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21. 发明授权

US6150628A Toroidal low-field reactive gas source 失效
标题翻译：环形低场反应气源
公开(公告)号：US6150628A
公开(公告)日：2000-11-21
申请号：US883281
申请日：1997-06-26
申请人： Donald K. Smith , Xing Chen , William M. Holber , Eric Georgelis
发明人： Donald K. Smith , Xing Chen , William M. Holber , Eric Georgelis
IPC分类号： H05H1/46 , H01J27/16 , H01J37/32 , H01L21/205 , H01L21/302 , H01L21/3065 , B23K10/00
CPC分类号： H01J37/32009 , H01J27/16 , H01J37/321 , H01J37/32357 , H01J37/32862
摘要： An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primarily winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.
摘要翻译：用于解离气体的装置包括可以由金属材料形成的等离子体室和具有围绕等离子体室的一部分并具有主要绕组的磁芯的变压器。该装置还包括直接耦合到电压源并且具有耦合到变压器的初级绕组的输出的一个或多个开关半导体器件。一个或多个开关半导体器件驱动初级绕组中的电流，其引起室内的电位，其形成等离子体，其完成变压器的次级电路。

22. 发明授权

US5910842A Focused beam spectroscopic ellipsometry method and system 失效
标题翻译：聚焦光束椭偏仪的方法和系统
公开(公告)号：US5910842A
公开(公告)日：1999-06-08
申请号：US753696
申请日：1996-11-27
申请人： Timothy R. Piwonka-Corle , Xing Chen , Lloyd J. Lacomb, Jr. , Jean-Louis Stehle , Dorian Zahorski
发明人： Timothy R. Piwonka-Corle , Xing Chen , Lloyd J. Lacomb, Jr. , Jean-Louis Stehle , Dorian Zahorski
IPC分类号： G01N21/21
CPC分类号： G01N21/211 , G01N2021/213
摘要： A method and system for spectroscopic ellipsometry employing reflective optics to measure a small region of a sample by reflecting radiation (preferably broadband UV, visible, and near infrared radiation) from the region. The system preferably has an autofocus assembly and a processor programmed to determine from the measurements the thickness and/or complex refractive index of a thin film on the sample. Preferably, only reflective optics are employed along the optical path between the polarizer and analyzer, a sample beam reflects with low incidence angle from each component of the reflective optics, the beam is reflectively focused to a small, compact spot on the sample at a range of high incidence angles, and an incidence angle selection element is provided for selecting for measurement only radiation reflected from the sample at a single, selected angle (or narrow range of angles). The focusing mirror preferably has an elliptical shape to reduce off-axis aberrations in the focused beam. Some embodiments include both a spectrophotometer and an ellipsometer integrated together as a single instrument. In such instrument, the spectrophotometer and ellipsometer share a radiation source, and radiation from the source can be focused by either the spectrophotometer or the ellipsometer to the same focal point on a sample. Preferred embodiments of the ellipsometer employ a rotating, minimal-length Rochon prism as a polarizer, and include a spectrometer with an intensified photodiode array to measure reflected radiation from the sample, and a reference channel (in addition to a sample channel which detects radiation reflected from the sample).
摘要翻译：使用反射光学器件的光谱椭偏仪的方法和系统通过从该区域反射辐射（优选宽带UV，可见光和近红外辐射）来测量样品的小区域。该系统优选地具有自动对焦组件和被编程用于根据测量结果确定样品上薄膜的厚度和/或复合折射率的处理器。优选地，沿着偏振器和分析器之间的光路仅采用反射光学元件，样品光束以反射光学器件的每个分量以低入射角反射，光束被反射聚焦到样品上的小的紧密斑点并且提供入射角选择元件用于仅选择仅以单个选定角度（或窄范围的角度）从样品反射的辐射。聚焦镜优选具有椭圆形以减少聚焦光束中的离轴像差。一些实施例包括作为单个仪器集成在一起的分光光度计和椭偏仪。在这种仪器中，分光光度计和椭偏仪共享一个辐射源，来自源的辐射可以通过分光光度计或椭偏仪聚焦到样品上的同一焦点。椭偏仪的优选实施例采用旋转的，最小长度的Rochon棱镜作为偏振器，并且包括具有增强的光电二极管阵列的光谱仪，以测量来自样品的反射辐射，以及参考通道（除了检测辐射的样品通道从样品）。

23. 发明授权

US10662552B1 Field controlled direct-write electrospinning 有权
公开(公告)号：US10662552B1
公开(公告)日：2020-05-26
申请号：US15240168
申请日：2016-08-18
申请人： Xing Chen
发明人： Xing Chen
IPC分类号： D01D5/00 , B33Y10/00 , B33Y30/00
摘要： The invention provides a method for producing fibers, the method having the steps of producing electrospun fiber; and directing the fiber to a plurality of targets, whereby only one of the targets is grounded at any one time. Also provided is a system for producing anisotropic fibers having a reservoir of electrospun fiber constituent' wherein an egress point of the reservoir is electrically charged; a plurality of electrodes opposed to the egress point, wherein only one of the electrodes is grounded at any one time while the remaining electrodes are at an initial floating voltage state; and a target substrate disposed between the egress point and the plurality of electrodes.

