plate made of the fluoroplastic has been treated to become more water-repellent than a bulk material of the fluoroplastic itself and a surface of the other side of the orifice plate attached to the main body is more hydrophilic than the bulk material. The surface of one side of the orifice plate made of the fluoroplastic and treated to become more water-repellent contains more fluorine atoms than are inherently present in the fluoroplastic in an untreated state.
摘要翻译：喷墨打印机的记录头包括具有喷墨装置的主体和用于独立驱动喷墨装置的装置以及安装在主体上的孔板，在与喷墨装置相对应的位置处打开墨喷射孔。孔板的至少一侧由氟塑料制成，由氟塑料制成的孔板的一侧的表面已经被处理成比氟塑料本身的散装材料和另一侧的表面更具防水性连接到主体的孔板比主体材料更亲水。由氟塑料制成并被处理为变得更具防水性的孔板的一侧的表面比未处理状态下的氟塑料中固有地含有更多的氟原子。

36. 发明授权

US5831648A Ink jet recording head 失效
标题翻译：喷墨记录头
公开(公告)号：US5831648A
公开(公告)日：1998-11-03
申请号：US580273
申请日：1995-12-27
申请人： Masao Mitani , Kenji Yamada , Katsunori Kawasumi , Kazuo Shimizu , Osamu Machida
发明人： Masao Mitani , Kenji Yamada , Katsunori Kawasumi , Kazuo Shimizu , Osamu Machida
IPC分类号： B41J2/005 , B41J2/14 , B41J2/16 , B41J2/05
CPC分类号： B41J2/14056 , B41J2/005 , B41J2/1412 , B41J2/14129 , B41J2/1603 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/164 , B41J2202/11
摘要： A plurality of heaters are provided on a silicon substrate in a plurality of individual ink channels. Each heater is constructed from a thin-film resistor and a thin-film conductor. The thin-film resistor is formed with an electrical insulation layer at its upper surface. The electrical insulation layer is formed through subjecting the thin-film resistor to a high-temperature thermal oxidation process. The thin-film resistor formed with the electrical insulation layer may be covered with an additional insulation layer of a thickness substantially equal to the thin-film resistor.
摘要翻译：多个加热器设置在多个单独墨水通道中的硅基板上。每个加热器由薄膜电阻器和薄膜导体构成。薄膜电阻器在其上表面形成有电绝缘层。通过对薄膜电阻进行高温热氧化处理来形成电绝缘层。形成有电绝缘层的薄膜电阻器可以用厚度基本上等于薄膜电阻器的附加绝缘层覆盖。

37. 发明授权

US5790154A Method of manufacturing an ink ejection recording head and a recording apparatus using the recording head 失效
标题翻译：制造喷墨记录头的方法和使用记录头的记录装置
公开(公告)号：US5790154A
公开(公告)日：1998-08-04
申请号：US761900
申请日：1996-12-09
申请人： Masao Mitani , Kenji Yamada , Osamu Machida
发明人： Masao Mitani , Kenji Yamada , Osamu Machida
IPC分类号： B41J2/16 , B41J2/05 , H01C1/012 , H01L29/00
CPC分类号： B41J2/14129 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1642 , B41J2/1643 , B41J2/1646 , B41J2202/03 , B41J2202/13
摘要： In an ink ejection recording head, a silicon dioxide layer is formed on the surface of a silicon substrate, a silicon nitride layer is formed on the silicon dioxide layer, and a plurality of heaters are formed on the silicon nitride layer. The heater is constituted by a thin film resistor made from a Ta--Si--O alloy and a thin film conductor made from nickel. Further, a gold layer is formed through plating on at least a portion of the thin film conductor to be connected to another conductor prior to thermally oxidizing the heaters.
摘要翻译：在喷墨记录头中，在硅衬底的表面上形成二氧化硅层，在二氧化硅层上形成氮化硅层，在氮化硅层上形成多个加热器。加热器由由Ta-Si-O合金制成的薄膜电阻器和由镍制成的薄膜导体构成。此外，在热氧化加热器之前，在至少一部分薄膜导体上形成金层以连接到另一导体。

