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21. 发明授权

US06392231B1 Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method 有权
公开(公告)号：US06392231B1
公开(公告)日：2002-05-21
申请号：US09513306
申请日：2000-02-25
申请人： Zhong-Wei Chen
发明人： Zhong-Wei Chen
IPC分类号： H01J37141
CPC分类号： H01J37/28 , H01J37/141 , H01J2237/04756 , H01J2237/1035
摘要： A swinging objective retarding immersion lens system and method therefore which provide a low voltage electron beam with high beam current, relatively high spatial resolution, a relative large scan field, and high signal collection efficiency. The objective lens includes a magnetic lens for generating a magnetic field in the vicinity of the specimen to focus the particles of the particle beam on the specimen, an electrode having a potential for providing a retarding field to the particle beam near the specimen to reduce the energy of the particle beam when the beam collides with the specimen; a deflection system including a plurality of deflection units situated along the beam axis for deflecting the particle beam to allow scanning on the specimen with large area, at least one of the deflection units located in the retarding field of the beam, the remainder of the deflection units located within the central bore of the magnetic lens; and a annular detection unit with a relatively small aperture, located underneath the primary beam define aperture, to capture secondary electron (SE) and backscattered electrons (BSE).

22. 发明授权

US5563415A Magnetic lens apparatus for a low-voltage high-resolution electron microscope 失效
标题翻译：用于低电压高分辨率电子显微镜的磁性透镜装置
公开(公告)号：US5563415A
公开(公告)日：1996-10-08
申请号：US487926
申请日：1995-06-07
申请人： Albert V. Crewe
发明人： Albert V. Crewe
IPC分类号： G01Q30/02 , H01J37/141 , H01J37/14
CPC分类号： H01J37/141 , H01J2237/1035 , H01J2237/142
摘要： A lens apparatus in which a beam of charged particles of low accelerating voltage is brought to a focus by a magnetic field, the lens being situated behind the target position. The lens comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. The lens apparatus comprises the sole focusing lens for high-resolution imaging in a low-voltage scanning electron microscope.
摘要翻译：一种透镜装置，其中通过磁场将低加速电压的带电粒子束聚焦，透镜位于目标位置之后。透镜包括围绕光束的轴线布置的导电线圈和至少在由线圈包围的空间内沿着光束的轴线延伸的磁极片。透镜装置包括用于在低电压扫描电子显微镜中进行高分辨率成像的唯一聚焦透镜。

23. 发明授权

US09490100B2 Method of using a compound particle-optical lens 有权
标题翻译：使用复合粒子光学透镜的方法
公开(公告)号：US09490100B2
公开(公告)日：2016-11-08
申请号：US14021480
申请日：2013-09-09
申请人： FEI Company
发明人： Petr Syta{hacek over (r)} , Petr Hlavenka , Lubomír Tůma
IPC分类号： H01J37/14 , H01J37/145 , H01J37/28
CPC分类号： H01J37/14 , H01J37/145 , H01J37/28 , H01J2237/1035 , H01J2237/24475 , H01J2237/24485 , H01J2237/248
摘要： The invention relates to a compound objective lens for a Scanning Electron Microscope having a conventional magnetic lens excited by a first lens coil, an immersion magnetic lens excited by a second lens coil, and an immersion electrostatic lens excited by the voltage difference between the sample and the electrostatic lens electrode. For a predetermined excitation of the lens, the electron beam can be focused on the sample using combinations of excitations of the two lens coils. More BSE information can be obtained when the detector distinguishes between BSE's (202) that strike the detector close to the axis and BSE's (204) that strike the detector further removed from the axis. By tuning the ratio of the excitation of the two lens coils, the distance from the axis that the BSE's impinge on the detector can be changed, and the compound lens can be used as an energy selective detector.
摘要翻译：本发明涉及一种用于扫描电子显微镜的复合物镜，其具有由第一透镜线圈激发的常规磁透镜，由第二透镜线圈激发的浸没磁透镜，以及由样品和静电透镜电极。对于透镜的预定激发，可以使用两个透镜线圈的激发的组合将电子束聚焦在样品上。当检测器区分击穿靠近轴的检测器的BSE（202）和撞击检测器进一步从轴移除的BSE（204）之后，可以获得更多的BSE信息。通过调整两个透镜线圈的激励的比率，可以改变从BSE撞击在检测器上的轴线的距离，并且复合透镜可以用作能量选择检测器。

