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    • 22. 发明授权
    • Method for the metallization of optical fibers
    • 光纤金属化方法
    • US06798963B2
    • 2004-09-28
    • US10137705
    • 2002-05-03
    • Yael NemirovskyElena SidorovVictor Sidorov
    • Yael NemirovskyElena SidorovVictor Sidorov
    • G02B602
    • C03C25/52C03C25/1063C03C25/16C03C25/22C23C18/1605C23C18/165C23C18/31C23C18/32C23C18/42C23C28/021G02B6/02395
    • An improved method for providing high-quality optical fiber metallization with the required length at the required location. The method enables metallized optical fibers to be soldered and connected to mechanical components while reducing the level of stress in the metal coatings and providing strong adhesion, good conductivity and connectivity. The advantage of the method is a combination of vacuum evaporation and electroless deposition for the optical fiber metallization. A strong adhesion of the metal layer is achieved by the use of an evaporated thin metal layer, comprising an adhesion layer and a seed layer. The stress reduction is achieved due to electroless deposition, which is adequately thick for subsequent soldering/welding or other applications. The method comprises preparation for evaporation, preparation of optical fibers, evaporation of the thin metal adhesion and seed layer on the optical fiber, electroless deposition of an adequately thick metal layer, and acceptance testing. Metallization of optical fibers at any location across the fiber (patterned metallization) additionally includes application of an organic masking layer to the fiber before the metallization process, metallization of the fiber according to the present invention and subsequent dissolution of the masking layer. The inventive method applies to any fiber, in particular to SM (Single Mode) fibers and to PM (Polarization Maintaining) fibers.
    • 一种用于在所需位置提供所需长度的高品质光纤金属化的改进方法。 该方法使得金属化光纤被焊接并连接到机械部件,同时降低金属涂层中的应力水平并提供强粘附性,良好的导电性和连接性。 该方法的优点是用于光纤金属化的真空蒸发和无电沉积的组合。 通过使用包含粘合层和种子层的蒸发的薄金属层来实现金属层的强粘合性。 通过无电沉积实现应力降低,对于后续的焊接/焊接或其他应用来说,其具有足够的厚度。 该方法包括蒸发准备,光纤制备,薄金属粘附和晶种层在光纤上的蒸发,无电沉积厚度均匀的金属层和验收测试。 在纤维(图案化金属化)的任何位置处的光纤的金属化还包括在金属化处理之前向纤维施加有机掩蔽层,根据本发明的纤维的金属化和随后的掩蔽层的溶解。 本发明的方法适用于任何纤维,特别是SM(单模)纤维和PM(Polarizing Maintain)的纤维。
    • 23. 发明授权
    • Method of metallization of an optical waveguide
    • 光波导的金属化方法
    • US06753034B2
    • 2004-06-22
    • US10178939
    • 2002-06-20
    • Milton E. Ives, Jr.Thomas W. Engel
    • Milton E. Ives, Jr.Thomas W. Engel
    • B05D506
    • C23C18/1664C03C17/10C03C25/1063C03C2217/25C03C2217/261C03C2218/111C03C2218/31C23C18/1889C23C18/36
    • A method of applying a metal coating to optical element, such as an optical waveguide, comprising the steps of partially depleting stabilizers in an electroless metallic solution and immersing an optical waveguide in the electroless metallic solution to deposit the metal coating to the optical waveguide. The step of partially depleting may include creating an electroless metallic solution having a sodium hypophoshite concentration of about 25 grams per liter. The electroless metallic solution may comprise a Fidelity solution 4865A, a Fidelity solution 4865B and de-ionized water in a ratio of 1:1:18; and sodium hypophosphite crystals. Alternatively, the step of partially depleting may include placing a dummy load into the electroless metallic solution. The dummy load may be a rectangular block of metal, formed of a low carbon steel, and may have a threaded cylindrical passage therein. After depleting the stabilizers, the optical waveguide is immersed in the electroless metallic solution for a predetermined length of time depending on a desired deposition thickness.
    • 将金属涂层施加到诸如光波导的光学元件的方法,包括以下步骤:部分耗尽无电金属溶液中的稳定剂并将光波导浸入无电金属溶液中以将金属涂层沉积到光波导上。 部分耗尽的步骤可以包括产生具有约25克/升的钠次磷灰石浓度的无电金属溶液。 无电金属溶液可以包括Fidelity溶液4865A,Fidelity溶液4865B和比例为1:1:18的去离子水; 和次磷酸钠晶体。 或者,部分耗尽的步骤可以包括将虚拟负载放置到无电金属溶液中。 假负载可以是由低碳钢形成的矩形金属块,并且其中可以具有带螺纹的圆柱形通道。 在耗尽稳定剂之后,根据所需的沉积厚度,将光波导浸在无电金属溶液中预定的时间长度。
    • 24. 发明申请
    • ELECTROPLATING ASSEMBLY FOR METAL PLATED OPTICAL FIBERS
    • 用于金属镀膜光纤的电镀组件
    • US20030039458A1
    • 2003-02-27
    • US09935456
    • 2001-08-23
    • 3M Innovative Properties Company
    • Michael N. MillerSteven Y. YuDavid J. Lentz
    • G02B006/22
    • C25D17/12C03C25/1063C03C25/16C03C25/52C25D7/0607C25D17/06G02B6/4238G02B6/4248
    • An electrode assembly for electroplating conducting portions of nonconductors comprises an insulating frame having a first projection opposite a second projection. Preferably the insulating frame comprises a resin selected from the group consisting of acrylic resins, polyvinyl chloride resins and polycarbonate resins. A metal filament, for connection to the negative pole of a source of electrical energy, extends from the first projection to the second projection. Adjacent to the metal filament a first conductive plate is attached to the insulating frame at a first distance from the metal filament. A second conductive plate attaches to the insulating frame at a second distance from the metal filament. The first plate and the second plate are adapted for connection to the positive pole of a source of electrical energy. The nonconductor is at least one optical fiber having a conducting portion in contact with the metal filament to provide connection of the conducting portion to a negative pole of the source of electrical energy. In one embodiment of an assembly according to the present invention, there is a plurality of optical fibers each having a conducting portion in contact with the metal filament. An electrode assembly may be used in a process according to the present invention to provide a conductive composite coating on the surface of a nonconductor, preferably an optical fiber.
