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    • 21. 发明授权
    • Architecture for optical switch
    • 光开关架构
    • US5345521A
    • 1994-09-06
    • US90862
    • 1993-07-12
    • T. Gus McDonaldR. Mark Boysel
    • T. Gus McDonaldR. Mark Boysel
    • G02B6/26G02B6/35G02B26/08H04Q3/52
    • G02B6/3564G02B26/0841G02B6/3512G02B6/3556G02B6/358G02B6/3582G02B6/3584
    • An optical switching device with switch elements (224) similar to digital micromirror devices (DMD). The switching element (224) resides in a trench (216) between two elevated areas on the substrate (214a, 214b). Sending and receiving fibers (218a, 218b) face each other across the trench (216) with the switch element (224) between them. When the switch is ON, light travels through lenses (220a, 220b) in the trench (216) from one fiber (218b) to the other (218a). When the switch is flipped OFF, the element (224) is activated and blocks the light from the sending fiber (218b) by reflecting or absorbing the light from the sending fiber (218b). The switch is activated and possibly deactivated by addressing electrodes (226a, 226b) under the element (224), which deflects through an air gap towards the activated electrode (226b). For better deflection angles the posts can be arranged closer to one end of the element than the other. An alternate hinge architecture is also provided.
    • 具有类似于数字微镜器件(DMD)的开关元件(224)的光学开关器件。 开关元件(224)位于衬底(214a,214b)上的两个升高区域之间的沟槽(216)中。 发送和接收光纤(218a,218b)跨越沟槽(216)并与它们之间的开关元件(224)彼此面对。 当开关接通时,光从沟槽216中的一个光纤218b到另一个218a通过透镜220a,220b。 当开关翻转为OFF时,元件(224)被激活,并通过反射或吸收来自发送光纤(218b)的光来阻挡来自发送光纤(218b)的光。 开关被激活并且可能通过寻址元件(224)下的电极(226a,226b)而被激活,该电极通过空气间隙朝向激活的电极(226b)偏转。 为了获得更好的偏转角度,柱可以比另一个更靠近元件的一端。 还提供了另一种铰链架构。
    • 22. 发明授权
    • Method of making metal-to-polysilicon capacitor
    • 制造金属到多晶硅电容器的方法
    • US5108941A
    • 1992-04-28
    • US495870
    • 1990-03-19
    • James L. PatersonHoward L. Tigelaar
    • James L. PatersonHoward L. Tigelaar
    • H01L21/765H01L27/105H01L29/788H01L29/92
    • H01L28/40H01L21/765H01L27/105H01L29/7881
    • A metal-to-polysilicon capacitor, a floating-gate transistor containing such a capacitor, and a method for making the same is disclosed. The bottom plate of the capacitor is formed over a field oxide structure, and the multilevel dielectric is deposited thereover. The multilevel dielectric is removed from the capacitor area, and an oxide/nitride dielectric is deposited over the exposed bottom plate and over the multilevel by way of LPCVD. A first layer of titanium/tungsten is preferably deposited prior to contact etch, and the contacts to moat and unrelated polysilicon are formed. Metallization is sputtered overall, and the metal and titanium/tungsten are cleared to leave the metallization filling the contact holes, and a capacitor having a titanium/tungsten and metal top plate.
    • 公开了一种金属到多晶硅电容器,含有这种电容器的浮栅晶体管及其制造方法。 电容器的底板形成在场氧化物结构上,并且多层电介质沉积在其上。 从电容器区域去除多层电介质,并通过LPCVD将氧化物/氮化物电介质沉积在暴露的底板上并在多层上沉积。 优选在接触蚀刻之前沉积第一层钛/钨,并且形成与护套和不相关的多晶硅的接触。 金属化整体溅射,金属和钛/钨被清除以留下填充接触孔的金属化,以及具有钛/钨和金属顶板的电容器。
    • 29. 发明授权
    • Two-dimensional blazed MEMS granting
    • 二维闪耀的MEMS授权
    • US07630135B2
    • 2009-12-08
    • US11224336
    • 2005-09-12
    • Benjamin L. LeeClaude E. TewWalter M. Duncan
    • Benjamin L. LeeClaude E. TewWalter M. Duncan
    • G02B5/18H04J14/02
    • G02B5/1828G02B26/0841
    • A method for assuring a blazed condition in a DMD device used in telecommunications applications. By meeting certain conditions in the fabrication and operation of the DMD, the device can achieve a blazed condition and be very effective in switching near monochromatic spatially coherent light, thereby opening up a whole new application field for such devices. This method determines the optimal pixel pitch and mirror tilt angle for a given incident angle and wavelength of near monochromatic spatially coherent light to assure blazed operating conditions. The Fraunhofer envelope is determined by convolving the Fourier transforms of the mirror aperture and the delta function at the center of each mirror and then aligning the center of this envelope with a diffraction order to provide a blazed condition. The method of the present invention presents a formula for precisely determining the mirror pitch and tilt angle to assure that a blazed condition exists for a given incident angle and wavelength of near monochromatic spatially coherent light. Considerations for the special case, know as Littrow conditions, where the incident and the reflected light transverse the same path, are also given. This case is particularly attractive for fiber optic/telecommunication applications since the same optics can be used for incoming and outgoing (reflected) light.
    • 一种用于确保在电信应用中使用的DMD设备中的闪耀状态的方法。 通过满足DMD的制造和操作的某些条件,该装置可以实现闪耀状态,并且在切换近似单色空间相干光时非常有效,从而为这种装置开辟了全新的应用领域。 该方法确定给定入射角和接近单色空间相干光的波长的最佳像素间距和镜面倾斜角,以确保闪耀的操作条件。 Fraunhofer包络是通过将镜面孔径的傅里叶变换和Δ函数卷积在每个反射镜的中心,然后将该信封的中心与衍射级对齐以提供闪耀状态来确定的。 本发明的方法提出了用于精确地确定镜间距和倾斜角的公式,以确保对于给定的入射角和接近单色空间相干光的波长存在闪耀状态。 特殊情况的注意事项,也被称为Littrow条件,事件和反射光横向相同的路径。 这种情况对于光纤/电信应用是特别有吸引力的,因为相同的光学器件可以用于输入和输出(反射)的光。