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    • 27. 发明授权
    • Method for producing multilayered ceramic substrate
    • 多层陶瓷基板的制造方法
    • US5370759A
    • 1994-12-06
    • US60981
    • 1993-05-14
    • Yasuhiko HakotaniSeiichi NakataniTsuneharu KatadaSatoru YuhakuKazuhiro MiuraYoshifumi Nakamura
    • Yasuhiko HakotaniSeiichi NakataniTsuneharu KatadaSatoru YuhakuKazuhiro MiuraYoshifumi Nakamura
    • H01L21/48H01L23/498B32B31/16B32B18/00
    • H01L23/49822H01L21/4857H01L23/49883H01L2924/0002H01L2924/09701H01L2924/3011
    • A method for producing a multilayered ceramic substrate including the steps of:forming at least two green sheets each including a low-temperature firing glass-ceramic substrate material,forming an electrode pattern and a via hole electrode on and through each green sheet with a conductor paste,laminating said green sheets to obtain a laminate,forming a pair of green sheets which include an inorganic material which is not sintered at a firing temperature of the green sheet of the low-temperature firing glass-ceramic substrate material or lower, and then forming a hole through the inorganic material green sheet,laminating the inorganic material green sheet on the outermost green sheet of the laminate to obtain a resultant laminate in which the hole is positioned over a portion of the electrode pattern of an outermost low-temperature firing glass-ceramic green sheets of the laminate,firing said resultant laminate at the firing temperature, andremoving the unsintered inorganic material. The substrate does not shrink in its plane direction and surface smoothness, electrical resistance and solderability of the top layer wiring pattern are improved.
    • 一种多层陶瓷基板的制造方法,其特征在于,包括以下步骤:在导体上形成至少两个生坯片,每个生片包括低温焙烧玻璃陶瓷基板材料,在每个生片上形成电极图案和通孔电极, 糊状,层压所述生片以获得层压体,形成一对生片,其包括在低温焙烧玻璃 - 陶瓷基片材料的生片的烧成温度以下未烧结的无机材料,然后 通过无机材料生片形成孔,将无机材料生片层叠在层压体的最外层生片上,得到所得到的层叠体,其中孔位于最外层低温烧成玻璃的电极图案的一部分上 - 陶瓷生片,在烧成温度下焙烧所得到的层压体,除去未烧结的无机物 ial 基板在其平面方向上不收缩,并且提高了顶层布线图案的表面平滑度,电阻和可焊性。