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21. 发明申请

US20110156573A1 DUAL PANEL TYPE ORGANIC ELECTROLUMINESCENT DISPLAY DEVICE AND METHOD OF FABRICATING THE SAME 有权
标题翻译：双面板型有机电致发光显示装置及其制造方法
公开(公告)号：US20110156573A1
公开(公告)日：2011-06-30
申请号：US13040936
申请日：2011-03-04
申请人： Jung-Soo HEO , Jae-Hee Park , Sang-Ho Yu , Kyung-Min Park , Sung-Hoon Choi , Seok-Jong Lee
发明人： Jung-Soo HEO , Jae-Hee Park , Sang-Ho Yu , Kyung-Min Park , Sung-Hoon Choi , Seok-Jong Lee
IPC分类号： H05B33/00 , H01L51/56
CPC分类号： H01L27/3244 , H01L27/3248 , H01L27/3262 , H01L51/5088 , H01L2251/5315
摘要： An organic electroluminescent device including a switching element and a driving element connected to the switching element on a substrate including a pixel region, a cathode connected to the driving element, in which the cathode includes molybdenum (Mo), an emitting layer on the cathode, and an anode on the emitting layer.
摘要翻译：一种有机电致发光器件，包括开关元件和连接到基板上的开关元件的驱动元件，该基板包括像素区域，与驱动元件连接的阴极，阴极包括钼（Mo），阴极上的发光层，和发光层上的阳极。

22. 发明申请

US20080308416A1 SPUTTERING TARGET HAVING INCREASED LIFE AND SPUTTERING UNIFORMITY 有权
标题翻译：具有增加生命和突破性的飞溅目标
公开(公告)号：US20080308416A1
公开(公告)日：2008-12-18
申请号：US11764772
申请日：2007-06-18
申请人： Adolph Miller Allen , Ki Hwan Yoon , Ted Guo , Hong S. Yang , Sang-Ho Yu
发明人： Adolph Miller Allen , Ki Hwan Yoon , Ted Guo , Hong S. Yang , Sang-Ho Yu
IPC分类号： C23C14/34
CPC分类号： C23C14/3407 , H01J37/3423 , H01J37/3435
摘要： A sputtering target for a sputtering chamber comprises a backing plate with a sputtering plate mounted thereon. In one version, the backing plate comprises a circular plate having a front surface comprising an annular groove. The sputtering plate comprises a disk comprising a sputtering surface and a backside surface having a circular ridge that is shaped and sized to fit into the annular groove of the backing plate.
摘要翻译：用于溅射室的溅射靶包括安装有溅射板的背板。在一个版本中，背板包括具有包括环形凹槽的前表面的圆形板。溅射板包括包括溅射表面的圆盘和具有圆形脊的后侧表面，该圆形脊的形状和尺寸适于装配到背板的环形槽中。

23. 发明授权

US07378002B2 Aluminum sputtering while biasing wafer 失效
标题翻译：铝溅射同时偏置晶圆
公开(公告)号：US07378002B2
公开(公告)日：2008-05-27
申请号：US11209328
申请日：2005-08-23
申请人： Wei Ti Lee , Ted Guo , Sang-Ho Yu
发明人： Wei Ti Lee , Ted Guo , Sang-Ho Yu
IPC分类号： C23C14/35 , H01L21/44
CPC分类号： C23C14/185 , C23C14/025 , C23C14/046 , C23C14/345
摘要： An aluminum sputtering process including RF biasing the wafer and a two-step aluminum fill process and apparatus used therefor to fill aluminum into a narrow via hole by sputtering under two distinctly different conditions, preferably in two different plasma sputter reactors. The first step includes sputtering a high fraction of ionized aluminum atoms onto a relatively cold wafer, e.g., held at less than 150° C., and relatively highly biased to attract aluminum atoms into the narrow holes and etch overhangs. The second step includes more neutral sputtering onto a relatively warm wafer, e.g. held at greater than 250° C., and substantially unbiased to provide a more isotropic and uniform aluminum flux. The magnetron scanned about the back of the aluminum target may be relatively small and unbalanced in the first step and relatively large and balanced in the second.
摘要翻译：一种铝溅射工艺，包括RF偏置晶片和两步铝填充工艺和装置，用于在两个明显不同的条件下，优选在两个不同的等离子体溅射反应器中通过溅射将铝填充到窄通孔中。第一步包括将大部分电离铝原子溅射到相对冷的晶片上，例如保持在小于150℃，并且相当高的偏压以将铝原子吸引到窄孔中并蚀刻突出端。第二步包括在相对温暖的晶片上的更中性的溅射，例如保持在大于250℃，并且基本上无偏差以提供更多的各向同性和均匀的铝通量。围绕铝靶的背面扫描的磁控管可能在第一步骤中相对较小并且不平衡，而在第二步中相对较大且平衡。

