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21. 发明申请

US20090068934A1 Wafer polishing carrier apparatus and chemical mechanical polishing equipment using the same 有权
标题翻译：晶圆抛光载体设备和使用其的化学机械抛光设备
公开(公告)号：US20090068934A1
公开(公告)日：2009-03-12
申请号：US12231529
申请日：2008-09-03
申请人： Yong-Sung Hong , Jong-Yoon Park , Hyun-Joon Park
发明人： Yong-Sung Hong , Jong-Yoon Park , Hyun-Joon Park
IPC分类号： B24B7/20 , B24B41/06 , B24B55/00 , B24B53/10
CPC分类号： B24B37/04 , B24B57/00
摘要： A wafer polishing carrier apparatus and a chemical mechanical polishing equipment employing the same includes a drive rotary union rotating on an axis and receiving a flow of fluid through a first conduit in a sealed-up state; driven rotary unions revolving on their own axis at different sides of the drive rotary union, and receiving the flow of fluid from the drive rotary union through a second conduit in a sealed-up state; a carrier attached to an end part of the driven rotary union to adsorb/detach a wafer using a fluid pressure provided through a third conduit connected through the second conduit; and a filter filtering pollution material in the fluid flowing in and out of the third conduit on the periphery of the carrier to prevent the pollution material from escaping external to the carrier, the pollution material generated from rotation of the drive rotary union and driven rotary unions.
摘要翻译：晶片抛光载体装置和采用该晶片抛光载体的化学机械抛光装置包括：驱动旋转联轴器，其在轴上旋转并且以密封状态接收通过第一导管的流体流; 驱动旋转接头在驱动旋转接头的不同侧在其自身的轴线上旋转，并且以密封状态通过第二导管从驱动旋转接头接收流体流; 附接到从动旋转接头的端部的载体，以使用通过第二导管连接的第三导管提供的流体压力吸附/分离晶片; 以及过滤器在流入和流出载体周围的第三导管的流体中的污染物质，以防止污染物质从外部逸出，由驱动旋转联轴器和从动旋转接头旋转产生的污染物质。

22. 发明申请

US20080311824A1 APPARATUS FOR SMOOTHING A PRODUCT, IN PARTICULAR A SEMI-FINISHED CERAMIC PRODUCT 审中-公开
标题翻译：用于吸收产品，特别是半成品陶瓷产品的设备
公开(公告)号：US20080311824A1
公开(公告)日：2008-12-18
申请号：US12133818
申请日：2008-06-05
申请人： Giorgio Sarani
发明人： Giorgio Sarani
IPC分类号： B24B21/00 , B24B9/06 , B24B19/00 , B24B51/00 , B24B53/10 , B24B21/20
CPC分类号： B24B19/008 , B24B21/16 , B24B55/08 , B28B11/0845
摘要： An apparatus (1) for smoothing a product (2), in particular a semi-finished ceramic product, comprises: an abrasive tool (3) in the form of an endless belt (4) which is trained around at least one pair of pulleys (5, 6), at least one of which is power-driven; the belt (4) has an active section (7) and at least one passive section (8); the active section (7) removes material from the product (2), while the passive section (8) receives a regenerating treatment that restores the abrasive capacity of the tool (3); drive means (20) acting on the belt (4) in such a way as to enable the belt (4) itself to move in the space surrounding the product (2); means (10) for spraying a liquid on the belt (4), which has liquid absorption properties, said means (10) being located in the vicinity of the belt (4) itself; and negative pressure means (9) associated with the passive section (8) of the belt (4) and operating in such a way as to extract the liquid and the materials retained by the belt (4) and removed from the product (2) during the smoothing process.
摘要翻译：一种用于平滑产品（2）的设备（1），特别是半成品陶瓷产品，包括：环形带（4）形式的研磨工具（3），其围绕至少一对滑轮（5,6），其中至少一个是动力驱动的; 带（4）具有有效部分（7）和至少一个被动部分（8）; 活动部分（7）从产品（2）中去除材料，而被动部分（8）接收恢复工具（3）的研磨能力的再生处理; 驱动装置（20）以使得带（4）本身能够在产品（2）周围的空间中移动的方式作用在带（4）上; 用于在具有液体吸收性能的带（4）上喷射液体的装置（10），所述装置（10）位于带（4）本身附近; 和负压装置（9），其与带（4）的被动部分（8）相关联并且以提取液体和由带（4）保留并从产品（2）移除的材料的方式操作，在平滑过程中。

