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21. 发明申请

US20160207763A1 METHOD OF FORMING PLANAR SACRIFICIAL MATERIAL IN A MEMS DEVICE 有权
标题翻译：在MEMS器件中形成平面非晶材料的方法
公开(公告)号：US20160207763A1
公开(公告)日：2016-07-21
申请号：US14914504
申请日：2014-09-02
申请人： CAVENDISH KINETICS, INC.
发明人： Brian I. TROY , James F. BOBEY , Mickael RENAULT , Joseph Damian Gordon LACEY , Thomas L. MAGUIRE
IPC分类号： B81C1/00 , H01G5/16
CPC分类号： B81C1/00611 , H01G5/16
摘要： The present invention generally relates to a method of fabricating a MEMS device. In the MEMS device, a movable plate is disposed within a cavity such that the movable plate is movable within the cavity. To form the cavity, sacrificial material may be deposited and then the material of the movable plate is deposited thereover. The sacrificial material is removed to free the mov able plate to move within the cavity. The sacrificial material, once deposited, may not be sufficiently planar because the height difference between the lowest point and the highest point of the sacrificial material may be quite high. To ensure the movable plate is sufficiently planar, the planarity of the sacrificial material should be maximized. To maximize the surface planarity of the sacrificial material, the sacrificial material may be deposited and then conductive heated to permit the sacrificial material to reflow and thus, be planarized.
摘要翻译：本发明一般涉及制造MEMS器件的方法。在MEMS装置中，可动板设置在空腔内，使得可移动板可在空腔内移动。为了形成空腔，可以沉积牺牲材料，然后将可移动板的材料沉积在其上。去除牺牲材料以使可移动板在空腔内移动。由于牺牲材料的最低点和最高点之间的高度差可能相当高，牺牲材料一旦被沉积就可能不够平坦。为了确保可动板足够平坦，牺牲材料的平面度应该被最大化。为了使牺牲材料的表面平坦度最大化，可以沉积牺牲材料，然后进行导电加热，以使牺牲材料回流并因此被平坦化。

22. 发明授权

US09336954B2 Quasi-broadband doherty amplifier with associated capacitor circuit 有权
标题翻译：准宽带大功率放大器与相关电容器电路
公开(公告)号：US09336954B2
公开(公告)日：2016-05-10
申请号：US14115061
申请日：2012-04-17
申请人： Lothar Schenk
发明人： Lothar Schenk
IPC分类号： H03F1/02 , H03F3/68 , H01G5/16 , H03F1/42
CPC分类号： H01G5/16 , H03F1/02 , H03F1/0288 , H03F1/42 , H03F3/68 , H03F2200/198 , H03F2200/36 , H03F2200/378 , H03F2200/391 , H03F2200/417
摘要： An amplifier provides a first amplifier circuit (16), a second amplifier circuit (17), a first hybrid-coupler circuit (18) and a termination (3). The hybrid-coupler circuit (18) provides an output terminal (13) and an insulation terminal (12). In this context, the termination (3) is connected to the insulation terminal (12) of the hybrid-coupler circuit (18). The termination (3) comprises a first capacitor (34) and/or an inductance (35), which is disposed directly at the insulation terminal (12) of the hybrid-coupler circuit (18).
摘要翻译：放大器提供第一放大器电路（16），第二放大器电路（17），第一混合耦合器电路（18）和终端（3）。混合耦合器电路（18）提供输出端子（13）和绝缘端子（12）。在这种情况下，终端（3）连接到混合耦合器电路（18）的绝缘端子（12）。端子（3）包括直接位于混合耦合器电路（18）的绝缘端子（12）处的第一电容器（34）和/或电感（35）。

