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21. 发明授权

US08273507B2 Pellicle for lithography and a method for making the same 有权
标题翻译：光刻用薄膜及其制造方法
公开(公告)号：US08273507B2
公开(公告)日：2012-09-25
申请号：US12926481
申请日：2010-11-22
申请人： Yoshihiko Nagata
发明人： Yoshihiko Nagata
IPC分类号： G03F1/64 , G03F1/62 , A47G1/12
CPC分类号： G03F1/64 , Y10T83/0207
摘要： There is provided a pellicle in which the frame is chamfered along all of its horizontal edges (as viewed when the pellicle frame is laid flat), and in particular those edges of the frame where the membrane-bonding frame face meets the external side walls of the frame are chamfered to the extent of C:0.01 mm-C:0.12 mm; in relation to this chamfer, a method is also provided wherein, after attaching a preformed pellicle membrane to the membrane-bonding frame face, the excessive part of the preformed membrane which extends beyond outer edges of the frame face is cut off in a manner wherein a blade of a knife is caused to scour the chamfer over the membrane in a manner such that the knife blade is kept in such an angle that the blade gets in a face-to-face contact with the chamfer face or that the blade touches only that edge of the frame where the chamfer face meets the first frame face while the knife blade is moved along the chamfered edge of the frame.
摘要翻译：提供防护薄膜组件，其中框架沿着其所有水平边缘（当防护薄膜框架平放时观察）被倒角，并且特别是框架粘合框架面与框架的外侧壁相交的框架的边缘框架倒角至C：0.01 mm-C：0.12 mm; 关于该倒角，还提供了一种方法，其中在将预成型防护薄膜组件附接到膜粘合框架面之后，预先形成的膜的超过框架表面的外边缘的部分被切断，其中使刮刀刀片以这样的方式冲洗膜上的倒角，使得刀片保持如此角度，使得刀片与倒角面面对面接触或者刀片仅接触当刀片沿着框架的倒角边缘移动时，倒角面与第一框架面相交的框架边缘。

22. 发明授权

US07927763B2 Pellicle for photolithography and pellicle frame 有权
标题翻译：用于光刻和防护薄膜框架的防护薄膜
公开(公告)号：US07927763B2
公开(公告)日：2011-04-19
申请号：US11311413
申请日：2005-12-20
申请人： Yoshihiko Nagata
发明人： Yoshihiko Nagata
IPC分类号： G03F1/00
CPC分类号： C22C21/06 , C22C21/10 , G03F7/70983 , Y10T428/13 , Y10T428/24273
摘要： There is disclosed a pellicle 1 for photolithography comprising, a pellicle frame 2 for constituting a pellicle for photolithography, wherein the frame is made of an aluminum alloy whose surface is anodized, and each content of sulfate ion, nitrate ion, chlorine ion, and organic acid (total of oxalic acid, formic acid, and acetic acid) is 1.1 ppm or less in elution concentration after immersed in 100 ml of pure water at 25° C. for 168 hours, per 100 cm2 of a surface area of the frame, and a pellicle film 3 that is adhered to one end face of the frame. Thereby, there can be provided a pellicle that can effectively prevent haze from being generated on a mask substrate even in a photolithography process with a wavelength being shorter.
摘要翻译：公开了一种用于光刻的防护薄膜1，其包括用于构成光刻用防护薄膜组件的防护薄膜组件框架2，其中所述框架由表面阳极氧化的铝合金制成，并且硫酸根离子，硝酸根离子，氯离子和有机物的含量酸（总计草酸，甲酸和乙酸）在浸入100毫升纯水中的溶液浓度为1.1ppm或更少，在25℃静置168小时，每100cm 2的框架表面积，以及附着在框架的一个端面上的防护薄膜3。由此，即使在波长短的光刻工序中也能够提供能够有效地防止在掩模基板上产生雾度的防护薄膜组件。

23. 发明申请

US20080087097A1 Strain Measuring Device And Fixing Method Of Strain Measuring 审中-公开
标题翻译：应变测量装置和应变测量固定方法
公开(公告)号：US20080087097A1
公开(公告)日：2008-04-17
申请号：US11795121
申请日：2006-02-07
申请人： Yoshihiko Nagata , Akihisa Kobayashi
发明人： Yoshihiko Nagata , Akihisa Kobayashi
IPC分类号： F16B31/02
CPC分类号： G01L1/2287 , G01B7/18
摘要： In a tie bar strain measuring device, even if an elongation is generated in a belt for attachment, a strain gauge can be pressed against a tie bar continuously with a sufficient pressing force by absorbing the elongation. The strain gauge is fixed to a strain gauge fixing member, and a belt-like member is wound around an outer circumference of the tie bar so as to retain the strain gauge fixing member while pressing against an outer circumferential surface of the tie bar. The belt-like member is clamped by a clamping device. A clamping force is generated by a resilient restoration force of a conical plate spring provided in the clamping device.
摘要翻译：在连杆应变测量装置中，即使在用于附接的带中产生伸长率，应变计可以通过吸收伸长率以足够的压力连续地压靠在连杆上。应变片被固定在应变计固定部件上，带状部件卷绕在连接杆的外周上，以便在紧固连杆的外周面的同时保持应变片固定部件。带状部件由夹紧装置夹紧。通过设置在夹紧装置中的锥形板簧的弹性恢复力产生夹紧力。

