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    • 22. 发明申请
    • Semiconductor laser and method of manufacturing the same
    • 半导体激光器及其制造方法
    • US20060023764A1
    • 2006-02-02
    • US11171472
    • 2005-07-01
    • Hironobu Sai
    • Hironobu Sai
    • H01S5/00
    • H01S5/18308H01S5/18338H01S5/18344H01S5/18355
    • In a semiconductor laser according to the present invention, a p-type and n-type semiconductor portion supply positive holes and electrons to a confining layer in a direction perpendicular to a stacking direction of the confining layer, and the p-type and n-type semiconductor portions do not prevent light produced in the confining layer from being emitted by laser oscillation in a stacking direction of intrinsic semiconductor layers. The p-type and n-type semiconductor portion are placed up to a position enough to supply the positive holes and electrons to the confining layer, and supply the positive holes and electrons to the confining layer respectively. As a result, the positive holes and electrons can recombine in the confining layer to produce light.
    • 在根据本发明的半导体激光器中,p型和n型半导体部分在垂直于限制层的层叠方向的方向上向限制层提供正空穴和电子,p型和n型半导体部分, 半导体部分不能防止在本征半导体层的层叠方向上通过激光振荡而在限制层中产生的光被发射。 p型和n型半导体部分被放置到足以将正空穴和电子提供给限制层的位置,并且将空穴和电子分别提供给限制层。 结果,正空穴和电子可以在限制层中复合以产生光。
    • 26. 发明申请
    • Phase array oxide-confined VCSEL
    • 相位阵列氧化物封闭VCSEL
    • US20050019973A1
    • 2005-01-27
    • US10625811
    • 2003-07-23
    • Christopher Chua
    • Christopher Chua
    • H01S5/183H01L21/00H01S5/026H01S5/42
    • H01S5/423H01S5/18313H01S5/18338
    • A phase array of oxide confined VCSELs and a method for forming the phase array of oxide confined VCSELs is described. VCSELs in the array are designed to be simultaneously addressed such that the output of multiple VCSELs can be used to increase the light intensity at a point. In applications where beam coherence from the VCSEL array is desirable, high gain coupling regions break the continuity of the oxide wall surrounding each VCSEL aperture. The high gain coupling regions connect adjacent VCSELs in the VCSEL array thereby allowing mode coupling between adjacent lasers and the output of a coherent beam of light.
    • 描述了氧化物限制VCSEL的相位阵列和形成氧化物限制VCSEL的相位阵列的方法。 阵列中的VCSEL被设计为被同时寻址,使得可以使用多个VCSEL的输出来增加一点处的光强度。 在需要来自VCSEL阵列的波束相干性的应用中,高增益耦合区域破坏围绕每个VCSEL孔径的氧化物壁的连续性。 高增益耦合区域连接VCSEL阵列中的相邻VCSEL,从而允许相邻激光器之间的模式耦合和相干光束的输出。
    • 27. 发明授权
    • Moisture passivated planar index-guided VCSEL
    • 水分钝化平面折射率引导VCSEL
    • US06819697B2
    • 2004-11-16
    • US10341085
    • 2003-01-13
    • Wilson H. WidjajaFrank Hu
    • Wilson H. WidjajaFrank Hu
    • H01S500
    • H01S5/18338H01S5/18313H01S5/18358H01S5/2054H01S2301/176
    • Systems and methods of passivating planar index-guided oxide vertical cavity surface emitting lasers (VCSELS) are described. These systems and methods address the unique susceptibility of these devices to damage that otherwise might be caused by moisture intrusion into the etch holes that are used to form the index-guiding confinement regions. In one aspect, the invention features a VCSEL that includes a vertical stack structure having a substantially planar top surface. The vertical stack structure includes a top mirror, a bottom mirror, and a cavity region that is disposed between the top mirror and the bottom mirror and includes an active light generation region. At least one of the top mirror and the bottom mirror has a layer with a peripheral region that is oxidized into an electrical insulator. The vertical stack structure defines an etched hole that extends from the substantially planar top surface to the oxidized peripheral region. The etched hole contains a polymer layer and is moisture passivated by an overlying moisture penetration barrier.