24. 发明授权

US09620839B2 Magnetic nanofiber composite materials and devices using same 有权
公开(公告)号：US09620839B2
公开(公告)日：2017-04-11
申请号：US15082901
申请日：2016-03-28
申请人： Xing Chen , Ziyao Zhou
发明人： Xing Chen , Ziyao Zhou
IPC分类号： H01P1/387
CPC分类号： H01P1/387 , B82Y30/00
摘要： A nonreciprocal device is described. It includes a housing, a waveguide layer and at least one layer of magnetic nanofiber composite. The magnetic nanofiber composite layer is made up of a polymer base layer, a dielectric matrix comprising magnetic nanofibers. The nanofibers have a high aspect ratio and wherein said dielectric matrix is embedded in the polymer base layer.

25. 发明授权

US09302912B2 Compact, configurable power supply for energizing ozone-producing cells 有权
标题翻译：紧凑的可配置电源，用于激发臭氧发生电池
公开(公告)号：US09302912B2
公开(公告)日：2016-04-05
申请号：US13432415
申请日：2012-03-28
申请人： Ken Tran , Feng Tian , Xing Chen , Franklin Lee
发明人： Ken Tran , Feng Tian , Xing Chen , Franklin Lee
IPC分类号： H05B37/00 , C01B13/11
CPC分类号： H01J37/248 , C01B13/115 , C01B2201/90
摘要： Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high-voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.
摘要翻译：使用本文所述的系统和技术可以实现向产生臭氧的电池供应高频电力的改进。以明显大于负载频率的开关频率工作的DC-DC转换器的应用支持产生用于为这样的单元供电的高压AC，同时允许减小组件尺寸并降低负载调整电路的品质因数。可以使用反馈技术来控制用于获得开关和负载频率中的一个或多个的可控功率逆变器，以在一个或多个外部供电和负载条件的变化下向产生臭氧的电池提供稳定的高质量功率。还可以提供浪涌保护电路以选择性地引入限流电阻，直到输入DC总线已被充分初始化为由从DC总线获得的测量结果所确定。限流电阻可以是正温系数热敏电阻。

26. 发明授权

US08779322B2 Method and apparatus for processing metal bearing gases 失效
标题翻译：处理金属轴承气体的方法和装置
公开(公告)号：US08779322B2
公开(公告)日：2014-07-15
申请号：US13336616
申请日：2011-12-23
申请人： William M. Holber , John A. Smith , Xing Chen , Donald K. Smith
发明人： William M. Holber , John A. Smith , Xing Chen , Donald K. Smith
IPC分类号： B23K10/00 , H01H1/34
CPC分类号： H01J37/32174 , H01J37/321
摘要： A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the metal bearing gas produces at least one of a metallic material, a metal oxide material or a metal nitride material.
摘要翻译：用于处理金属轴承气体的方法和装置涉及在等离子体室中产生环形等离子体。将金属轴承气体引入到等离子体室中以与环形等离子体反应。环形等离子体和金属承载气体之间的相互作用产生金属材料，金属氧化物材料或金属氮化物材料中的至少一种。

27. 发明授权

US08749939B2 Method and system for shoot-through protection 有权
标题翻译：射击保护的方法和系统
公开(公告)号：US08749939B2
公开(公告)日：2014-06-10
申请号：US13106920
申请日：2011-05-13
申请人： Ken Tran , Feng Tian , Xing Chen
发明人： Ken Tran , Feng Tian , Xing Chen
IPC分类号： H02H3/08 , H02M1/38 , H03K17/082 , H02M3/337
CPC分类号： H03K17/0822 , H02M1/38 , H02M3/337 , H03K2217/0036
摘要： A switching apparatus includes a first transistor, a second transistor, a first circuit module, a first current sensor and a control circuit. The first transistor includes first, second and third terminals. The first terminal of the first transistor is coupled to a first power terminal. The third terminal of the first transistor includes a gate or base of the first transistor. The second transistor includes first, second and third terminals. The first terminal of the second transistor is coupled to a second power terminal. The second terminal of the second transistor is coupled to the second terminal of the first transistor. The third terminal of the second transistor includes a gate or base of the second transistor. The first circuit module includes an inductor in parallel with a diode. The first circuit module is connected between the first terminal of the second transistor and the second power terminal.
摘要翻译：开关装置包括第一晶体管，第二晶体管，第一电路模块，第一电流传感器和控制电路。第一晶体管包括第一，第二和第三端子。第一晶体管的第一端子耦合到第一电源端子。第一晶体管的第三端子包括第一晶体管的栅极或基极。第二晶体管包括第一，第二和第三端子。第二晶体管的第一端耦合到第二电源端子。第二晶体管的第二端子耦合到第一晶体管的第二端子。第二晶体管的第三端子包括第二晶体管的栅极或基极。第一电路模块包括与二极管并联的电感器。第一电路模块连接在第二晶体管的第一端和第二电源端之间。

