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    • 21. 发明授权
    • Stitching methods using multiple microlithographic expose tools
    • 使用多个微光刻曝光工具的缝合方法
    • US08728713B2
    • 2014-05-20
    • US13196197
    • 2011-08-02
    • Robert P. FabinskiEric J. MeisenzahlJames E. Doran
    • Robert P. FabinskiEric J. MeisenzahlJames E. Doran
    • G03F7/22
    • G03F7/70475G03F7/70466G03F7/70633
    • A method for producing a measurement structure for measuring alignment of patterns formed in one or more layers of patternable material uses multiple exposure tools having different resolution limits and maximum expose field sizes. The measurement structure includes multiple complementary and coincident parts. An abutting field pattern is exposed and stitched in a layer of patternable material using a first exposure tool and a first mask. The abutting field pattern includes a first portion of the multiple complementary parts. A periphery pattern is exposed in the same layer or in a different layer of patternable material using a second exposure tool and a second mask. The periphery pattern includes a second portion of the multiple complementary parts. A maximum expose field of the first exposure tool is smaller than the maximum expose field of the second exposure tool.
    • 一种用于测量形成在一层或多层可图案材料中的图案的对准的测量结构的方法使用具有不同分辨率极限和最大曝光场尺寸的多个曝光工具。 测量结构包括多个互补和重合部分。 使用第一曝光工具和第一掩模将邻接的场图案曝光并缝合在可图案材料层中。 邻接场图包括多个互补部分的第一部分。 周边图案使用第二曝光工具和第二掩模在同一层或不同的可图案材料层中曝光。 周边图案包括多个互补部分的第二部分。 第一曝光工具的最大曝光场小于第二曝光工具的最大曝光场。
    • 23. 发明申请
    • METHOD OF PRODUCING AN IMAGE SENSOR HAVING MULTIPLE OUTPUT CHANNELS
    • 生产具有多个输出通道的图像传感器的方法
    • US20140000093A1
    • 2014-01-02
    • US13918300
    • 2013-06-14
    • Truesense Imaging, Inc.
    • Christopher Parks
    • H01L27/148
    • H01L27/14812H01L27/14831Y10T29/49002Y10T29/49117
    • A method for producing an image sensor includes providing a horizontal shift register electrically connected to a pixel array for receiving charge packets from the pixel array. A non-destructive sense node is provided that is connected to an output of the horizontal shift register. A charge directing switch is provided that is electrically connected to the non-destructive sense node. The charge directing switch includes first and second outputs. A charge multiplying horizontal shift register is provided that is electrically connected to the first output of the charge directing switch. A bypass horizontal shift register or an amplifier is provided that is connected to the second output of the charge directing switch.
    • 一种用于制造图像传感器的方法包括提供电连接到像素阵列的水平移位寄存器,用于从像素阵列接收电荷分组。 提供了连接到水平移位寄存器的输出的非破坏性感知节点。 提供电荷定向开关,其电连接到非破坏性感测节点。 充电指示开关包括第一和第二输出。 提供电荷乘法水平移位寄存器,其电连接到充电指示开关的第一输出。 提供旁路水平移位寄存器或放大器,其连接到充电指示开关的第二输出端。
    • 24. 发明授权
    • Image sensor with charge multiplication
    • 具有电荷倍增的图像传感器
    • US08553126B2
    • 2013-10-08
    • US12967299
    • 2010-12-14
    • Christopher Parks
    • Christopher Parks
    • H04N5/335
    • H04N5/37213H04N5/3594H04N5/378
    • An image sensor includes a horizontal shift register electrically connected to a pixel array for receiving charge packets from the pixel array. A non-destructive sense node is connected to an output of the horizontal shift register. A charge directing switch is electrically connected to the non-destructive sense node. The charge directing switch includes two outputs. A charge multiplying horizontal shift register is electrically connected to one output of the charge directing switch. A bypass horizontal shift register or an amplifier can be connected to the other output of the charge directing switch.
    • 图像传感器包括电连接到像素阵列的水平移位寄存器,用于从像素阵列接收电荷分组。 非破坏性感测节点连接到水平移位寄存器的输出。 充电指示开关电连接到非破坏性感测节点。 充电指示开关包括两个输出。 充电倍增水平移位寄存器电连接到充电指示开关的一个输出端。 旁路水平移位寄存器或放大器可以连接到充电指示开关的另一个输出。
    • 25. 发明授权
    • Methods for processing an image captured by an image sensor having multiple output channels
    • 用于处理由具有多个输出通道的图像传感器捕获的图像的方法
    • US08493491B2
    • 2013-07-23
    • US12967311
    • 2010-12-14
    • Christopher Parks
    • Christopher Parks
    • H04N5/335
    • H04N5/372H04N5/37213
    • Charge packets are transferred from a pixel array in an image sensor to a horizontal shift register. Each charge packet is shifted to a non-destructive sense node. Each charge packet is non-destructively sensed and a signal representative of a number of charge carriers in the charge packet is produced. Respective charge packets are directed to a charge multiplying output channel when the signal representative of the number of charge carriers in each charge packet indicates the charge packet will not saturate the charge multiplying horizontal shift register. Respective charge packets are directed to a charge bypass output channel or an amplifier when the signal representative of the number of charge carriers in each charge packet indicates the charge packet will saturate the charge multiplying horizontal shift register.
    • 充电包从图像传感器中的像素阵列传送到水平移位寄存器。 每个充电分组被移动到非破坏性感测节点。 每个电荷分组被非破坏性地感测,并且产生代表电荷分组中的电荷载流子数量的信号。 当表示每个充电分组中的电荷载体数量的信号指示充电分组不会使电荷乘法水平移位寄存器饱和时,各个电荷分组被引导到电荷倍增输出通道。 当表示每个充电分组中的电荷载体数量的信号指示充电分组将使充电倍增水平移位寄存器饱和时,各个充电分组被引导到充电旁路输出通道或放大器。