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    • 22. 发明授权
    • Meniscus lens of synthetic quartz glass and method for the production thereof
    • 合成石英玻璃的弯月透镜及其制造方法
    • US08850850B2
    • 2014-10-07
    • US13384334
    • 2010-07-01
    • Stefan Hengster
    • Stefan Hengster
    • C03B11/08C03B17/00
    • C03B19/1469C03B23/0493C03B23/051
    • To produce a meniscus lens from synthetic quartz glass for use in a microlithography apparatus, which lens has a first optical surface (7) and a second optical surface (8) with the same direction of curvature as the first optical surface (7), SiO2 particles are formed by oxidation or flame hydrolysis of a silicon-containing starting compound and deposited layer by layer on a substrate to form a cylindrical SiO2 blank which contains layers with a surface normal extending in the direction of growth. To allow such layers, which have however the least possible adverse effect on optical or mechanical properties, it is proposed according to the invention that the blank is plastically worked in a hot forming process under the effect of a deforming force to form a preform (6), which has at least the first curved surface (7) and in which the layers are curved in the direction of curvature, and that the meniscus lens is obtained from the preform.
    • 为了从用于微光刻设备的合成石英玻璃制造弯月透镜,该透镜具有第一光学表面(7)和具有与第一光学表面(7)相同的曲率方向的第二光学表面(8),SiO 2 颗粒通过含硅起始化合物的氧化或火焰水解形成,并逐层沉积在基底上以形成圆柱形SiO 2空白,其包含沿生长方向延伸的表面法线的层。 为了允许对光学或机械性能具有尽可能不利影响的这种层,根据本发明提出,坯料在变形作用下在热成形过程中被塑性加工以形成预制件(6 ),其至少具有第一弯曲表面(7),并且其中层在曲率方向上弯曲,并且弯月透镜从预成型件获得。
    • 25. 发明申请
    • Synthetic silica glass molding method, synthetic silica glass molding apparatus, and synthetic silica glass
    • 合成石英玻璃成型法,合成石英玻璃成型装置和合成石英玻璃
    • US20020050152A1
    • 2002-05-02
    • US09923801
    • 2001-08-08
    • Seishi FujiwaraHiroki JinboNorio Komine
    • C03B011/06C03B019/04
    • C03B23/0013C03B19/1469C03B23/0493
    • A method is provided for molding a synthetic silica glass member. The method includes accommodating a synthetic silica glass bulk inside a molding vessel; interposing an elastic member having a ventilating property between a pressing member and the synthetic silica glass bulk; providing a fastener for fastening at least peripheral edge portions of the elastic member to the pressing member; and pressing the synthetic silica glass bulk against the molding vessel by the pressing member in a high-temperature condition to mold the synthetic silica glass bulk into a synthetic silica glass member having a shape conforming to a shape of the space defined by the pressing member and the molding vessel, the synthetic silica glass bulk being pressed in such a manner that the pressing member and the elastic member tightly fasten to each other through the fastener.
    • 提供了一种用于模制合成石英玻璃构件的方法。 该方法包括在合成容器内容纳合成石英玻璃体; 在挤压构件和合成石英玻璃体之间插入具有通气性的弹性构件; 提供用于将所述弹性构件的至少周边边缘部分紧固到所述按压构件的紧固件; 并且通过加压构件在高温条件下将合成石英玻璃体压在成型容器上,以将合成石英玻璃体模制成具有符合由按压构件限定的空间形状的合成石英玻璃构件,以及 成型容器,合成石英玻璃体被压制成使得按压构件和弹性构件通过紧固件彼此紧紧地紧固。
    • 30. 发明授权
    • Tapered optical fiber, manufacturing method thereof and manufacturing system thereof
    • 锥形光纤及其制造方法及其制造方法
    • US09383514B2
    • 2016-07-05
    • US14123754
    • 2013-05-24
    • Ishihara Sangyo Co., Ltd.
    • Hidetoku IidaRumiko OsadaHideaki Shiratori
    • G02B6/26G02B6/38C03B37/023C03B23/047C03B23/049C03B37/15G02B6/255B29D11/00G02B6/14
    • G02B6/26B29D11/00663C03B23/047C03B23/0493C03B37/15G02B6/14G02B6/2552G02B6/3807
    • To provide a tapered optical fiber having a good outer diameter accuracy and a high reproducibility, a manufacturing method of the tapered optical fiber, and a manufacturing system of the tapered optical fiber. The above-mentioned problem is solved by manufacturing system 1 of a tapered optical fiber comprising: shifter 11, 12 which reciprocates optical fiber 10 mounted at positions having a prescribed distance therebetween in the longer direction X of optical fiber 10 (the direction of the optical axis); and heating device 13 which heats the reciprocating optical fiber 10 at fixed position O, wherein shifter 13 includes a broadening unit which can increase the mounting distance (L1+L2) of the optical fiber while reciprocating the optical fiber. Shifter 11, 12 has at least two mounting unit which fix the optical fiber 10, and serves as a broadening unit controlling the two mounting unit independently or interlockingly. The control is performed to in order to change at least one of the ranges of reciprocal movement, the reciprocal movement speed, and the broadening width of the optical fiber fixed on the mounting unit.
    • 为了提供具有良好外径精度和高再现性的锥形光纤,锥形光纤的制造方法和锥形光纤的制造系统。 上述问题是通过一种锥形光纤的制造系统1来解决的,该系统包括:移动器11,12,其在光纤10的长度方向X(光学方向)上使安装在其间具有规定距离的位置的光纤10往复运动 轴); 以及在固定位置O对往复式光纤10进行加热的加热装置13,其中,变速器13包括能够使光纤往复运动的同时增加光纤的安装距离(L1 + L2)的变宽单元。 移位器11,12具有固定光纤10的至少两个安装单元,并且用作独立地或互锁地控制两个安装单元的扩展单元。 进行控制以便改变固定在安装单元上的光纤的往复运动范围,往复运动速度和加宽宽度中的至少一个。