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    • 29. 发明申请
    • Packaging chip and packaging method thereof
    • 包装芯片及其包装方法
    • US20060273444A1
    • 2006-12-07
    • US11390220
    • 2006-03-28
    • Kyu-dong JungWoon-bae KimIn-sang SongMoon-chul LeeJun-sik HwangSuk-jin Ham
    • Kyu-dong JungWoon-bae KimIn-sang SongMoon-chul LeeJun-sik HwangSuk-jin Ham
    • H01L23/48
    • H01L23/055H01L23/04H01L27/14618H01L2224/16
    • A packaging chip in which a circuit module is packaged and a method of packaging a circuit module are provided. The packaging chip includes a base wafer; a circuit module on the base wafer; a packaging wafer having a cavity and combined with the base wafer so that the circuit module fits inside the cavity; a connecting electrode connecting upper and lower surfaces of the cavity; and a seed layer between the connecting electrode and the packaging wafer. The method includes etching a lower surface of the packaging wafer to form a cavity, stacking a metal layer in an area of the lower surface, combining the base wafer with the packaging wafer, polishing the packaging wafer, forming a viahole through the packaging wafer, stacking a seed layer on the packaging wafer, plating the inside of the viahole, removing the seed layer and forming an electrode.
    • 提供电路模块封装的封装芯片和封装电路模块的方法。 包装芯片包括基底晶片; 基底晶片上的电路模块; 封装晶片,其具有空腔并与所述基底晶片组合,使得所述电路模块装配在所述腔内; 连接所述空腔的上表面和下表面的连接电极; 以及连接电极和封装晶片之间的晶种层。 该方法包括蚀刻封装晶片的下表面以形成空腔,在下表面的区域中堆叠金属层,将基底晶片与封装晶片组合,抛光封装晶片,通过封装晶片形成通孔, 将种子层堆叠在包装晶片上,电镀通孔内部,去除种子层并形成电极。