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21. 发明授权

US08629739B2 Out-of plane MEMS resonator with static out-of-plane deflection 有权
标题翻译：具有静态超平面偏转的平面外的MEMS谐振器
公开(公告)号：US08629739B2
公开(公告)日：2014-01-14
申请号：US13599240
申请日：2012-08-30
申请人： Emmanuel P. Quevy , David H. Bernstein , Mehrnaz Motiee
发明人： Emmanuel P. Quevy , David H. Bernstein , Mehrnaz Motiee
IPC分类号： H03H9/24 , H03H3/007 , H01L21/00
CPC分类号： H03H9/2457 , H03H3/0072 , H03H3/0076 , H03H9/02409 , H03H9/2463 , H03H2009/02299 , H03H2009/02307 , H03H2009/0233 , H03H2009/02472 , H03H2009/02511 , H03H2009/02519
摘要： A method of forming a microelectromechanical systems (MEMS) device includes forming an electrode on a substrate. The method includes forming a structural layer on the substrate. The structural layer is disposed about a perimeter of the electrode and has a residual film stress gradient. The method includes releasing the structural layer to form a resonator coupled to the substrate. The residual film stress gradient deflects a first portion of the resonator out of a plane defined by a surface of the electrode.
摘要翻译：形成微机电系统（MEMS）器件的方法包括在衬底上形成电极。该方法包括在衬底上形成结构层。结构层围绕电极的周边设置并具有残余膜应力梯度。该方法包括释放结构层以形成耦合到衬底的谐振器。残余膜应力梯度将谐振器的第一部分偏离由电极表面限定的平面。

22. 发明申请

US20120091854A1 MICROMECHANICAL RESONATOR 有权
标题翻译：微生物共振器
公开(公告)号：US20120091854A1
公开(公告)日：2012-04-19
申请号：US13284196
申请日：2011-10-28
申请人： Ville KAAJAKARI
发明人： Ville KAAJAKARI
IPC分类号： H02N1/00
CPC分类号： H03H9/2463 , H02N1/008 , H03H3/0076 , H03H9/02275 , H03H9/02338 , H03H9/2478 , H03H9/2484 , H03H2009/02299
摘要： The invention relates to design of micromechanical resonators and, more precisely, to the design of microelectromechanical systems (MEMS) resonators. The invention provides an improved design structure for a microelectromechanical systems (MEMS) resonator including a movable mass structure and a spring structure. The spring structure includes a spring element. The spring element is anchored from one end and connected to a plurality of electrode fingers on another end. The plurality of electrode fingers are operatively connected together at the other end of the spring element. The improved structure is frequency robust to manufacturing variations and enables reliable frequency referencing with good performance, particularly in small size solutions.
摘要翻译：本发明涉及微机械谐振器的设计，更确切地说，涉及微机电系统（MEMS）谐振器的设计。本发明提供了一种用于包括可移动质量结构和弹簧结构的微机电系统（MEMS）谐振器的改进的设计结构。弹簧结构包括弹簧元件。弹簧元件从一端锚定并在另一端连接到多个电极指。多个电极指在弹簧元件的另一端可操作地连接在一起。改进的结构对于制造变化是稳定的，并且具有良好性能的可靠的频率参考，特别是在小尺寸解决方案中。

23. 发明申请

US20110260810A1 OUT-OF-PLANE MEMS RESONATOR WITH STATIC OUT-OF-PLANE DEFLECTION 有权
标题翻译：具有静态非平面偏移的平面外平面MEMS谐振器
公开(公告)号：US20110260810A1
公开(公告)日：2011-10-27
申请号：US13173432
申请日：2011-06-30
申请人： Emmanuel P. Quevy , David H. Bernstein , Mehrnaz Motiee
发明人： Emmanuel P. Quevy , David H. Bernstein , Mehrnaz Motiee
IPC分类号： H03H9/24
CPC分类号： H03H9/2457 , H03H3/0072 , H03H3/0076 , H03H9/02409 , H03H9/2463 , H03H2009/02299 , H03H2009/02307 , H03H2009/0233 , H03H2009/02472 , H03H2009/02511 , H03H2009/02519
摘要： A microelectromechanical systems (MEMS) device includes a tuning electrode, a drive electrode, and a resonator. The resonator is anchored to a substrate and is configured to resonate in response to a signal on the drive electrode. The MEMS device includes a tuning plate coupled to the resonator and positioned above the tuning electrode. The tuning plate is configured to adjust a resonant frequency of the resonator in response to a voltage difference between the resonator and the tuning electrode. In at least one embodiment of the MEMS device, the tuning plate and the tuning electrode are configured to adjust the resonant frequency of the resonator substantially independent of the signal on the drive electrode.
摘要翻译：微机电系统（MEMS）装置包括调谐电极，驱动电极和谐振器。谐振器被锚固到衬底并且被配置为响应于驱动电极上的信号而谐振。 MEMS器件包括耦合到谐振器并且定位在调谐电极上方的调谐板。调谐板被配置为响应谐振器和调谐电极之间的电压差来调节谐振器的谐振频率。在MEMS器件的至少一个实施例中，调谐板和调谐电极被配置为基本上独立于驱动电极上的信号来调节谐振器的谐振频率。