    • 描述了钝化平面折射率引导氧化物垂直腔表面发射激光器(VCSELS)的系统和方法。 这些系统和方法解决了这些装置对于由于水分侵入到用于形成折射率引导限制区域的蚀刻孔中可能引起的破坏的独特易感性。 在一个方面,本发明的特征在于VCSEL,其包括具有基本平坦的顶表面的垂直堆叠结构。 垂直堆叠结构包括顶镜,底镜和设置在顶镜和底镜之间并包括有源光产生区域的空腔区域。 上反射镜和底镜中的至少一个具有被周围区域氧化成电绝缘体的层。 垂直堆叠结构限定了从基本平坦的顶表面延伸到氧化的周边区域的蚀刻孔。 蚀刻的孔包含聚合物层,并被上覆的水分渗透屏障水分钝化。
    • 28. 发明申请
    • Moisture passivated planar index-guided VCSEL
    • 水分钝化平面折射率引导VCSEL
    • US20040004984A1
    • 2004-01-08
    • US10620137
    • 2003-07-14
    • Seongsin KimWilson H. WidjajaSuning Xie
    • H01S005/00H01S003/08
    • H01S5/18338H01S5/18313H01S5/2081H01S5/423H01S2301/176
    • Systems and methods of passivating planar index-guided oxide vertical cavity surface emitting lasers (VCSELs) are described. These systems and methods address the unique susceptibility of these devices to damage that otherwise might be caused by moisture intrusion into the etch holes that are used to form the index-guiding confinement regions. In one aspect, a VCSEL includes a vertical stack structure having a substantially planar top surface. The vertical stack structure includes a top mirror, a bottom mirror, and a cavity region disposed between the top mirror and the bottom mirror and including an active light generation region. At least one of the top mirror and the bottom mirror has a layer with a peripheral region that is oxidized into an electrical insulator as a result of exposure to an oxidizing agent. The vertical stack structure defines two or more etched holes each extending from the substantially planar top surface to the oxidized peripheral region. Each of the etched holes is moisture passivated by an overlying moisture penetration barrier.
    • 描述了钝化平面折射率引导氧化物垂直腔表面发射激光器(VCSEL)的系统和方法。 这些系统和方法解决了这些装置对于由于水分侵入到用于形成折射率引导限制区域的蚀刻孔中可能引起的破坏的独特易感性。 在一个方面,VCSEL包括具有基本平坦的顶表面的垂直堆叠结构。 垂直堆叠结构包括顶镜,底镜和设置在顶镜和底镜之间并包括有源光产生区的腔区。 上反射镜和底镜中的至少一个具有由于暴露于氧化剂而被周围区域氧化成电绝缘体的层。 垂直堆叠结构限定两个或更多个蚀刻孔,每个蚀刻孔从基本上平坦的顶表面延伸到氧化的周边区域。 每个蚀刻的孔都是由上覆的水分渗透屏障进行湿度钝化。
    • 29. 发明申请
    • Moisture passivated planar index-guided VCSEL
    • 水分钝化平面折射率引导VCSEL
    • US20030108075A1
    • 2003-06-12
    • US10013108
    • 2001-12-07
    • Seongsin KimWilson H. WidjajaSuning Xie
    • H01S005/00
    • H01S5/18338H01S5/18313H01S5/2081H01S5/423H01S2301/176
    • Systems and methods of passivating planar index-guided oxide vertical cavity surface emitting lasers (VCSELs) are described. These systems and methods address the unique susceptibility of these devices to damage that otherwise might be caused by moisture intrusion into the etch holes that are used to form the index-guiding confinement regions. In one aspect, a VCSEL includes a vertical stack structure having a substantially planar top surface. The vertical stack structure includes a top mirror, a bottom mirror, and a cavity region disposed between the top mirror and the bottom mirror and including an active light generation region. At least one of the top mirror and the bottom mirror has a layer with a peripheral region that is oxidized into an electrical insulator as a result of exposure to an oxidizing agent. The vertical stack structure defines two or more etched holes each extending from the substantially planar top surface to the oxidized peripheral region. Each of the etched holes is moisture passivated by an overlying moisture penetration barrier.
    • 描述了钝化平面折射率引导氧化物垂直腔表面发射激光器(VCSEL)的系统和方法。 这些系统和方法解决了这些装置对于由于水分侵入到用于形成折射率引导限制区域的蚀刻孔中可能引起的破坏的独特易感性。 在一个方面,VCSEL包括具有基本平坦的顶表面的垂直堆叠结构。 垂直堆叠结构包括顶镜,底镜和设置在顶镜和底镜之间并包括有源光产生区的腔区。 上反射镜和底镜中的至少一个具有由于暴露于氧化剂而被周围区域氧化成电绝缘体的层。 垂直堆叠结构限定两个或更多个蚀刻孔,每个蚀刻孔从基本上平坦的顶表面延伸到氧化的周边区域。 每个蚀刻的孔都是由上覆的水分渗透屏障进行湿度钝化。