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    • 28. 发明授权
    • ITO-coated article for use with touch panel display assemblies, and/or method of making the same
    • 用于触摸面板显示组件的ITO涂层制品,和/或其制造方法
    • US08313620B2
    • 2012-11-20
    • US13302052
    • 2011-11-22
    • Alexey Krasnov
    • Alexey Krasnov
    • C23C14/00
    • C03C17/2456C03C2217/212C03C2218/154C23C14/086C23C14/5806G02F1/13338
    • Certain example embodiments of this invention relate to techniques for making a coated article including a transparent conductive indium-tin-oxide (ITO) film supported by a heat treated glass substrate. A substantially sub-oxidized ITO or metallic indium-tin (InSn) film is sputter-deposited onto a glass substrate at room temperature. The glass substrate with the as-deposited film thereon is subjected to elevated temperatures. Thermal tempering or heat strengthening causes the as-deposited film to be transformed into a crystalline transparent conductive ITO film. Advantageously, this may reduce the cost of touch panel assemblies, e.g., because of the higher rates of the ITO deposition in the metallic mode. The cost of touch-panel assemblies may be further reduced through the use of float glass.
    • 本发明的一些示例性实施方案涉及制备包括由热处理玻璃基板负载的透明导电铟锡氧化物(ITO)膜的涂覆制品的技术。 在室温下将基本上亚氧化的ITO或金属铟锡(InSn)膜溅射沉积到玻璃基板上。 在其上具有沉积膜的玻璃基板经受升高的温度。 热回火或热强化使得沉积的膜转变成晶体透明导电ITO膜。 有利地,这可以降低触摸面板组件的成本,例如,因为在金属模式中ITO沉积的速率更高。 通过使用浮法玻璃可以进一步降低触摸板组件的成本。