24. 发明授权

US07999635B1 Out-of plane MEMS resonator with static out-of-plane deflection 有权
标题翻译：具有静态超平面偏转的平面外的MEMS谐振器
公开(公告)号：US07999635B1
公开(公告)日：2011-08-16
申请号：US12182082
申请日：2008-07-29
申请人： Emmanuel P. Quevy , David A. Bernstein , Mehrnaz Motiee
发明人： Emmanuel P. Quevy , David A. Bernstein , Mehrnaz Motiee
IPC分类号： H03H9/24 , H03H9/125 , H03H9/46
CPC分类号： H03H9/2457 , H03H3/0072 , H03H3/0076 , H03H9/02409 , H03H9/2463 , H03H2009/02299 , H03H2009/02307 , H03H2009/0233 , H03H2009/02472 , H03H2009/02511 , H03H2009/02519
摘要： A residual stress gradient in a structural layer is employed to form a resonator deflected out of plane when at rest and the resulting strain gradient is utilized in out-of-plane transduction. Use of the strain gradient enables out-of-plane (e.g., vertical) transduction without yield and reliability problems due to stiction (e.g., the sticking of the resonator to the substrate) when the resonator is driven by an electrode to dynamically deflect out-of-plane. In particular embodiments, out-of-plane transduction is utilized to achieve better transduction efficiency as compared to lateral resonator designs of similar linear dimensions (i.e. footprint) results in a lower motional resistance.
摘要翻译：采用结构层中的残余应力梯度来形成在静止时偏离平面的共振器，并将所得到的应变梯度用于平面外转导。当谐振器被电极驱动时，使用应变梯度可以实现平面外（例如垂直）转换，而不会由于静电（例如，将谐振器粘附到基板上）而产生屈服和可靠性问题，的飞机。在特定实施例中，与具有类似线性尺寸（即占地面积）导致较低运动阻力的横向谐振器设计相比，利用面外换能获得更好的换能效率。

25. 发明公开

US20230238938A1 VIBRATOR DEVICE 审中-公开
公开(公告)号：US20230238938A1
公开(公告)日：2023-07-27
申请号：US18099995
申请日：2023-01-23
申请人： SEIKO EPSON CORPORATION
发明人： Seiichiro OGURA
IPC分类号： H03H9/02 , H03H9/19
CPC分类号： H03H9/02259 , H03H9/19 , H03H2009/02299 , H03H2009/02496
摘要： A vibrator device includes a vibrator element having a base part, and a detection arm and a drive arm as a plurality of vibrating arms extending in a B direction as a first direction from the base part, a base body, and a support substrate configured to support the vibrator element with respect to the base body, wherein the support substrate includes a base-body fixation part to be fixed to the base body, an element support part configured to support the base part of the vibrator element, and a beam part configured to couple the base-body fixation part and the element support part to each other, and the support substrate has a plurality of recessed parts corresponding to the plurality of vibrating arms in an area which is located at a side of a surface opposed to the vibrator element, and on which at least a part of the vibrating arms overlaps in a plan view.

26. 发明授权

US11646714B2 Laterally vibrating bulk acoustic wave resonator 有权
公开(公告)号：US11646714B2
公开(公告)日：2023-05-09
申请号：US16505669
申请日：2019-07-08
申请人： Texas Instruments Incorporated
发明人： Jeronimo Segovia Fernandez , Peter Smeys , Ting-Ta Yen
IPC分类号： H03H9/17 , H03H9/64 , H03H9/02 , H03H9/15 , H03H9/05
CPC分类号： H03H9/175 , H03H9/02275 , H03H9/0542 , H03H9/64 , H03H2009/02299 , H03H2009/155
摘要： A laterally vibrating bulk acoustic wave (LVBAW) resonator includes a piezoelectric plate sandwiched between first and second metal layers. The second metal layer is patterned into an interdigital transducer (IDT) with comb-shaped electrodes having interlocking fingers. The width and pitch of the fingers of the electrodes determine the resonant frequency. A combined thickness of the first and second metal layers and the piezoelectric layer is less than the pitch of the interlocking fingers.

