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    • 24. 发明授权
    • Piezoelectric film element using (Na,K,Li)NbO3
    • 使用(Na,K,Li)NbO 3的压电薄膜元件
    • US08581477B2
    • 2013-11-12
    • US13018693
    • 2011-02-01
    • Kazufumi SuenagaKenji ShibataKazutoshi WatanabeAkira Nomoto
    • Kazufumi SuenagaKenji ShibataKazutoshi WatanabeAkira Nomoto
    • H01L41/047H01L41/187
    • H01L41/187H01L41/0477H01L41/0805H01L41/094H01L41/1873H01L41/29H01L41/316
    • A piezoelectric film element is provided, which is capable of improving piezoelectric properties, having on a substrate at least a lower electrode, a lead-free piezoelectric film, and an upper electrode, wherein at least the lower electrode out of the lower electrode and the upper electrode has a crystal structure of a cubic crystal system, a tetragonal crystal system, an orthorhombic crystal system, a hexagonal crystal system, a monoclinic crystal system, a triclinic crystal system, a trigonal crystal system, or has a composition in which one of these crystals exists or two or more of them coexist, and crystal axes of the crystal structure are preferentially oriented to a specific axis smaller than or equal to two axes of these crystals, and a ratio c/a′ is set in a range of 0.992 or more and 0.999 or less, which is the ratio of a crystal lattice spacing c in a direction of a normal line to the substrate surface, with respect to a crystal lattice spacing a′ whose inclination angle from the substrate surface is in a range of 10° or more and 30° or less.
    • 提供一种能够改善压电性能的压电膜元件,其在基板上至少具有下电极,无铅压电膜和上电极,其中至少下电极中的下电极和 上电极具有立方晶系,四方晶系,正交晶系,六方晶系,单斜晶系,三斜晶系,三
      晶体系的晶体结构,或其组成为: 这些晶体存在或其中的两种以上共存,并且晶体结构的晶轴优先取向小于或等于这些晶体的两个轴的特定轴,并且将比率c / a'设定在0.992的范围内 以上且0.999以下,即与法线的方向相对于基板表面的晶格间距c的比例,相对于晶格间距a',其倾斜角为 基板表面的厚度在10°以上且30°以下的范围内。