23. 发明授权

US06875091B2 Method and apparatus for conditioning a polishing pad with sonic energy 失效
标题翻译：用声波能量调理抛光垫的方法和装置
公开(公告)号：US06875091B2
公开(公告)日：2005-04-05
申请号：US09796955
申请日：2001-02-28
申请人： Allan M. Radman , Alan J. Jensen , Helmuth Treichel , Robert G. Boehm , Michael S. Lacy , Eric A. Dunton
发明人： Allan M. Radman , Alan J. Jensen , Helmuth Treichel , Robert G. Boehm , Michael S. Lacy , Eric A. Dunton
IPC分类号： B24B1/04 , B24B37/04 , B24B53/007 , B24B53/10 , B24B53/07
CPC分类号： B24B1/04 , B24B53/017 , B24B53/10
摘要： A method and apparatus for conditioning a polishing pad is described, wherein the polishing pad has a polishing surface for polishing the semiconductor wafer. The method includes positioning a sonic energy generator above the polishing surface of the polishing pad, and applying sonic energy to the polishing surface of the polishing pad. The apparatus a sonic energy generator adapted to be positioned above the polishing surface, the sonic energy generator including a transducer, and a liquid carrier in flow communication with the transducer, wherein the transducer transmits sonic energy into the liquid carrier and the liquid carrier is applied to the polishing surface of the polishing belt.
摘要翻译：描述了一种用于调整抛光垫的方法和装置，其中抛光垫具有用于抛光半导体晶片的抛光表面。该方法包括将抛光垫的抛光表面上方的声能量发生器定位，并将抛光垫的抛光表面施加声能。所述设备适于定位在所述抛光表面上方，所述声能发生器包括换能器和与所述换能器流动连通的液体载体，其中所述换能器将声能传递到所述液体载体中，并且所述液体载体被施加到抛光带的抛光表面。

24. 发明授权

US4109422A Sander cleaning process 失效
标题翻译：砂光机清洗工艺
公开(公告)号：US4109422A
公开(公告)日：1978-08-29
申请号：US838400
申请日：1977-09-30
申请人： James W. Parsons
发明人： James W. Parsons
IPC分类号： B24B21/18 , B24B53/00 , B24B53/10 , B24B1/00
CPC分类号： B24B21/18 , B24B53/00 , B24B53/10
摘要： A solvent is sprayed onto a moving sander belt by a solvent nozzle moved across the belt in advance of an air nozzle, which blows air onto the belt. The nozzles are directed toward the belt at an angle such that the air from the air nozzle is deflected toward an exhaust port in a sander housing surrounding the belt. The nozzles form a part of a cleaner mounted as a unit on the sander housing, and including a nozzle carriage reciprocating the nozzles across the belt.
摘要翻译：在空气喷嘴之前通过在皮带上移动的溶剂喷嘴将溶剂喷射到运动的砂带上，空气喷嘴将空气吹到皮带上。喷嘴以一定的角度被引向带，使得来自空气喷嘴的空气朝向围绕带的砂轮壳体中的排气口偏转。喷嘴形成作为一个单元安装在砂光机壳体上的清洁剂的一部分，并且包括使喷嘴往复穿过皮带的喷嘴托架。

25. 发明授权

US3753269A Abrasive cloth cleaner 失效
标题翻译：磨砂布清洁剂
公开(公告)号：US3753269A
公开(公告)日：1973-08-21
申请号：US3753269D
申请日：1971-05-21
申请人： BUDMAN R
发明人： BUDMAN R
IPC分类号： B24B21/18 , B24B53/10 , B24B53/02
CPC分类号： B24B53/10 , B24B21/18
摘要： A tool for cleaning abrasive paper. A bar having a narrow top edge is fixed to a handle, the handle also carrying a brush. The bar is inserted beneath abrasive paper to open the clogged areas, the brush then displacing the debris between the abrasive particles.
摘要翻译：用于清洁砂纸的工具。具有窄顶部边缘的杆被固定到手柄上，手柄还带有刷子。将该棒插入研磨纸下面以打开堵塞的区域，然后将刷子移动到磨料颗粒之间。

26. 发明授权

US2817103A Dressing tool 失效
标题翻译：敷料工具
公开(公告)号：US2817103A
公开(公告)日：1957-12-24
申请号：US36055553
申请日：1953-06-09
申请人： IDA S MCCONNELL , ROBERT S MCCONNELL
发明人： JOHNSTON HAROLD C
IPC分类号： B24B53/10 , B24B53/14
CPC分类号： B24B53/14 , B24B53/10

27. 发明授权

US2646654A Device for dressing coated abrasive belts 失效
标题翻译：涂层磨砂带装置
公开(公告)号：US2646654A
公开(公告)日：1953-07-28
申请号：US15030650
申请日：1950-03-17
申请人： MINNESOTA MINING & MFG
发明人： BRINK RICHARD E
IPC分类号： B24B53/10
CPC分类号： B24B53/10

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