23. 发明申请

US20160115014A1 NON-SYMMETRIC ARRAYS OF MEMS DIGITAL VARIABLE CAPACITOR WITH UNIFORM OPERATING CHARACTERISTICS 审中-公开
标题翻译：具有均匀运算特性的MEMS数字可变电容器的非对称阵列
公开(公告)号：US20160115014A1
公开(公告)日：2016-04-28
申请号：US14895182
申请日：2014-05-30
申请人： CAVENDISH KINETICS, INC.
发明人： Robertus Petrus VAN KAMPEN
IPC分类号： B81B3/00 , H01G5/16
CPC分类号： B81B3/0086 , B81B2201/0221 , B81B2203/04 , H01G5/16 , H01G5/18 , H01G5/38 , H01H59/0009
摘要： The present invention generally relates to a MEMS DVC. The MEMS DVC has an RF electrode and is formed above a CMOS substrate. To reduce noise in the RF signal, a poly-resistor that is connected between a waveform controller and the electrodes of the MEMS element, may be surrounded by an isolated p-well or an isolated n-well. The isolated well is coupled to an RF ground shield that is disposed between the poly-resistor and the MEMS element. Due to the presence of the isolated well that surrounds the poly-resistor, the substrate resistance does not influence the dynamic behavior of each MEMS element in the MEMS DVC and noise in the RF signal is reduced.
摘要翻译：本发明一般涉及一种MEMS DVC。 MEMS DVC具有RF电极并且形成在CMOS衬底之上。为了降低RF信号中的噪声，连接在波形控制器和MEMS元件的电极之间的多电阻器可以被隔离的p阱或隔离的n阱包围。隔离的阱耦合到设置在多电阻器和MEMS元件之间的RF接地屏蔽。由于存在围绕多电阻器的隔离阱，衬底电阻不影响MEMS DVC中每个MEMS元件的动态特性，并且降低了RF信号中的噪声。

24. 发明申请

US20160079003A1 METHOD OF CONTROLLING MEMS VARIABLE CAPACITOR AND INTEGRATED CIRCUIT DEVICE 审中-公开
标题翻译：控制MEMS可变电容器和集成电路器件的方法
公开(公告)号：US20160079003A1
公开(公告)日：2016-03-17
申请号：US14645256
申请日：2015-03-11
申请人： Kabushiki Kaisha Toshiba
发明人： Tsuyoshi Hirayu , Tamio Ikehashi
IPC分类号： H01G5/16 , B81B3/00
CPC分类号： H01G5/16 , B81C99/003
摘要： According to one embodiment, a method of controlling a MEMS variable capacitor includes first and second electrodes, and having a capacitance varying according to a voltage applied between the first and second electrodes, the method includes applying a voltage between the first and second electrodes, evaluating whether the capacitance of the MEMS variable capacitor satisfies a predetermined condition while the voltage is being applied between the first and second electrodes, and determining that the voltage applied between the first and second electrodes is a voltage which should be applied therebetween, on a condition that the capacitance of the MEMS variable capacitor is evaluated as satisfying the predetermined condition.
摘要翻译：根据一个实施例，一种控制MEMS可变电容器的方法包括第一和第二电极，并且具有根据施加在第一和第二电极之间的电压而变化的电容，该方法包括在第一和第二电极之间施加电压，评估当在第一和第二电极之间施加电压时，MEMS可变电容器的电容是否满足预定条件，并且确定施加在第一和第二电极之间的电压是应施加于其间的电压，条件是 MEMS可变电容器的电容被评估为满足预定条件。