28. 发明申请

US20140062285A1 Method and Apparatus for a Large Area Inductive Plasma Source 审中-公开
标题翻译：大面积感应等离子体源的方法和装置
公开(公告)号：US20140062285A1
公开(公告)日：2014-03-06
申请号：US13598148
申请日：2012-08-29
申请人： Xing Chen
发明人： Xing Chen
IPC分类号： H05H7/04 , H05H1/24
CPC分类号： H05H7/04 , H01J37/321 , H01J37/3266 , H01J37/32669 , H05H1/24
摘要： A plasma source for providing dissociated gas to semiconductor process chamber is provided. The plasma chamber can have at least one gas inlet and at least one chamber wall for containing the gas, a plurality of magnetic cores disposed relative to the plasma chamber such that the plasma chamber passes through each of the plurality of magnetic cores. A primary winding can be coupled to the plurality of magnetic cores. The plasma chamber can generate a toroidal plasma along a plane extending through the plasma chamber and which is at least substantially parallel to a top surface of a sample holder disposed within the semiconductor process chamber.
摘要翻译：提供了一种用于向半导体处理室提供离解气体的等离子体源。等离子体室可以具有至少一个气体入口和至少一个用于容纳气体的室壁，相对于等离子体室设置的多个磁芯，使得等离子体室通过多个磁芯中的每一个。初级绕组可耦合到多个磁芯。等离子体室可以沿着延伸穿过等离子体室的平面产生环形等离子体，并且其至少基本上平行于设置在半导体处理室内的样品保持器的顶表面。

29. 发明申请

US20130257301A1 COMPACT, CONFIGURABLE POWER SUPPLY FOR ENERGIZING OZONE-PRODUCING CELLS 有权
标题翻译：紧凑的可配置电源，用于加强生产臭氧的电池
公开(公告)号：US20130257301A1
公开(公告)日：2013-10-03
申请号：US13432415
申请日：2012-03-28
申请人： Ken Tran , Feng Tian , Xing Chen , Franklin Lee
发明人： Ken Tran , Feng Tian , Xing Chen , Franklin Lee
IPC分类号： H01J37/248
CPC分类号： H01J37/248 , C01B13/115 , C01B2201/90
摘要： Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high-voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.
摘要翻译：使用本文所述的系统和技术可以实现向产生臭氧的电池供应高频电力的改进。以大于负载频率的开关频率工作的DC-DC转换器的应用支持产生用于为这样的单元供电的高压AC，同时允许减小组件尺寸并降低负载调整电路的品质因数。可以使用反馈技术来控制用于获得开关和负载频率中的一个或多个的可控功率逆变器，以在一个或多个外部供电和负载条件的变化下向产生臭氧的电池提供稳定的高质量功率。还可以提供浪涌保护电路以选择性地引入限流电阻，直到输入DC总线已被充分初始化为由从DC总线获得的测量结果所确定。限流电阻可以是正温系数热敏电阻。

30. 发明授权

US08533327B2 System and method of providing services via a peer-to-peer-based next generation network 有权
标题翻译：通过基于对等的下一代网络提供服务的系统和方法
公开(公告)号：US08533327B2
公开(公告)日：2013-09-10
申请号：US12062404
申请日：2008-04-03
申请人： Li Mo , Weijun Lee , Larry Shaoyan Ma , Xing Chen
发明人： Li Mo , Weijun Lee , Larry Shaoyan Ma , Xing Chen
IPC分类号： G06F15/16 , G06F15/173
CPC分类号： H04L67/104 , H04L63/102 , H04L67/1093 , H04L67/14 , H04L67/306
摘要： A peer-to-peer network comprises a plurality of intelligent terminal nodes, each intelligent terminal node being operable to establish, maintain, and tear-down communication sessions with another intelligent terminal node, a plurality of network service nodes coupled to the plurality of intelligent terminal nodes, the plurality of network service nodes comprise at least one of the plurality of intelligent terminal nodes, at least one user P2P function module operable to store, locate and distribute service resource information related to user policies, and at least one network P2P function module operable to store, locate and distribute service resource information related to operator provider policies, and operable to exert stricter security control than the at least one user P2P function module.
摘要翻译：对等网络包括多个智能终端节点，每个智能终端节点可操作以建立，维护和拆除与另一智能终端节点的通信会话，耦合到多个智能终端节点的多个网络服务节点所述多个网络服务节点包括所述多个智能终端节点中的至少一个，至少一个用户P2P功能模块，其可操作以存储，定位和分发与用户策略相关的服务资源信息，以及至少一个网络P2P功能模块，其可操作以存储，定位和分发与运营商提供商策略相关的服务资源信息，并且可操作以施加比所述至少一个用户P2P功能模块更严格的安全控制。

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