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21. 发明授权

US06803402B2 Elastomer molded article and crosslinkable fluorine-containing elastomer composition for semi-conductor production apparatuses 有权
标题翻译：用于半导体生产设备的弹性体模制品和可交联的含氟弹性体组合物
公开(公告)号：US06803402B2
公开(公告)日：2004-10-12
申请号：US09959516
申请日：2001-10-29
申请人： Katsuhiko Higashino , Masanori Hasegawa , Hiroyuki Tanaka , Tsuyoshi Noguchi
发明人： Katsuhiko Higashino , Masanori Hasegawa , Hiroyuki Tanaka , Tsuyoshi Noguchi
IPC分类号： C08K318
CPC分类号： C08K3/22 , C08K2003/2227 , C08L27/12
摘要： Elastomer molded article for semiconductor production apparatuses which is obtained by crosslinking and molding a crosslinkable fluorine-containing elastomer composition comprising a crosslinkable fluorine-containing elastomer component and fine particles of aluminum oxide having an average particle size of not more than 0.5 &mgr;m. The elastomer molded article is excellent in plasma resistance and an amount of micro particles generated after irradiation of plasma is very small and therefore a very clean molded article for semiconductor production apparatuses, particularly a sealing material to be used in an environment of plasma irradiation is provided.
摘要翻译：用于半导体制造装置的弹性体成型体，其通过交联和成型包含交联性含氟弹性体组分的交联性含氟弹性体组合物和平均粒径不大于0.5μm的氧化铝微粒而获得。弹性体成形体的耐等离子体性优异，等离子体照射后产生的微粒子量非常小，因此提供了用于半导体制造装置的非常干净的成型体，特别是在等离子体照射的环境中使用的密封材料。

22. 发明授权

US06635717B1 Molding material 有权
标题翻译：成型材料
公开(公告)号：US06635717B1
公开(公告)日：2003-10-21
申请号：US09530515
申请日：2000-07-05
申请人： Mitsuru Kishine , Masanori Kitaichi , Tsuyoshi Noguchi , Yoshito Tanaka , Takayuki Araki , Sadashige Irie
发明人： Mitsuru Kishine , Masanori Kitaichi , Tsuyoshi Noguchi , Yoshito Tanaka , Takayuki Araki , Sadashige Irie
IPC分类号： C08F25900
CPC分类号： C08F293/00 , C09K3/1009
摘要： According to the present invention, it is possible to provide a molding material, for example, a sealing material for semiconductor-related production apparatuses which comprises a fluorine-containing multi-segment polymer being excellent in mechanical properties (particularly at high temperature), abrasion resistance and transparency and ensuring reduced contamination and reduced gas permeation while maintaining inherent characteristics of a fluorine-containing elastomer such as flexibility, elasticity, sealing property, chemical resistance and heat resistance. A molding material comprising a fluorine-containing multi-segment polymer having an elastomeric fluorine-containing polymer chain segment and a non-elastomeric fluorine-containing polymer chain segment, in which the elastomeric fluorine-containing polymer chain segment imparts flexibility to the whole polymer and has perhaloolefin units as a recurring unit in an amount of not less than 95% by mole.
摘要翻译：根据本发明，可以提供一种成型材料，例如，用于半导体相关生产设备的密封材料，其包括机械性能（特别是在高温下）具有优异的含氟多段聚合物，耐磨性电阻和透明度，并且确保减少污染和降低气体渗透，同时保持含氟弹性体的固有特性，例如柔性，弹性，密封性，耐化学性和耐热性。一种包含具有弹性体含氟聚合物链段和非弹性含氟聚合物链段的含氟多段聚合物的模塑材料，其中弹性体含氟聚合物链段赋予整个聚合物柔性，具有不低于95摩尔％的重复单元的全卤代烯烃单元。