24. 发明授权

US08829470B2 Configurable charged-particle apparatus 有权
标题翻译：可配置的带电粒子装置
公开(公告)号：US08829470B2
公开(公告)日：2014-09-09
申请号：US14060170
申请日：2013-10-22
申请人： FEI Company
发明人： Lubomir T{dot over (u)}ma , Josef {hacek over (S)}esták
IPC分类号： G21K5/08 , H01J37/26 , H01J37/141 , H01J37/20
CPC分类号： G21K5/08 , H01J37/1413 , H01J37/20 , H01J37/265 , H01J2237/1035 , H01J2237/1415 , H01J2237/2802 , H01J2237/2813
摘要： The invention relates to a charged-particle apparatus having a charged particle source with an optical axis; a magnetic immersion lens comprising a first lens pole and a configurable magnetic circuit; and a first sample stage movable with respect to the optical axis. The apparatus has a first configuration to position the sample, mounted on the first stage, with respect to the optical axis and a second configuration, having a second lens pole mounted on the first stage and intersecting the optical axis, equipped with a second sample stage to position the sample between the two lens poles and is movable with respect to the optical axis, causing the optical properties of the magnetic immersion lens to differ in the two configurations, and can, in the second configuration, be changed by positioning the second lens pole using the first stage, thus changing the magnetic circuit.
摘要翻译：本发明涉及具有光轴的带电粒子源的带电粒子装置; 一种包含第一透镜柱和可配置磁路的磁浸透镜; 以及可相对于光轴移动的第一样品台。该装置具有第一配置，用于相对于光轴定位安装在第一台上的样品，并且具有第二配置，其具有安装在第一台上并与光轴相交的第二透镜杆，该第二透镜杆装备有第二样品台将样品定位在两个透镜杆之间并且可相对于光轴移动，导致两种结构中的浸没透镜的光学特性不同，并且可以在第二构造中通过将第二透镜使用第一级，从而改变磁路。

25. 发明授权

US08445862B2 Apparatus of plural charged particle beams with multi-axis magnetic lens 有权
标题翻译：具有多轴磁性透镜的多个带电粒子束的装置
公开(公告)号：US08445862B2
公开(公告)日：2013-05-21
申请号：US12968221
申请日：2010-12-14
申请人： Zhongwei Chen , Weiming Ren , Kenichi Kanai , Xuedong Liu
发明人： Zhongwei Chen , Weiming Ren , Kenichi Kanai , Xuedong Liu
IPC分类号： H01J37/143
CPC分类号： H01J37/141 , H01J37/28 , H01J2237/1035 , H01J2237/1415 , H01J2237/1534
摘要： An apparatus basically uses a simple and compact multi-axis magnetic lens to focus each of a plurality of charged particle beams on sample surface at the same time. In each sub-lens module of the multi-axis magnetic lens, two magnetic rings are respectively inserted into upper and lower holes with non-magnetic radial gap. Each gap size is small enough to keep a sufficient magnetic coupling and large enough to get a sufficient axial symmetry of magnetic scale potential distribution in the space near to its optical axis. This method eliminates the non-axisymmetric transverse field in each sub-lens and the round lens field difference among all sub-lenses at the same time; both exist inherently in a conventional multi-axis magnetic lens. In the apparatus, some additional magnetic shielding measures such as magnetic shielding tubes, plates and house are used to eliminate the non-axisymmetric transverse field on the charged particle path from each charged particle source to the entrance of each sub-lens and from the exit of each sub-lens to the sample surface.
摘要翻译：设备基本上使用简单紧凑的多轴磁性透镜来同时将多个带电粒子束中的每一个聚焦在样品表面上。在多轴磁性透镜的每个子透镜模块中，两个磁环分别插入具有非磁性径向间隙的上孔和下孔中。每个间隙尺寸足够小以保持足够的磁耦合并且足够大以在靠近其光轴的空间中获得足够的磁标势电位分布的轴向对称性。该方法同时消除了每个子透镜中的非轴对称横向场和所有子透镜之间的圆透镜场差; 都存在于传统的多轴磁性透镜中。在该装置中，使用一些额外的磁屏蔽措施，例如磁屏蔽管，板和房子来消除带电粒子路径上从每个带电粒子源到每个子透镜的入口和从出口的入口处的非轴对称横向场每个子透镜到样品表面。