    • 用于电镀非导体的导电部分的电极组件包括具有与第二突起相对的第一突起的绝缘框架。 优选地,绝缘框架包括选自丙烯酸树脂,聚氯乙烯树脂和聚碳酸酯树脂的树脂。 用于连接到电能源的负极的金属灯丝从第一突起延伸到第二突起。 在与金属灯丝相邻的位置处,第一导电板以与金属灯丝隔开的第一距离附接到绝缘框架。 第二导电板以距离金属丝的第二距离连接到绝缘框架。 第一板和第二板适于连接到电能源的正极。 非导体是至少一个光纤,其具有与金属灯丝接触的导电部分,以提供导电部分与电能源的负极的连接。 在根据本发明的组件的一个实施例中,存在多个光纤,每个光纤具有与金属灯丝接触的导电部分。 在根据本发明的方法中可以使用电极组件,以在非导体,优选光纤的表面上提供导电复合涂层。
    • 25. 发明授权
    • Selective fiber metallization
    • 选择性光纤金属化
    • US06355301B1
    • 2002-03-12
    • US09705224
    • 2000-11-02
    • Michael Nevin Miller
    • Michael Nevin Miller
    • B05D310
    • G02B6/12C03C17/10C03C25/1063C03C2217/25C03C2218/111C03C2218/115C03C2218/31C23C18/1605G02B6/02395
    • A process for applying a metal to selected areas of non conducting substrates, including individual fibers, particularly optical fibers, comprises the steps of providing a non-conducting substrate having an uncoated portion to be treated with a sensitizer solution to provide a sensitized portion of the non-conducting substrate. Covering the sensitized portion with an activator solution provides an activated portion of the non-conducting substrate. Coating at least a section of the activated portion with a stannous salt solution forms at least one activated area and at least one deactivated area within the activated portion of the non-conducting substrate to produce a masked portion therefrom. Upon immersing the masked portion of the non-conducting substrate in an electroless plating bath, metal deposits on the activated area to provide a selectively metallized non-conducting substrate. This process provides selectively metallized articles including selectively metallized optical fibers.
    • 一种将金属施加到非导电基底(包括单根纤维,特别是光纤)的选定区域的方法包括以下步骤:提供具有未被涂覆的部分的非导电基底,以用敏化剂溶液处理,以提供致敏部分 非导电衬底。 用活化剂溶液覆盖致敏部分提供非导电基材的活化部分。 用亚锡盐溶液涂覆活化部分的至少一部分在非导电基材的活化部分内形成至少一个活化区域和至少一个去活化区域,以从其产生掩蔽部分。 当将非导电衬底的掩蔽部分浸入化学镀浴中时,金属沉积在活化区域上以提供选择性金属化的非导电衬底。 该方法提供选择性金属化制品,包括选择性金属化的光纤。
    • 29. 发明申请
    • Fiber Delivery for Metrology Systems Used in Lithography Tools
    • 用于平版印刷工具的计量系统的光纤传输
    • US20130128249A1
    • 2013-05-23
    • US13672556
    • 2012-11-08
    • Zygo Corporation
    • Kurt Redlitz
    • G03F7/20
    • G03F7/70958C03C25/1063G03F7/70775
    • Metrology system, apparatus and method used to implement measurements inside a lithography tool are described, such that the disclosed measurements can be performed without contributing outgassed effluent within the lithography tool. Disclosed is a system including: an objective for projecting an image of an object positioned at an object plane to an image plane; a stage to execute motions relative to the objective while supporting the wafer at the image plane; an optical sensor for producing an optical monitoring signal associated with the motions of the stage; and a glass optical fiber having a metal outer coating, the metal-coated glass optical fiber being arranged to provide light to, or collect light from, the optical sensor.
    • 描述了用于在光刻工具内实现测量的测量系统,装置和方法,使得所公开的测量可以在光刻工具内不造成脱气的流出物的情况下进行。 公开了一种系统,包括:用于将位于物平面处的物体的图像投影到图像平面的目标; 执行相对于目标的运动的阶段,同时在晶面上支撑晶片; 光学传感器,用于产生与舞台的运动相关联的光学监视信号; 以及具有金属外涂层的玻璃光纤,所述金属被覆玻璃光纤被配置为向所述光学传感器提供光或收集光。