23. 发明授权

US06576311B2 Rubber/rubber laminates 失效
标题翻译：橡胶/橡胶层压板
公开(公告)号：US06576311B2
公开(公告)日：2003-06-10
申请号：US09367502
申请日：1999-08-17
申请人： Tsuyoshi Noguchi , Kazuhisa Matsumoto , Tsuyoshi Ono , Mitsuru Kishine
发明人： Tsuyoshi Noguchi , Kazuhisa Matsumoto , Tsuyoshi Ono , Mitsuru Kishine
IPC分类号： B32B2512
CPC分类号： B32B25/042 , B32B25/14 , B32B25/16 , B32B2581/00 , B32B2597/00 , C08J5/12 , C08J2321/00 , C08L9/02 , C08L9/06 , C08L11/00 , C08L23/16 , C08L25/10 , C08L25/18 , C08L27/12 , C08L27/16 , C08L33/06 , C08L2205/02 , Y10T428/1386 , Y10T428/139 , Y10T428/1393 , Y10T428/3154 , Y10T428/31544 , C08L2666/04
摘要： A rubber laminate in which a rubber layer (1) containing the following rubber composition (A) is adhered by vulcanization to a rubber layer (2) containing another rubber composition (B). Rubber composition (A): Composition comprising 100 parts by weight of a mixture and 0.1 to 15 parts by weight of a peroxide crosslinking agent admixed therewith, the mixture comprising 5 to 95 wt. % of a peroxide-crosslinkable fluororubber containing vinylidene fluoride copolymerized therein in a proportion of 45 to 88 mole % and having a number average molecular weight of 20,000 to 200,000, and 95 to 5 wt. % of an acrylic rubber containing 0.1 to 1.5 wt. % of a polyfunctional monomer copolymerized therein and having a functional group rendering the acrylic rubber peroxide-cocrosslinkable with the fluororubber and a functional group effecting the copolymerization of the monomer with an acrylic ester.
摘要翻译：橡胶层压板，其中含有下列橡胶组合物（A）的橡胶层（1）通过硫化粘附到含有另一种橡胶组合物（B）的橡胶层（2）上。橡胶组合物（A）：包含100重量份的混合物和0.1至15重量份与其混合的过氧化物交联剂，所述混合物包含5至95重量％％的含有偏二氟乙烯的过氧化物交联性氟橡胶的比例为45〜88摩尔％，数均分子量为20,000〜200,000，95〜5重量％。％的丙烯酸橡胶含有0.1〜1.5重量％％的多官能单体共聚并具有官能团，使丙烯酸橡胶过氧化物与氟橡胶可共交化，并且官能团使单体与丙烯酸酯共聚。

24. 发明申请

US20100239867A1 SEALING MATERIAL, PARTS FOR PLASMA TREATING EQUIPMENT HAVING SAID SEALING MATERIAL, AND PROCESS FOR PREPARING SAID SEALING MATERIAL 审中-公开
标题翻译：密封材料，具有密封材料的等离子体处理设备的部件以及制备密封材料的方法
公开(公告)号：US20100239867A1
公开(公告)日：2010-09-23
申请号：US12305795
申请日：2007-06-22
申请人： Soushi Tsuchiya , Katsuhiko Higashino , Yasuhiro Sakamoto , Tsuyoshi Noguchi
发明人： Soushi Tsuchiya , Katsuhiko Higashino , Yasuhiro Sakamoto , Tsuyoshi Noguchi
IPC分类号： B32B27/06 , B05D1/18
CPC分类号： C09K3/1009 , Y10T428/31544
摘要： The present invention provides a sealing material having excellent plasma resistance, sealing property and non-sticking property, parts for plasma treating equipment having the sealing material, and a process for preparing the sealing material. The sealing material comprises a fluoroelastomer sealing material and a coating film formed by using an inorganic material on the surface of the fluoroelastomer sealing material, wherein a ratio of weight reduction of the sealing material after dipping it in perfluoro tri-n-butylamine at 60° C. for 70 hours and then taking it out and drying it at 90° C. for 5 hours, at 125° C. for 5 hours, and then at 200° C. for 10 hours, is not more than 0.4% by weight.
摘要翻译：本发明提供了具有优异的等离子体电阻，密封性和不粘附性的密封材料，具有密封材料的等离子体处理设备的部件和用于制备密封材料的方法。密封材料包括含氟弹性体密封材料和通过在含氟弹性体密封材料的表面上使用无机材料形成的涂膜，其中密封材料在全氟三正丁胺浸渍后的重量减少率为60° 然后取出并在90℃下干燥5小时，在125℃下干燥5小时，然后在200℃下干燥10小时，不超过0.4重量％。