26. 发明申请

US20110018470A1 ELECTRON GUN WITH MAGNETIC IMMERSION DOUBLE CONDENSER LENSES 有权
标题翻译：电子枪具有磁力倾斜双重冷凝器镜头
公开(公告)号：US20110018470A1
公开(公告)日：2011-01-27
申请号：US12896110
申请日：2010-10-01
申请人： Xu Zhang , Zhong-Wei Chen
发明人： Xu Zhang , Zhong-Wei Chen
IPC分类号： H01J29/64 , H01J29/70 , H01J1/50
CPC分类号： H01J37/141 , H01J37/063 , H01J2237/065 , H01J2237/083 , H01J2237/1035 , H01J2237/1405
摘要： An electron gun comprises an electron emitter, an electrode surrounding the electron emitter, an extraction electrode, and a double condenser lens assembly, the double condenser lens assembly comprising a magnetic immersion pre-condenser lens and a condenser lens. In combination with a probe forming objective lens, the electron gun apparatus can provide an electron beam of independently adjustable probe size and probe current, as is desirable in electron beam applications. The electron emitter is immersed in the magnetic field generated by a magnetic type pre-condenser lens. When activated, the pre-condenser lens collimates the beam effectively to increase its angular intensity while at the same time enlarging the virtual source as compared with non-immersion case, due to geometric magnification and aberrations of its lens action. The pre-condenser lens is followed by a condenser lens. If the condenser lens is of the magnetic type, its peak magnetic field is far enough away and thus its action does not significantly affect the size of the virtual source. Independent adjustment of the lenses, combined with suitable selection of final probe forming objective aperture size, allows various combination of the final probe size and probe current to be obtained in a range sufficient for most electron beam applications.
摘要翻译：电子枪包括电子发射器，围绕电子发射体的电极，引出电极和双重聚光透镜组件，双重聚光透镜组件包括磁性浸入式预聚光透镜和聚光透镜。与形成物镜的探针组合，如在电子束应用中所希望的那样，电子枪装置可以提供独立可调的探针尺寸和探针电流的电子束。将电子发射器浸入由磁式预聚光透镜产生的磁场中。当激活时，由于几何放大和其透镜作用的像差，预聚焦透镜有效地准直光束以增加其角度强度，同时与非浸没情况相比放大虚拟光源。预聚光透镜之后是聚光透镜。如果聚光透镜是磁性的，则其峰值磁场足够远，因此其作用不会显着影响虚拟源的尺寸。透镜的独立调整结合适当选择最终探针形成物镜孔径的尺寸允许在足以满足大多数电子束应用的范围内获得最终探针尺寸和探针电流的各种组合。

27. 发明授权

US06960766B2 Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method 有权
标题翻译：摆动目标延迟浸没透镜电子光学聚焦，偏转和信号采集系统及方法
公开(公告)号：US06960766B2
公开(公告)日：2005-11-01
申请号：US10601124
申请日：2003-06-20
申请人： Zhong-Wei Chen
发明人： Zhong-Wei Chen
IPC分类号： G01Q10/00 , G01Q30/02 , H01J37/141 , H01J37/28 , H01J37/147
CPC分类号： H01J37/28 , H01J37/141 , H01J2237/04756 , H01J2237/1035
摘要： A swinging objective retarding immersion lens system and method therefore which provide a low voltage electron beam with high beam current, relatively high spatial resolution, a relative large scan field, and high signal collection efficiency. The objective lens includes a magnetic lens for generating a magnetic field in the vicinity of the specimen to focus the particles of the particle beam on the specimen, an electrode having a potential for providing a retarding field to the particle beam near the specimen to reduce the energy of the particle beam when the beam collides with the specimen; a deflection system including a plurality of deflection units situated along the beam axis for deflecting the particle beam to allow scanning on the specimen with large area, at least one of the deflection units located in the retarding field of the beam, the remainder of the deflection units located within the central bore of the magnetic lens; and a annular detection unit with a relatively small aperture, located underneath the primary beam define aperture, to capture secondary electron (SE) and backscattered electrons (BSE).
摘要翻译：一种摆动物镜延迟浸没透镜系统及其方法，其提供具有高光束电流的低电压电子束，相对高的空间分辨率，相对大的扫描场和高的信号收集效率。物镜包括用于在样本附近产生磁场以将粒子束的粒子聚焦在样本上的磁性透镜，具有向样本附近的粒子束提供延迟场的电位的电极，以减少当光束与样品碰撞时，粒子束的能量; 偏转系统包括沿着光束轴线设置的多个偏转单元，用于偏转粒子束以允许对具有大面积的样本进行扫描，位于光束的延迟场中的至少一个偏转单元，偏转的剩余部分位于磁性透镜的中心孔内的单元; 和具有相对较小孔径的环形检测单元，位于主光束下方限定孔，以捕获二次电子（SE）和反向散射电子（BSE）。

