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    • 24. 发明授权
    • Mechanical quantity sensor element
    • 机械量传感器元件
    • US4784003A
    • 1988-11-15
    • US1406
    • 1987-01-08
    • Naomasa KimuraMasayuki NishiguchiMinoru Noguchi
    • Naomasa KimuraMasayuki NishiguchiMinoru Noguchi
    • H01L41/12G01L1/12
    • H01L41/125Y10S73/02
    • A mechanical quantity sensor element making use of a stress-magneto effect of noncrystalline magnetic alloy. This mechanical quantity sensor element is manufactured by coupling a piece of noncrystalline magnetic alloy having positive magnetostriction with another material such as, for example, thermo-setting resin at a temperature exceeding an operating temperature range of the mechanical quantity sensor element, and then cooling them to the operating temperature range. Due to a difference in a coefficient of thermal expansion between the piece and the material, compression strain is preliminarily given to the noncrystalline magnetic alloy piece, and the mechanical quantity sensor element has an excellent linearity and a wide detectable range for mechanical quantities.
    • 利用非晶磁合金的应力 - 磁效应的机械量传感器元件。 该机械量传感器元件通过在超过机械量传感器元件的工作温度范围的温度下将具有正磁致伸缩的一片非晶磁性合金与另一种材料(例如热固性树脂)结合,然后冷却它们来制造 到工作温度范围。 由于片与材料之间的热膨胀系数不同,预先对非晶磁性合金片施加压缩应变,机械量传感器元件具有优异的线性度和机械量的广泛可检测范围。