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    • 21. 发明授权
    • Radial waveguide systems and methods for post-match control of microwaves
    • 用于微波后匹配控制的径向波导系统和方法
    • US09564296B2
    • 2017-02-07
    • US15063849
    • 2016-03-08
    • Applied Materials, Inc.
    • Satoru KobayashiSoonam ParkDmitry LubomirskyHideo Sugai
    • H01J7/24H01J37/32H01J37/244
    • H01J37/32229H01J7/24H01J19/80H01J37/244H01J37/32201H01J37/32302H01J37/32311H01J37/32935H01J37/3299H05B41/16
    • A system provides post-match control of microwaves in a radial waveguide. The system includes the radial waveguide, and a signal generator that provides first and second microwave signals that have a common frequency. The signal generator adjusts a phase offset between the first and second signals in response to a correction signal. The system also includes first and second electronics sets, each of which amplifies a respective one of the first and second microwave signals. The system transmits the amplified, first and second microwave signals into the radial waveguide, and matches an impedance of the amplified microwave signals to an impedance presented by the waveguide. The system also includes at least two monitoring antennas disposed within the waveguide. A signal controller receives analog signals from the monitoring antennas, determines the digital correction signal based at least on the analog signals, and transmits the correction signal to the signal generator.
    • 系统提供径向波导中微波的后匹配控制。 该系统包括径向波导和提供具有共同频率的第一和第二微波信号的信号发生器。 信号发生器响应于校正信号来调节第一和第二信号之间的相位偏移。 该系统还包括第一和第二电子设备组,每个电子组件放大第一和第二微波信号中相应的一个。 该系统将放大的第一和第二微波信号传输到径向波导中,并将放大的微波信号的阻抗与由波导呈现的阻抗相匹配。 该系统还包括设置在波导内的至少两个监控天线。 信号控制器从监控天线接收模拟信号,至少基于模拟信号确定数字校正信号,并将校正信号发送到信号发生器。
    • 24. 发明授权
    • Advanced penning ion source
    • 先进的离子源
    • US09484176B2
    • 2016-11-01
    • US14018028
    • 2013-09-04
    • Thomas SchenkelQing JiArun PersaudAmy V. Sy
    • Thomas SchenkelQing JiArun PersaudAmy V. Sy
    • H01J7/24H01J27/04
    • H01J27/04
    • This disclosure provides systems, methods, and apparatus for ion generation. In one aspect, an apparatus includes an anode, a first cathode, a second cathode, and a plurality of cusp magnets. The anode has a first open end and a second open end. The first cathode is associated with the first open end of the anode. The second cathode is associated with the second open end of the anode. The anode, the first cathode, and the second cathode define a chamber. The second cathode has an open region configured for the passage of ions from the chamber. Each cusp magnet of the plurality of cusp magnets is disposed along a length of the anode.
    • 本公开提供了用于离子产生的系统,方法和装置。 一方面,一种装置包括阳极,第一阴极,第二阴极和多个尖点磁体。 阳极具有第一开口端和第二开口端。 第一阴极与阳极的第一开口端相关联。 第二阴极与阳极的第二开口端相关联。 阳极,第一阴极和第二阴极限定室。 第二阴极具有用于离开室的通道的开放区域。 多个尖部磁体的每个尖头磁体沿着阳极的长度设置。
    • 27. 发明授权
    • Ion source using field emitter array cathode and electromagnetic confinement
    • 离子源使用场发射极阵列阴极和电磁限制
    • US09362078B2
    • 2016-06-07
    • US13728964
    • 2012-12-27
    • Luke Perkins
    • Luke Perkins
    • H01J7/24H01J27/04H01J37/08H05H3/06
    • H01J27/04H01J37/08H01J2237/082H05H3/06
    • An ion source for use in a radiation generator tube includes a back passive cathode electrode, a passive anode electrode downstream of the back passive cathode electrode, a magnet adjacent the anode, and a front passive cathode electrode downstream of the passive anode electrode. The front passive cathode electrode and the back passive cathode electrode define an ionization region therebetween. At least one field emitter array (FEA) cathode is configured to electrostatically discharge due to an electric field in the ion source. The back passive cathode electrode and the passive anode electrode, and the front passive cathode electrode and the passive anode electrode, have respective voltage differences therebetween, and the magnet generating a magnetic field, such that a Penning-type trap is produced to confine electrons from the electrostatic discharge to the ionization region. At least some of the electrons in the ionization region interact with an ionizable gas to create ions.
    • 用于辐射发生器管的离子源包括后无源阴极电极,位于后无源阴极电极下游的无源阳极电极,与阳极相邻的磁体和在被动阳极电极下游的前无源阴极电极。 前无源阴极电极和后无源阴极电极在其间限定电离区域。 至少一个场发射极阵列(FEA)阴极被配置为由于离子源中的电场而静电放电。 后无源阴极电极和被动阳极电极以及前被动阴极电极和被动阳极电极之间具有各自的电压差,并且磁体产生磁场,使得产生Penning型阱以将电子从 静电放电到电离区域。 电离区域中的至少一些电子与可电离气体相互作用以产生离子。
    • 28. 发明授权
    • Remote plasma system having self-management function and self management method of the same
    • 远程等离子体系统具有自我管理功能和自我管理的方法
    • US09349575B2
    • 2016-05-24
    • US14011197
    • 2013-08-27
    • Dai Kyu Choi
    • Dai Kyu Choi
    • H01J7/24H01J37/32H05H1/46
    • H01J37/32935H01J37/32357H01J37/32917H01J37/3299H05H1/46H05H2001/463
    • A remote plasma system having a self-management function measures an operating state of a remote plasma generator while a remote plasma generator operates, which generates plasma and remotely supplies the generated plasma to a process chamber, thereby allowing a process manager to check the measured operating state and performing a required process control depending on an operating state. According to the remote plasma system having the self-management function, it is possible to check operating state information of the remote plasma generator and plasma treatment process progress state information in the process chamber in real time so as to determine whether the remote plasma generator normally operates and immediately sense occurrence of an error during the operation.
    • 具有自我管理功能的远程等离子体系统在远程等离子体发生器操作时测量远程等离子体发生器的操作状态,其产生等离子体并将生成的等离子体远程供应到处理室,从而允许过程管理器检查所测量的操作 状态并且根据操作状态执行所需的过程控制。 根据具有自我管理功能的远程等离子体系统,可以实时地检查处理室中的远程等离子体发生器的操作状态信息和等离子体处理过程进行状态信息,以便确定远程等离子体发生器是否正常 在操作期间操作并立即感测出错误的发生。