38. 发明授权

US5697144A Method of producing a head for the printer 失效
标题翻译：制造打印机头部的方法
公开(公告)号：US5697144A
公开(公告)日：1997-12-16
申请号：US502179
申请日：1995-07-13
申请人： Masao Mitani , Kenji Yamada , Katsunori Kawasumi , Kazuo Shimizu , Osamu Machida
发明人： Masao Mitani , Kenji Yamada , Katsunori Kawasumi , Kazuo Shimizu , Osamu Machida
IPC分类号： B41J2/05 , B41J2/16 , H05B3/00
CPC分类号： B41J2/14129 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1635 , B41J2/1643 , B41J2/1646 , Y10T29/49083
摘要： To provide a method of fabricating, using thin-film processes only, a 1,600 dpi head with nozzles arranged two-dimensionally on a substrate, e.g., silicon wafer, a drive LSI, thin-film resistors and thin-film conductors are formed on the silicon wafer. Thereafter, ink channels and through-holes are formed by silicon anisotropic etching from both sides of the silicon wafer. After connecting the orifice plate to the silicon wafer, nozzles are formed in the orifice plate using photoetching.
摘要翻译：为了提供仅使用薄膜工艺的方法，在基板上例如硅晶片，驱动LSI，薄膜电阻器和薄膜导体上形成具有二维排列的喷嘴的1,600dpi的头部硅晶片。此后，通过硅晶片的两侧的硅各向异性蚀刻形成油墨通道和通孔。在将孔板连接到硅晶片之后，使用光刻在孔板中形成喷嘴。

39. 发明授权

US5621524A Method for testing ink-jet recording heads 失效
标题翻译：喷墨记录头测试方法
公开(公告)号：US5621524A
公开(公告)日：1997-04-15
申请号：US630598
申请日：1996-04-10
申请人： Masao Mitani
发明人： Masao Mitani
IPC分类号： B41J2/16 , G01N21/00
CPC分类号： B41J2/14129 , B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1635 , B41J2/1643 , B41J2/1646
摘要： In an ink jet recording device having a print head wherein an expanding bubble formed in ink ejects an ink droplet from an orifice, a method for testing wafers on which a large number of print heads are formed is provided wherein the head is filled with pure water, water droplets of the pure water is ejected by application of a start signal to the print head, ejected water droplets is irradiated with condensed light, and the condensed light scattered by the ejected water droplets is detected. The time at which the scattered light was detected is correlated with time of the start signal, and it is determined whether the head is good or not according to the correlation of the time at which the scattered light was detected and the time of the start signal.
摘要翻译：在具有打印头的喷墨记录装置中，其中形成在墨中的膨胀气泡从孔喷射墨滴，提供了一种用于测试其上形成有大量打印头的晶片的方法，其中头部填充有纯水通过向打印头施加起始信号来喷射纯水的水滴，用浓缩的光照射喷射的水滴，并且检测被喷出的水滴散射的聚光。检测到散射光的时间与起始信号的时间相关，并且根据检测到散射光的时间与起始信号的时间的相关性来确定头是否良好。

40. 发明授权

US5467112A Liquid droplet ejecting apparatus 失效
标题翻译：液滴喷射装置
公开(公告)号：US5467112A
公开(公告)日：1995-11-14
申请号：US78655
申请日：1993-06-21
申请人： Masao Mitani
发明人： Masao Mitani
IPC分类号： B41J2/475 , B41J2/045 , B41J2/055 , B41J2/14 , B41J2/21 , H04N1/034 , H04N1/23 , B41V2/05
CPC分类号： B41J2/2103 , B41J2/14064
摘要： An ink jet printhead for ejecting an ink from a nozzle. An ink ejection chamber holding ink confronts the nozzle. The liquid ejection chamber shares with a sealed pressure chamber one wall made from a thin film. The sealed pressure chamber is filled with a liquid that generates a bubble when heated to its boiling point. To another wall of the sealed pressure chamber is formed a heat resistor for rapidly heating the pressurizing liquid to its boiling point which is higher than the operation temperature.
摘要翻译：一种用于从喷嘴喷射墨的喷墨打印头。保持油墨的喷墨室面对喷嘴。液体喷射室与由薄膜制成的一个壁的密封压力室共用。密封的压力室充满了当加热至其沸点时产生气泡的液体。密封压力室的另一个壁形成一个热电阻，用于将加压液体快速加热至高于操作温度的沸点。

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