25. 发明申请

US20060058448A1 Cross-linked elastomer composition and formed product composed of such cross-linked elastomer composition 审中-公开
标题翻译：交联弹性体组合物和由这种交联弹性体组合物形成的成型体
公开(公告)号：US20060058448A1
公开(公告)日：2006-03-16
申请号：US10541753
申请日：2004-01-07
申请人： Katsuhiko Higashino , Tsuyoshi Noguchi
发明人： Katsuhiko Higashino , Tsuyoshi Noguchi
IPC分类号： D06M15/277
CPC分类号： C09K3/10 , C08J7/123 , C08J2327/12 , C08K3/16 , C08L27/12 , C08L77/10 , C08L79/08 , C08L2666/20
摘要： There is provided a crosslinkable elastomer composition, which has small decrease in weight to all of high concentration F radical irradiation, O2 plasma treatment and fluorine plasma treatment which are conducted in a semiconductor manufacturing process and significant plasma resistance, and a molded article comprising the crosslinkable elastomer composition.
摘要翻译：提供了一种可交联的弹性体组合物，其在半导体制造过程中进行的所有高浓度F自由基照射，O 2等离子体处理和氟等离子体处理都具有小的重量减少和显着的等离子体电阻和包含可交联弹性体组合物的模塑制品。

26. 发明授权

US09068069B2 Perfluoroelastomer compositions and methods of preparing same 有权
标题翻译：全氟弹性体组合物及其制备方法
公开(公告)号：US09068069B2
公开(公告)日：2015-06-30
申请号：US12969463
申请日：2010-12-15
申请人： Tsuyoshi Noguchi , Jiazhong Luo , Tatsuya Morikawa , Hirokazu Komori , Takafumi Yamato , Meiten Koh
发明人： Tsuyoshi Noguchi , Jiazhong Luo , Tatsuya Morikawa , Hirokazu Komori , Takafumi Yamato , Meiten Koh
IPC分类号： C08L27/18 , C08K5/18
CPC分类号： C08L27/18 , C08K5/18 , C08L2205/02 , Y10T428/3154 , C08L2666/04
摘要： The present invention includes crosslinked perfluoroelastomeric compositions and molded articles formed from a cross-linkable perfluoroelastomeric composition having a first curable perfluoropolymer having a cure site monomer and a second perfluoropolymer having a cure site monomer. The molar ratio of the tetrafluoroethylene monomer to perfluoroalkylvinyl ether in one perfluoropolymer is about 0 to 100 to about 65 to 35 in the perfluoropolymer. The molar ratio of the tetrafluoroethylene monomer to the perfluoroalkylvinyl ether monomer in the second polymer is about 65:35 to about 95:5 in the second perfluoropolymer. The composition further includes a curative. One fluorine-containing elastomer composition herein, having a short crosslinking time, has perfluoroelastomers (A) having a tetrafluoroethylene unit, a perfluoralkylvinyl ether unit (a) and a monomer unit (b) having at least one kind selected from the group consisting of a nitrile group, a carboxyl group and an alkoxycarbonyl group, wherein the composition has two or more kinds of perfluoroelastomers (A) having differing contents of perfluoroalkylvinyl ether unit (a).
摘要翻译：本发明包括交联的全氟弹性体组合物和由可交联的全氟弹性体组合物形成的模塑制品，其具有具有固化部位单体的第一可固化全氟聚合物和具有固化部位单体的第二全氟聚合物。全氟聚合物中四氟乙烯单体与全氟烷基乙烯基醚的摩尔比在全氟聚合物中为约0至约100至约65至35。第二聚合物中四氟乙烯单体与全氟烷基乙烯基醚单体的摩尔比在第二全氟聚合物中为约65:35至约95:5。组合物还包括治疗剂。具有交联时间短的一种含氟弹性体组合物具有全氟弹性体（A），其具有四氟乙烯单元，全氟烷基乙烯基醚单元（a）和单体单元（b），所述单体单元具有选自以下的至少一种：腈基，羧基和烷氧基羰基，其中所述组合物具有两种或更多种具有不同全氟烷基乙烯基醚单元（a）含量的全氟弹性体（A）。