27. 发明授权

US09985598B2 Frequency compensated oscillator design for process tolerances 有权
公开(公告)号：US09985598B2
公开(公告)日：2018-05-29
申请号：US14728930
申请日：2015-06-02
申请人： Robert Bosch GmbH
发明人： Markus Lutz , Aaron Partridge
IPC分类号： H03H3/007 , H03H9/24 , H03H9/02
CPC分类号： H03H3/0072 , H03H3/0076 , H03H3/0077 , H03H9/2447 , H03H9/2457 , H03H9/2463 , H03H2009/02299 , H03H2009/0233 , H03H2009/02496 , Y10T29/49016
摘要： A continuous or distributed resonator geometry is defined such that the fabrication process used to form a spring mechanism also forms an effective mass of the resonator structure. Proportional design of the spring mechanism and/or mass element geometries in relation to the fabrication process allows for compensation of process-tolerance-induced fabrication variances. As a result, a resonator having increased frequency accuracy is achieved.

28. 发明申请

US20180123547A1 FILTER DEVICE, MULTIPLEXER, RADIO-FREQUENCY FRONT END CIRCUIT, AND COMMUNICATION DEVICE 审中-公开
公开(公告)号：US20180123547A1
公开(公告)日：2018-05-03
申请号：US15794072
申请日：2017-10-26
申请人： Murata Manufacturing Co., Ltd.
发明人： Masanori KATO , Syunsuke KIDO
IPC分类号： H03H7/01 , H03H7/38 , H03H9/46 , H04J1/04
CPC分类号： H03H7/0161 , H03H7/01 , H03H7/38 , H03H9/465 , H03H9/542 , H03H9/605 , H03H9/6483 , H03H2007/013 , H03H2009/02299 , H04J1/045
摘要： A filter includes two series arm resonators electrically connected in series between two input/output terminals, a parallel arm resonator electrically connected between a ground and a series arm between the two series arm resonators, an inductor electrically connected in parallel to the two series arm resonators, and a matching circuit electrically connected between one of the two series arm resonators and one of the input/output terminals, wherein the two series arm resonators and the parallel arm resonator define a pass band of a bandpass filter, the two series arm resonators and the inductor define an LC resonant circuit, respective anti-resonant frequencies of each of the two series arm resonators and a resonant frequency of the parallel arm resonator are located in a pass band of the LC resonant circuit, and a resonant frequency of the LC resonant circuit is lower than the resonant frequency of the parallel arm resonator.

29. 发明授权

US09887685B2 Mechanical resonator with a spring-mass system comprising a phase-change material 有权
公开(公告)号：US09887685B2
公开(公告)日：2018-02-06
申请号：US14984886
申请日：2015-12-30
申请人： International Business Machines Corporation
发明人： Johan B. C. Engelen , Mark A. Lantz , Wabe W. Koelmans
IPC分类号： H03H9/24 , H03H9/46 , B81B3/00 , B81B7/00 , B81C1/00 , H03H9/02 , H02N11/00
CPC分类号： H03H9/02393 , B81B3/0045 , B81B3/007 , B81B7/008 , B81B2203/0163 , B81C1/00698 , B81C2201/017 , H02N11/00 , H03H9/02244 , H03H2009/02165 , H03H2009/02299 , H03H2009/02322
摘要： A mechanical resonator includes a spring-mass system, wherein the spring-mass system comprises a phase-change material. The mechanical resonator typically comprises an electrical circuit portion, coupled to the phase-change material to alter a phase configuration within the phase-change material. Methods of operation are also disclosed.

30. 发明申请

US20170163239A1 MECHANICAL RESONATOR WITH A SPRING-MASS SYSTEM COMPRISING A PHASE-CHANGE MATERIAL 审中-公开
公开(公告)号：US20170163239A1
公开(公告)日：2017-06-08
申请号：US15441409
申请日：2017-02-24
申请人： International Business Machines Corporation
发明人： Johan B.C. Engelen , Mark A. Lantz , Wabe W. Koelmans
IPC分类号： H03H9/02
CPC分类号： H03H9/02393 , B81B3/0045 , B81B3/007 , B81B7/008 , B81B2203/0163 , B81C1/00698 , B81C2201/017 , H02N11/00 , H03H9/02244 , H03H2009/02165 , H03H2009/02299 , H03H2009/02322
摘要： A mechanical resonator includes a spring-mass system, wherein the spring-mass system comprises a phase-change material. The mechanical resonator typically comprises an electrical circuit portion, coupled to the phase-change material to alter a phase configuration within the phase-change material. Methods of operation are also disclosed.

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