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21. 发明授权

US5112469A Apparatus for the inward and outward transfer of a workpiece in a vacuum chamber 失效
标题翻译：在真空室内进行工作和外部转移的装置
公开(公告)号：US5112469A
公开(公告)日：1992-05-12
申请号：US572263
申请日：1990-08-27
申请人： Stefan Kempf , Jaroslav Zejda
发明人： Stefan Kempf , Jaroslav Zejda
IPC分类号： B65G49/07 , C23C14/50 , C23C14/56 , H01L21/677
CPC分类号： H01L21/67751 , C23C14/50 , C23C14/56 , C23C14/566
摘要： An apparatus for the inward and outward transfer of a workpiece, particularly of a disk-shaped substrate in a vacuum chamber having a coating system comprising a cathode station. A conveyor means designed as a rotary table is situated inside the vacuum chamber. The rotary table accepts substrate holders which are designed as turned parts. A supporting plate is provided in the region of the inward transfer station. It supports the substrate holder and prevents a sagging thereof. The supporting plate also presses the substrate holder against the inside wall of the vacuum chamber; i.e. against a seal situated in the inside wall. As a result thereof, an air-tight separation of the inward transfer chamber from the vacuum chamber and from the atmosphere is achieved. A considerable reduction in the moved masses of the rotating component parts is achieved by a skillful designing and arrangement of the component parts. A reduction in the mass moments of inertia associated therewith results since the process cycles of the coating system can sequence more quickly.
摘要翻译：一种用于在具有包括阴极站的涂层系统的真空室中向内和向外输送工件，特别是盘形基板的装置。设计为旋转台的传送装置位于真空室内。旋转台接受被设计为转动部件的衬底保持器。在向内转移站的区域中设置支撑板。它支撑衬底支架并防止其下垂。支撑板还将基板保持器压靠在真空室的内壁上; 即抵靠位于内壁中的密封件。结果，实现向内转移室与真空室和大气的气密分离。旋转部件的移动质量的显着减少通过组装部件的巧妙设计和布置来实现。由于涂层系统的工艺循环可以更快地进行顺序，因此与其相关联的质量惯性矩的减小。

22. 发明申请

US20050142290A1 Substrate support adapter system 审中-公开
标题翻译：基板支撑适配器系统
公开(公告)号：US20050142290A1
公开(公告)日：2005-06-30
申请号：US10998206
申请日：2004-11-26
申请人： Stefan Kempf , Thomas Merz , Steffen Runkel
发明人： Stefan Kempf , Thomas Merz , Steffen Runkel
IPC分类号： B65G49/07 , C23C14/50 , C23C14/56 , C23C16/458 , H01L21/683 , H01L21/687 , C23C16/00 , H05K3/00
CPC分类号： H01L21/68728 , C23C14/50 , C23C14/56 , H01L21/68707
摘要： The present invention provides a substrate support adapter system, wherein the substrate support comprises an internal space in which at least one substrate can be arranged as well as an annular outer wall extending vertically with respect to the center plane of the substrate support and limiting the internal space towards the outside. On the outer circumference of the wall of the substrate support, a circumference convex projection, whose vertex is intersected by the center plane, as well as two circumferential concave grooves extending symmetrically with respect to the center plane are arranged as adapters, which are intended for engaging with a holding and/or gripping means for the substrate support. The present invention is advantageous in that a uniform device for manipulating substrates having different shapes and sizes in one system is provided. In particular, the substrate support which is open on both sides vertically with respect to the center plane can be used for treating substrates on one sides or on two sides.
摘要翻译：本发明提供了一种基板支撑适配器系统，其中基板支撑件包括内部空间，其中可布置至少一个基板以及相对于基板支撑件的中心平面垂直延伸的环形外壁，并限制内部向外的空间。在基板支撑体的壁的外周上，其顶点与中心平面相交的圆周凸起凸起以及相对于中心平面对称延伸的两个周向凹槽布置为适配器，其适于与用于衬底支撑件的保持和/或夹持装置接合。本发明的优点在于，提供了用于在一个系统中操作具有不同形状和尺寸的基板的均匀装置。特别地，相对于中心平面在两侧开放的基板支撑件可用于在一侧或两侧处理基板。