24. 发明授权

US08590281B2 Method for hermetically closing an air-tight bag for pellicle 有权
标题翻译：用于密封防护薄膜的气密袋的方法
公开(公告)号：US08590281B2
公开(公告)日：2013-11-26
申请号：US13067165
申请日：2011-05-13
申请人： Yoshihiko Nagata
发明人： Yoshihiko Nagata
IPC分类号： B65D33/24 , B65B3/04
CPC分类号： G03F1/66 , B65B7/08 , B65D27/14 , B65D33/18
摘要： There is provided a method for air-tightly enclosing a pellicle case in a filmy bag which protects the pellicle case against dust without the use of a plurality of bags or without modifying the filmy bag except for folding it like origami and eventually consolidating with an adhesive material: in short the opening of the bag is folded a number of times compactly.
摘要翻译：提供了一种用于将薄膜盒气密地包围在薄膜袋中的方法，其在不使用多个袋子的情况下保护防尘薄膜组件壳体免受灰尘的影响，或者不改变薄膜袋，除了将其折叠成折纸，并最终用粘合剂固结材质：简而言之，袋子的开口紧紧地折叠多次。

25. 发明申请

US20060229159A1 Balance training device 审中-公开
标题翻译：平衡训练装置
公开(公告)号：US20060229159A1
公开(公告)日：2006-10-12
申请号：US10525919
申请日：2003-08-27
申请人： Yoshihiko Nagata , Osamu Fukuda
发明人： Yoshihiko Nagata , Osamu Fukuda
IPC分类号： A63B15/02 , A63B21/00
CPC分类号： A63B26/003 , A63B22/16
摘要： The present invention realizes a balance training device usable for training a capability of balancing with a user carried thereon in a standing posture or a sitting posture without the need for any complicated linkage mechanism, said device comprising: a plate (1) for carrying a user; a motor (2) for driving said plate; a sensor (3) for measuring a rotation angle of said plate; a torque measuring mechanism (including a pair of force plates 41) for measuring a torque applied to said plate; a kinetic model analyzer (5) for determining a target rotation angle for said plate (1) from said measured torque; and a motor controller (6) for controlling said motor in accordance with a predetermined kinetic model.
摘要翻译：本发明实现了一种平衡训练装置，其可用于训练与站立姿势或坐姿下携带的用户平衡的能力，而不需要任何复杂的连动机构，所述装置包括：用于携带用户的板（1） ; 用于驱动所述板的马达（2）; 用于测量所述板的旋转角度的传感器（3）; 用于测量施加到所述板的扭矩的扭矩测量机构（包括一对力板41）用于根据所述测量的扭矩确定所述板（1）的目标旋转角度的动力学模型分析器（5）以及用于根据预定动力学模型控制所述马达的马达控制器（6）。

26. 发明授权

US06396579B1 Method, apparatus, and system for inspecting transparent objects 失效
标题翻译：用于检查透明物体的方法，装置和系统
公开(公告)号：US06396579B1
公开(公告)日：2002-05-28
申请号：US09036967
申请日：1998-03-09
申请人： Mitsuru Hayamizu , Yoshihiko Nagata
发明人： Mitsuru Hayamizu , Yoshihiko Nagata
IPC分类号： G01N2100
CPC分类号： G01N21/958
摘要： In an inspection method for a transparent object, a transparent object is irradiated with light from a light source, and the surface or interior of the transparent object is inspected by observing transmitted light on the side of the transparent object that is opposite to the light source. An inspection apparatus for a transparent object includes a transparent-object-moving unit, an irradiation unit, and a detection unit. The transparent-object-moving unit moves a transparent object to an inspection position and fixes the transparent object in the inspection position. The irradiation unit emits light from a light source disposed on one side of the transparent object so as to irradiate light onto the transparent object fixed in the inspection position by the transparent-object-moving unit. The detection unit is located on the side of the transparent object opposite the light source and has a detector for detecting light that has been emitted from the light source and has passed through the transparent object. The inspection method and the inspection apparatus realize improved inspection accuracy and inspection efficiency.
摘要翻译：在透明物体的检查方法中，用来自光源的光照射透明物体，通过观察与光源相反的透明物体一侧的透射光来检查透明物体的表面或内部。用于透明物体的检查装置包括透明物体移动单元，照射单元和检测单元。透明物体移动单元将透明物体移动到检查位置，并将透明物体固定在检查位置。照射单元从设置在透明物体的一侧的光源发射光，以便通过透明物体移动单元将光照射到固定在检查位置的透明物体上。检测单元位于与光源相对的透明物体的一侧，并且具有用于检测从光源发射并已经透过透明物体的光的检测器。检验方法和检验设备提高了检测精度和检验效率。

