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    • 29. 发明授权
    • Assembly and adjusting method of optical system, exposure apparatus having the optical system
    • 光学系统的装配和调整方法,具有光学系统的曝光装置
    • US07280184B2
    • 2007-10-09
    • US11123975
    • 2005-05-06
    • Takayuki HasegawaAkira Miyake
    • Takayuki HasegawaAkira Miyake
    • G03B27/42G03B27/32
    • G03F7/706G03F7/70258
    • An adjusting method of an optical system composed plural optical elements each having a multilayer film, said adjusting method that includes a first measuring step that obtains, for each optical element, a difference between a phase distribution of which an EUV light (Extreme Ultraviolet light) is reflected from the optical element and a phase distribution of which a light with a wavelength that is longer than the EUV light is reflected from the optical element, a second measuring step that measures a phase distribution of which the light passes the optical system, a deciding step that decides a phase distribution of which the EUV light passes through the optical system based on the phase distribution difference obtained by the first measuring step and the phase distribution measured by the second measuring step, and an adjusting step that adjusts at least one of a position and a posture of the optical element based on the phase distribution decided by the deciding step.
    • 一种由多个光学元件组成的光学系统的调整方法,所述多个光学元件具有多层膜,所述调整方法包括对于每个光学元件获得EUV光(极紫外光)的相位分布之间的差异的第一测量步骤, 从所述光学元件反射并且从所述光学元件反射具有比所述EUV光更长的波长的光的相位分布,测量所述光通过所述光学系统的相位分布的第二测量步骤, 决定步骤,其基于由所述第一测量步骤获得的相位分布差和由所述第二测量步骤测量的相位分布,决定所述EUV光通过所述光学系统的相位分布;以及调整步骤, 基于由判定步骤决定的相位分布的光学元件的位置和姿势。