27. 发明申请

US20080287627A1 Perfluoroelastomer compositions and methods of preparing same 有权
标题翻译：全氟弹性体组合物及其制备方法
公开(公告)号：US20080287627A1
公开(公告)日：2008-11-20
申请号：US12148014
申请日：2008-04-16
申请人： Tsuyoshi Noguchi , Jiazhong Luo , Tatsuya Morikawa , Hirokazu Komori , Takafumi Yamato , Meiten Koh
发明人： Tsuyoshi Noguchi , Jiazhong Luo , Tatsuya Morikawa , Hirokazu Komori , Takafumi Yamato , Meiten Koh
IPC分类号： C08F16/24
CPC分类号： C08L27/18 , C08K5/18 , C08L2205/02 , Y10T428/3154 , C08L2666/04
摘要： The present invention includes crosslinked perfluoroelastomeric compositions and molded articles formed from a cross-linkable perfluoroelastomeric composition having a first curable perfluoropolymer having a cure site monomer and a second perfluoropolymer having a cure site monomer. The molar ratio of the tetrafluoroethylene monomer to perfluoroalkylvinyl ether in one perfluoropolymer is about 0 to 100 to about 65 to 35 in the perfluoropolymer. The molar ratio of the tetrafluoroethylene monomer to the perfluoroalkylvinyl ether monomer in the second polymer is about 65:35 to about 95:5 in the second perfluoropolymer. The composition further includes a curative. One fluorine-containing elastomer composition herein, having a short crosslinking time, has perfluoroelastomers (A) having a tetrafluoroethylene unit, a perfluoralkylvinyl ether unit (a) and a monomer unit (b) having at least one kind selected from the group consisting of a nitrile group, a carboxyl group and an alkoxycarbonyl group, wherein the composition has two or more kinds of perfluoroelastomers (A) having differing contents of perfluoroalkylvinyl ether unit (a).
摘要翻译：本发明包括交联的全氟弹性体组合物和由可交联的全氟弹性体组合物形成的模塑制品，其具有具有固化部位单体的第一可固化全氟聚合物和具有固化部位单体的第二全氟聚合物。全氟聚合物中四氟乙烯单体与全氟烷基乙烯基醚的摩尔比在全氟聚合物中为约0至约100至约65至35。第二聚合物中四氟乙烯单体与全氟烷基乙烯基醚单体的摩尔比在第二全氟聚合物中为约65:35至约95:5。组合物还包括治疗剂。具有交联时间短的一种含氟弹性体组合物具有全氟弹性体（A），其具有四氟乙烯单元，全氟烷基乙烯基醚单元（a）和单体单元（b），所述单体单元具有选自以下的至少一种：腈基，羧基和烷氧基羰基，其中所述组合物具有两种或更多种具有不同全氟烷基乙烯基醚单元（a）含量的全氟弹性体（A）。

28. 发明授权

US08367776B2 Perfluoroelastomer compositions and methods of preparing same 有权
公开(公告)号：US08367776B2
公开(公告)日：2013-02-05
申请号：US12148014
申请日：2008-04-16
申请人： Tsuyoshi Noguchi , Jiazhong Luo , Tatsuya Morikawa , Hirokazu Komori , Takafumi Yamato , Meiten Koh
发明人： Tsuyoshi Noguchi , Jiazhong Luo , Tatsuya Morikawa , Hirokazu Komori , Takafumi Yamato , Meiten Koh
IPC分类号： C08F214/26
CPC分类号： C08L27/18 , C08K5/18 , C08L2205/02 , Y10T428/3154 , C08L2666/04
摘要： The present invention includes crosslinked perfluoroelastomeric compositions and molded articles formed from a cross-linkable perfluoroelastomeric composition having a first curable perfluoropolymer having a cure site monomer and a second perfluoropolymer having a cure site monomer. The molar ratio of the tetrafluoroethylene monomer to perfluoroalkylvinyl ether in one perfluoropolymer is about 0 to 100 to about 65 to 35 in the perfluoropolymer. The molar ratio of the tetrafluoroethylene monomer to the perfluoroalkylvinyl ether monomer in the second polymer is about 65:35 to about 95:5 in the second perfluoropolymer. The composition further includes a curative. One fluorine-containing elastomer composition herein, having a short crosslinking time, has perfluoroelastomers (A) having a tetrafluoroethylene unit, a perfluoralkylvinyl ether unit (a) and a monomer unit (b) having at least one kind selected from the group consisting of a nitrile group, a carboxyl group and an alkoxycarbonyl group, wherein the composition has two or more kinds of perfluoroelastomers (A) having differing contents of perfluoroalkylvinyl ether unit (a).