25. 发明授权

US09240282B2 Variable capacitor 有权
标题翻译：可变电容器
公开(公告)号：US09240282B2
公开(公告)日：2016-01-19
申请号：US14066498
申请日：2013-10-29
申请人： ALPS ELECTRIC CO., LTD.
发明人： Shinji Murata
IPC分类号： H01G7/06 , H01G5/16 , H01G5/38 , H01G5/18 , B81B3/00
CPC分类号： H01G5/16 , B81B3/0056 , B81B2201/0221 , H01G5/18 , H01G5/38
摘要： A variable capacitor includes a plurality of variable capacitor elements connected in parallel with one another, the variable capacitor elements each including a fixed electrode and a movable electrode facing each other, a beam supporting the movable electrode displaceably, and a drive electrode supplied with a drive voltage to change spacing between the fixed electrode and the movable electrode. The variable capacitor further includes a drive control unit configured to sequentially apply an AC drive voltage to the drive electrodes of the variable capacitor elements with a predetermined phase difference for each element. The sum of capacitances of the variable capacitor elements is an output capacitance.
摘要翻译：可变电容器包括彼此并联连接的多个可变电容器元件，每个可变电容器元件包括固定电极和彼此面对的可动电极，可移动地支撑可动电极的光束和提供有驱动器的驱动电极电压以改变固定电极和可动电极之间的间隔。可变电容器还包括驱动控制单元，其配置成以对于每个元件具有预定的相位差顺序地将AC驱动电压施加到可变电容器元件的驱动电极。可变电容器元件的电容之和是输出电容。

26. 发明授权

US09230907B2 Integrated switchable capacitive device 有权
标题翻译：集成可开关电容器件
公开(公告)号：US09230907B2
公开(公告)日：2016-01-05
申请号：US14264227
申请日：2014-04-29
申请人： STMicroelectronics (Rousset) SAS
发明人： Pascal Fornara , Christian Rivero
IPC分类号： H01L21/02 , H01L23/522 , H01L21/768 , H01G5/16 , H01L23/64
CPC分类号： H01L27/0629 , H01G5/011 , H01G5/16 , H01L21/768 , H01L21/7682 , H01L21/7687 , H01L23/4821 , H01L23/5223 , H01L23/528 , H01L23/642 , H01L28/60 , H01L2924/0002 , H01L2924/1461 , H01L2924/00
摘要： An integrated circuit includes a substrate. A fixed main capacitor electrode is disposed in a metal layer overlying the substrate. A second main capacitor electrode is disposed in a metal layer and spaced from the fixed main capacitor electrode. A movable capacitor electrode is disposed adjacent the fixed main capacitor electrode. The movable capacitor electrode is switchable between a first configuration in which the movable capacitor electrode and fixed main capacitor electrode are mutually spaced out in such a manner as to form an auxiliary capacitor electrically connected to the main capacitor. In a second configuration, the movable capacitor electrode and the fixed main capacitor electrode are in electrical contact in such a manner as to give a second capacitive value.
摘要翻译：集成电路包括基板。固定的主电容器电极设置在覆盖衬底的金属层中。第二主电容器电极设置在金属层中并与固定主电容器电极间隔开。可动电容电极设置在固定主电容器电极附近。可移动电容器电极可以在可移动电容器电极和固定主电容器电极相互间隔开的第一配置之间切换，以形成电连接到主电容器的辅助电容器。在第二构造中，可移动电容电极和固定主电容器电极以提供第二电容值的方式进行电接触。

27. 发明授权

US09182856B2 Capacitive force sensor 有权
标题翻译：电容力传感器
公开(公告)号：US09182856B2
公开(公告)日：2015-11-10
申请号：US13330312
申请日：2011-12-19
申请人： John Logan , Trond Jarle Pedersen , Vemund Kval Bakken , Kishore Sundara-Rajan
发明人： John Logan , Trond Jarle Pedersen , Vemund Kval Bakken , Kishore Sundara-Rajan
IPC分类号： G06F3/033 , H01G5/16 , G06F3/044 , G06F3/0354
CPC分类号： G06F3/044 , G06F3/03545
摘要： In one embodiment, a method includes detecting movement of a spring structure of a force sensor coupled to a center shaft of an active stylus; measuring a change of capacitance between electrodes of the force sensor; and determining an amount of force applied to the center shaft based on the change of capacitance.
摘要翻译：在一个实施例中，一种方法包括检测耦合到有源触针的中心轴的力传感器的弹簧结构的运动; 测量力传感器电极之间的电容变化; 并且基于电容的变化确定施加到中心轴的力的量。