27. 发明申请

US20110280503A1 Method for hermetically closing an air-tight bag for pellicle 有权
标题翻译：用于密封防护薄膜的气密袋的方法
公开(公告)号：US20110280503A1
公开(公告)日：2011-11-17
申请号：US13067165
申请日：2011-05-13
申请人： Yoshihiko Nagata
发明人： Yoshihiko Nagata
IPC分类号： B65D33/24 , B65B3/04
CPC分类号： G03F1/66 , B65B7/08 , B65D27/14 , B65D33/18
摘要： There is provided a method for air-tightly enclosing a pellicle case in a filmy bag which protects the pellicle case against dust without the use of a plurality of bags or without modifying the filmy bag except for folding it like origami and eventually consolidating with an adhesive material: in short the opening of the bag is folded a number of times compactly.
摘要翻译：提供了一种用于将薄膜盒气密地包围在薄膜袋中的方法，其在不使用多个袋子的情况下保护防尘薄膜组件壳体免受灰尘的影响，或者不改变薄膜袋，除了将其折叠成折纸，并最终用粘合剂固结材质：简而言之，袋子的开口紧紧地折叠多次。

28. 发明授权

US5540577A Injection molding machine capable of reducing the work required to an operator 失效
标题翻译：注塑机能够减少操作人员所需的工作量
公开(公告)号：US5540577A
公开(公告)日：1996-07-30
申请号：US312965
申请日：1994-09-30
申请人： Atsushi Ishikawa , Yoshiyuki Imatomi , Kazuo Hiraoka , Yoshihiko Nagata , Hitoshi Hara
发明人： Atsushi Ishikawa , Yoshiyuki Imatomi , Kazuo Hiraoka , Yoshihiko Nagata , Hitoshi Hara
IPC分类号： B29C45/56 , B29C45/76 , B29C45/80
CPC分类号： B29C45/762 , B29C45/7653 , B29C45/80 , B29C2045/562 , B29C45/561
摘要： In an injection molding machine which comprises a mold composed of a fixed mold attached to a fixed platen and a movable mold attached to a movable platen, and a driving source for driving the movable platen to open and close the mold, a distance sensor detects, as a platen interval, a distance between two positions preliminarily selected on the fixed platen and the movable platen and produces a distance detection signal. A pressure sensor detects a clamping pressure applied by the driving source and produces a pressure detection signal. A control unit controls the driving source to adjust the platen interval and the clamping pressure through a plurality of steps in response to the distance detection signal and the pressure detection signal.
摘要翻译：在包括由附接到固定台板的固定模具和附接到可动压板的可移动模具构成的模具的注塑机中，以及用于驱动可动压板以打开和关闭模具的驱动源，作为压板间隔，在固定压板上预先选择的两个位置与可动压板之间的距离，并产生距离检测信号。压力传感器检测由驱动源施加的夹紧压力并产生压力检测信号。控制单元响应于距离检测信号和压力检测信号，通过多个步骤来控制驱动源来调节压板间隔和夹紧压力。

29. 发明授权

US5070733A Photoacoustic imaging method 失效
标题翻译：光声成像方法
公开(公告)号：US5070733A
公开(公告)日：1991-12-10
申请号：US409313
申请日：1989-09-19
申请人： Yoshihiko Nagata , Toshio Koda
发明人： Yoshihiko Nagata , Toshio Koda
IPC分类号： G01N29/00 , G01N21/00 , G01N29/06 , G01N29/22 , G01N29/24 , G01N29/34 , G01N29/46 , G01S5/24 , G03B42/06
CPC分类号： G01N29/346 , G01N29/0609 , G01N29/221 , G01N29/2418 , G01N29/46 , G01N2291/012 , G01N2291/015 , G01N2291/02854 , G01N2291/104
摘要： A photoacoustic imaging method comprises the steps of using modulated light of two different modulation frequencies to illuminate an object to be observed, so that an image of only a region of a specified depth within the object is obtained based on the difference between two photoacoustic signals separately detected by an acoustic sensor.
摘要翻译：光声成像方法包括以下步骤：使用两种不同调制频率的调制光来照亮要观察的物体，从而基于两个光声信号之间的差异仅获得对象内指定深度的区域的图像由声学传感器检测。

30. 发明申请

US20100190097A1 Pellicle for photolithography 有权
标题翻译：光刻薄膜
公开(公告)号：US20100190097A1
公开(公告)日：2010-07-29
申请号：US12656207
申请日：2010-01-21
申请人： Yoshihiko Nagata
发明人： Yoshihiko Nagata
IPC分类号： G03F1/00
CPC分类号： G03F1/64
摘要： There is provided a pellicle for photolithography having a plurality of air vents formed in a pellicle frame for photolithography and having the air vents covered with a dustproof filter in which the air vents in the frame are counterbored and a counterbored wall surface of the air vents is tapered.
摘要翻译：提供了一种用于光刻的防护薄膜组件，其具有形成在用于光刻的防护薄膜组件框架中的多个通风口，并且具有覆盖有框架中的通风口的通风孔被防尘过滤器覆盖，并且通风口的反射壁表面为锥。

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