29. 发明授权

US06855774B2 Crosslinkable elastomer composition 有权
标题翻译：可交联弹性体组合物
公开(公告)号：US06855774B2
公开(公告)日：2005-02-15
申请号：US10311803
申请日：2001-05-22
申请人： Kazuyoshi Kawasaki , Tsuyoshi Itagaki , Katsuhiko Iseki , Takafumi Yamato , Tsuyoshi Noguchi
发明人： Kazuyoshi Kawasaki , Tsuyoshi Itagaki , Katsuhiko Iseki , Takafumi Yamato , Tsuyoshi Noguchi
IPC分类号： C08J3/24 , C07C211/56 , C07C217/92 , C08F2/00 , C08J5/00 , C08K5/18 , C08K5/41 , C08L13/00 , C08L15/00 , C08L21/00 , C08L27/00 , C08F114/18
CPC分类号： C08K5/18 , C07C211/56 , C08L27/12
摘要： A crosslinkable elastomer composition which provides a crosslinked product with improved mechanical strength and heat resistance, comprising, (A) a compound having at least two crosslinkable groups represented by the formula (I): and (B) an elastomer which contains a crosslinking site capable of reacting with the crosslinkable group (I) is prepared.
摘要翻译：提供具有改善的机械强度和耐热性的交联产物的可交联弹性体组合物，包含（A）具有至少两个由式（I）表示的可交联基团的化合物：和（B）含有交联部位的弹性体与可交联基团（I）反应。

30. 发明申请

US20110086229A1 PERFLUOROELASTOMER COMPOSITIONS AND METHODS OF PREPARING SAME 有权
标题翻译：全氟聚合物组合物及其制备方法
公开(公告)号：US20110086229A1
公开(公告)日：2011-04-14
申请号：US12969463
申请日：2010-12-15
申请人： Tsuyoshi Noguchi , Jiazhong Luo , Tatsuya Morikawa , Hirokazu Komori , Takafumi Yamato , Meiten Koh
发明人： Tsuyoshi Noguchi , Jiazhong Luo , Tatsuya Morikawa , Hirokazu Komori , Takafumi Yamato , Meiten Koh
IPC分类号： C08L27/22 , C08L27/18 , B32B15/08
CPC分类号： C08L27/18 , C08K5/18 , C08L2205/02 , Y10T428/3154 , C08L2666/04
摘要： The present invention includes crosslinked perfluoroelastomeric compositions and molded articles formed from a cross-linkable perfluoroelastomeric composition having a first curable perfluoropolymer having a cure site monomer and a second perfluoropolymer having a cure site monomer. The molar ratio of the tetrafluoroethylene monomer to perfluoroalkylvinyl ether in one perfluoropolymer is about 0 to 100 to about 65 to 35 in the perfluoropolymer. The molar ratio of the tetrafluoroethylene monomer to the perfluoroalkylvinyl ether monomer in the second polymer is about 65:35 to about 95:5 in the second perfluoropolymer. The composition further includes a curative. One fluorine-containing elastomer composition herein, having a short crosslinking time, has perfluoroelastomers (A) having a tetrafluoroethylene unit, a perfluoralkylvinyl ether unit (a) and a monomer unit (b) having at least one kind selected from the group consisting of a nitrile group, a carboxyl group and an alkoxycarbonyl group, wherein the composition has two or more kinds of perfluoroelastomers (A) having differing contents of perfluoroalkylvinyl ether unit (a).
摘要翻译：本发明包括交联的全氟弹性体组合物和由可交联的全氟弹性体组合物形成的模塑制品，其具有具有固化部位单体的第一可固化全氟聚合物和具有固化部位单体的第二全氟聚合物。全氟聚合物中四氟乙烯单体与全氟烷基乙烯基醚的摩尔比在全氟聚合物中为约0至约100至约65至35。第二聚合物中四氟乙烯单体与全氟烷基乙烯基醚单体的摩尔比在第二全氟聚合物中为约65:35至约95:5。组合物还包括治疗剂。具有交联时间短的一种含氟弹性体组合物具有全氟弹性体（A），其具有四氟乙烯单元，全氟烷基乙烯基醚单元（a）和单体单元（b），所述单体单元具有选自以下的至少一种：腈基，羧基和烷氧基羰基，其中所述组合物具有两种或更多种具有不同全氟烷基乙烯基醚单元（a）含量的全氟弹性体（A）。

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