28. 发明授权

US06906335B2 Lens for a scanning electron microscope 失效
标题翻译：透镜用于扫描电子显微镜
公开(公告)号：US06906335B2
公开(公告)日：2005-06-14
申请号：US10275203
申请日：2001-05-02
申请人： Anjam Khursheed
发明人： Anjam Khursheed
IPC分类号： G01N23/225 , G21K7/00 , H01J37/141 , H01J37/18
CPC分类号： H01J37/141 , G01N23/2251 , H01J37/1413 , H01J2237/1035 , H01J2237/28
摘要： A lens (15) for a scanning electron microscope is adapted to be removably mounted on a specimen stage (1). The lens (15) includes a magnetic circuit (2, 3, 4, 7) having a first magnetic pole piece (7) and a second magnetic pole piece (4), and a specimen holder (5). The specimen holder (5) is located between the first and second magnetic pole pieces (4, 7). The magnetic circuit (2, 3, 4, 7) also includes a lens bore (18) to permit an electron beam (9) to strike a surface of a specimen mounted on the specimen holder (5), in use. The lens bore (18) has a width of greater than 1 mm.
摘要翻译：用于扫描电子显微镜的透镜（15）适于可拆卸地安装在样品台（1）上。透镜（15）包括具有第一磁极片（7）和第二磁极片（4）的磁路（2,3,4,7）和样本保持器（5）。样品架（5）位于第一和第二磁极片（4,7）之间。在使用中，磁路（2,3,4,7）还包括透镜孔（18），以允许电子束（9）撞击安装在样本架（5）上的试样的表面。透镜孔（18）具有大于1mm的宽度。

29. 发明申请

US20040084620A1 Lens for a scanning electron microscope 失效
标题翻译：透镜用于扫描电子显微镜
公开(公告)号：US20040084620A1
公开(公告)日：2004-05-06
申请号：US10275203
申请日：2003-01-08
发明人： Anjam Khursheed
IPC分类号： G21K007/00 , G01N023/00
CPC分类号： H01J37/141 , G01N23/2251 , H01J37/1413 , H01J2237/1035 , H01J2237/28
摘要： A lens (15) for a scanning electron microscope is adapted to be removably mounted on a specimen stage (1). The lens (15) includes a magnetic circuit (2, 3, 4, 7) having a first magnetic pole piece (7) and a second magnetic pole piece (4), and a specimen holder (5). The specimen holder (5) is located between the first and second magnetic pole pieces (4, 7). The magnetic circuit (2, 3, 4, 7) also includes a lens bore (18) to permit an electron beam (9) to strike a surface of a specimen mounted on the specimen holder (5), in use. The lens bore (18) has a width of greater than 1 mm.
摘要翻译：用于扫描电子显微镜的透镜（15）适于可拆卸地安装在样品台（1）上。透镜（15）包括具有第一磁极片（7）和第二磁极片（4）的磁路（2,3,4,7）和样本保持器（5）。样品架（5）位于第一和第二磁极片（4,7）之间。在使用中，磁路（2,3,4,7）还包括透镜孔（18），以允许电子束（9）撞击安装在样本架（5）上的试样的表面。透镜孔（18）具有大于1mm的宽度。

30. 发明申请

US20040046125A1 Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method 有权
标题翻译：摆动目标延迟浸没透镜电子光学聚焦，偏转和信号采集系统及方法
公开(公告)号：US20040046125A1
公开(公告)日：2004-03-11
申请号：US10601124
申请日：2003-06-20
发明人： Zhong-Wei Chen
IPC分类号： H01J037/14 , H01J037/28
CPC分类号： H01J37/28 , H01J37/141 , H01J2237/04756 , H01J2237/1035
摘要： A swinging objective retarding immersion lens system and method therefore which provide a low voltage electron beam with high beam current, relatively high spatial resolution, a relative large scan field, and high signal collection efficiency. The objective lens includes a magnetic lens for generating a magnetic field in the vicinity of the specimen to focus the particles of the particle beam on the specimen, an electrode having a potential for providing a retarding field to the particle beam near the specimen to reduce the energy of the particle beam when the beam collides with the specimen; a deflection system including a plurality of deflection units situated along the beam axis for deflecting the particle beam to allow scanning on the specimen with large area, at least one of the deflection units located in the retarding field of the beam, the remainder of the deflection units located within the central bore of the magnetic lens; and a annular detection unit with a relatively small aperture, located underneath the primary beam define aperture, to capture secondary electron (SE) and backscattered electrons (BSE).
摘要翻译：一种摆动物镜延迟浸没透镜系统及其方法，其提供具有高光束电流的低电压电子束，相对高的空间分辨率，相对大的扫描场和高的信号收集效率。物镜包括用于在样本附近产生磁场以将粒子束的粒子聚焦在样本上的磁性透镜，具有向样本附近的粒子束提供延迟场的电位的电极，以减少当光束与样品碰撞时，粒子束的能量; 偏转系统包括沿着光束轴线设置的多个偏转单元，用于偏转粒子束以允许对具有大面积的样本进行扫描，位于光束的延迟场中的至少一个偏转单元，偏转的剩余部分位于磁性透镜的中心孔内的单元; 和具有相对较小孔径的环形检测单元，位于主光束下方限定孔，以捕获二次电子（SE）和反向散射电子（BSE）。

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