23. 发明授权

US06368435B1 Device and method for transporting separate substrates 失效
标题翻译：用于运输单独基板的装置和方法
公开(公告)号：US06368435B1
公开(公告)日：2002-04-09
申请号：US09424657
申请日：2000-03-31
申请人： Stefan Kempf
发明人： Stefan Kempf
IPC分类号： B32B3106
CPC分类号： H01L21/67161 , G11B7/26 , H01L21/67184 , H01L21/67236 , Y10T156/1744 , Y10T156/1798
摘要： A device and a method for separately transporting substances are provided. The device and method according to the invention can especially be used in connection with an unit for producing DVDs. Preferably, the device according to the invention has for each substrate an input station, a processing station and an output station, which stations are arranged on the circular arc at given distances &agr;. Furthermore, grippers are provided, which are arranged on said circular arc at given distances &agr; and can be simultaneously rotated around an axis through the center of said circle through an angle &bgr;. Each gripper transports one substrate to the processing and output stations in a rotational movement. It is the advantage of the invention that the mixing-up of substrates is avoided.
摘要翻译：提供了用于分开输送物质的装置和方法。根据本发明的装置和方法可以特别地与用于生产DVD的单元结合使用。优选地，根据本发明的装置对于每个基板具有输入站，处理站和输出站，哪些站以给定的距离α被布置在圆弧上。此外，提供夹持器，其以给定的距离α布置在所述圆弧上，并且可以同时围绕通过所述圆的中心的角度通过角度β旋转。每个夹具以一个旋转运动将一个基板输送到处理和输出站。本发明的优点是避免了基板的混合。

24. 发明授权

US5407314A Apparatus for synchronizing loading and unloading of substrates with turntable movement in a coating chamber 失效
标题翻译：用于使涂层室中具有转盘运动的基板的加载和卸载同步的装置
公开(公告)号：US5407314A
公开(公告)日：1995-04-18
申请号：US130378
申请日：1993-10-01
申请人： Stefan Kempf
发明人： Stefan Kempf
IPC分类号： B65G49/07 , C23C14/56 , F16H25/16 , G11B7/26 , H01L21/687 , B65G29/00
CPC分类号： H01L21/68742 , C23C14/56 , F16H25/16 , H01L21/68764 , H01L21/68771 , G11B7/26 , Y10S414/139
摘要： Apparatus for loading and unloading disk-shaped substrates into and out of a vacuum coating chamber and for transporting the substrates within this chamber, having a first station for loading and unloading substrates, a second station where substrates are coated, a rotatable substrate holder for transferring substrates stepwise between stations, and first and second lifters for lifting substrates from the rotatable holder at respective first and second stations. A rotating cylinder has timing grooves in its cylindrical surface which guide pins on the bottom of a shaft fixed to the substrate holder in order to move it stepwise between stations. Timing grooves in opposed ends of the cylinder guide pins which move the lifters vertically during pauses between stepwise movements. A single motor thus controls all movements in the coating chamber.
摘要翻译：用于将盘形基板装入和卸出真空涂布室并用于在该室内输送基板的装置，具有用于装载和卸载基板的第一工位，其上涂覆基板的第二工位，用于转移的可转动的基板保持器站台之间的基板，以及用于在相应的第一和第二站处从可旋转保持器提升基板的第一和第二升降器。旋转圆筒在其圆柱形表面上具有定时槽，该定时槽在固定到基板保持器的轴的底部上引导销，以便在工位之间逐步移动。气缸导向销的相对端的定时槽，在逐步运动之间暂停时使升降器垂直移动。因此，单个电动机因此控制涂覆室中的所有运动。

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