28. 发明授权

US09166502B2 Method for manufacturing an electromechanical transducer 有权
标题翻译：机电换能器的制造方法
公开(公告)号：US09166502B2
公开(公告)日：2015-10-20
申请号：US13587751
申请日：2012-08-16
申请人： Yoshihiro Hasegawa , Yasuyoshi Takai
发明人： Yoshihiro Hasegawa , Yasuyoshi Takai
IPC分类号： H04R31/00 , H02N1/00 , H01G5/16
CPC分类号： B06B1/0292 , H01G5/16 , H02N1/006 , Y10T29/43
摘要： The present invention provides a technology for decreasing a dispersion of the performance among electromechanical transducers each having through wiring. A method for manufacturing an electromechanical transducer includes: obtaining a structure in which an insulative portion having a through hole therein is bonded onto an electroconductive substrate; filling the through hole with an electroconductive material to form a through wiring which is electrically connected with the electroconductive substrate; and using the electroconductive substrate as a first electrode, forming a plurality of vibrating membrane portions including a second electrode, which opposes to the first electrode through a plurality of gaps, on an opposite side of the first electrode to the side having the insulative portion, to thereby forming a plurality of cells.
摘要翻译：本发明提供了一种用于减小每个具有通过布线的机电换能器之间的性能分散的技术。制造机电换能器的方法包括：获得其中具有通孔的绝缘部分结合到导电基底上的结构; 用导电材料填充通孔以形成与导电基板电连接的贯通布线; 并且使用所述导电性基板作为第一电极，在所述第一电极的与所述绝缘部的一侧相反的一侧形成多个振动膜部，所述多个振动膜部包括与所述第一电极相对的多个间隙的第二电极，从而形成多个单元。

29. 发明授权

US09148111B2 Phase shifters and tuning elements 有权
标题翻译：移相器和调谐元件
公开(公告)号：US09148111B2
公开(公告)日：2015-09-29
申请号：US13689925
申请日：2012-11-30
申请人： HARRIS CORPORATION
发明人： John E. Rogers
IPC分类号： H03H7/20 , H01P1/18 , H01G5/16 , H03H7/18 , H03H7/00
CPC分类号： H03H7/20 , H01G5/16 , H01P1/18 , H03H7/185 , H03H2007/006
摘要： Embodiments of phase shifters (10) include electrical conductors (34) suspended within an electrically-conductive housing (28), and a shuttle (16) having an electrically-conductive plate (74) that provides a variable capacitance between a ground potential and the electrical conductor (34) when the shuttle (16) is moved between a first and second position. The plate (74) is electrically connected to a ground plane (27) of the phase shifter (10) by adjacent electrically-conductive portions (54, 55b, 53a) of the shuttle (16).
摘要翻译：移相器（10）的实施例包括悬挂在导电壳体（28）内的电导体（34）和具有导电板（74）的梭子（16），导电板（74）在接地电位和当梭子（16）在第一和第二位置之间移动时，电导体（34）。板（74）通过梭子（16）的相邻导电部分（54,55b，53a）与移相器（10）的接地平面（27）电连接。

30. 发明申请

US20150262757A1 MEMS DEVICE 审中-公开
标题翻译： MEMS器件
公开(公告)号：US20150262757A1
公开(公告)日：2015-09-17
申请号：US14481565
申请日：2014-09-09
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Hiroaki YAMAZAKI
IPC分类号： H01G5/16
CPC分类号： H01G5/18 , B81B2201/0221
摘要： According to one embodiment, a MEMS device includes a lower electrode, a movable upper electrode having a portion facing the lower electrode, and a first member connected to the upper electrode. At least a part of a connecting portion of the upper electrode and the first member does not overlap the lower electrode when viewed from a direction vertical to a main surface of the lower electrode.
摘要翻译：根据一个实施例，MEMS器件包括下电极，具有面向下电极的部分的可移动上电极和连接到上电极的第一部件。当从垂直于下电极的主表面的方向观察时，上电极和第一构件的连接部分的至少一部分不与下电极重叠。

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