24. 发明申请

US20080012470A1 Dual panel type organic electroluminescent display device and method of fabricating the same 有权
标题翻译：双面板型有机电致发光显示装置及其制造方法
公开(公告)号：US20080012470A1
公开(公告)日：2008-01-17
申请号：US11639310
申请日：2006-12-15
申请人： Jung-Soo Heo , Jae-Hee Park , Sang-Ho Yu , Kyung-Min Park , Sung-Hoon Choi , Seok-Jong Lee
发明人： Jung-Soo Heo , Jae-Hee Park , Sang-Ho Yu , Kyung-Min Park , Sung-Hoon Choi , Seok-Jong Lee
IPC分类号： H05B33/00 , H01L51/50
CPC分类号： H01L27/3244 , H01L27/3248 , H01L27/3262 , H01L51/5088 , H01L2251/5315
摘要： An organic electroluminescent device including a switching element and a driving element connected to the switching element on a substrate including a pixel region, a cathode connected to the driving element, in which the cathode includes molybdenum (Mo), an emitting layer on the cathode, and an anode on the emitting layer.
摘要翻译：一种有机电致发光器件，包括开关元件和连接到基板上的开关元件的驱动元件，该基板包括像素区域，与驱动元件连接的阴极，阴极包括钼（Mo），阴极上的发光层，和发光层上的阳极。

25. 发明授权

US06352620B2 Staged aluminum deposition process for filling vias 有权
标题翻译：分阶段铝沉积工艺用于填充过孔
公开(公告)号：US06352620B2
公开(公告)日：2002-03-05
申请号：US09340977
申请日：1999-06-28
申请人： Sang-Ho Yu , Yonghwa Chris Cha , Murali Abburi , Shri Singhvi , Fufa Chen
发明人： Sang-Ho Yu , Yonghwa Chris Cha , Murali Abburi , Shri Singhvi , Fufa Chen
IPC分类号： C23L1434
CPC分类号： H01L21/76882
摘要： The present invention is a semiconductor metallization process for providing complete via fill on a substrate and a planar metal surface, wherein the vias are free of voids and the metal surface is free of grooves. In one aspect of the invention, a refractory layer is deposited onto a substrate having high aspect ratio contacts or vias formed thereon. A PVD metal layer, such as PVD Al or PVD Cu, is then deposited onto the refractory layer at a pressure below about 1 milliTorr to provide a conformal PVD metal layer. Then the vias or contacts are filled with metal, such as by reflowing additional metal deposited by physical vapor deposition on the conformal PVD metal layer. The process is preferably carried out in an integrated processing system that includes a long throw PVD chamber, wherein a target and a substrate are separated by a long throw distance of at least 100 mm, and a hot metal PVD chamber that also serves as a reflow chamber.
摘要翻译：本发明是用于在基板和平面金属表面上提供完整的通孔填充的半导体金属化工艺，其中通孔没有空隙，并且金属表面没有凹槽。在本发明的一个方面中，将耐火层沉积在具有高比例接触或在其上形成的通孔的基底上。然后将PVD金属层（例如PVD Al或PVD Cu）以低于约1毫乇的压力沉积在耐火层上，以提供保形PVD金属层。然后，通孔或触点填充金属，例如通过在保形PVD金属层上物理气相沉积沉积的附加金属回流。该方法优选在包括长投影PVD室的集成处理系统中进行，其中靶和衬底以至少100mm的长距离距离分开，以及也用作回流的热金属PVD室房间。

26. 发明授权

US08968536B2 Sputtering target having increased life and sputtering uniformity 有权
标题翻译：溅射靶材寿命延长和溅射均匀性
公开(公告)号：US08968536B2
公开(公告)日：2015-03-03
申请号：US11764772
申请日：2007-06-18
申请人： Adolph Miller Allen , Ki Hwan Yoon , Ted Guo , Hong S. Yang , Sang-Ho Yu
发明人： Adolph Miller Allen , Ki Hwan Yoon , Ted Guo , Hong S. Yang , Sang-Ho Yu
IPC分类号： C23C14/35 , C23C14/34 , H01J37/34
CPC分类号： C23C14/3407 , H01J37/3423 , H01J37/3435
摘要： A sputtering target for a sputtering chamber comprises a backing plate with a sputtering plate mounted thereon. In one version, the backing plate comprises a circular plate having a front surface comprising an annular groove. The sputtering plate comprises a disk comprising a sputtering surface and a backside surface having a circular ridge that is shaped and sized to fit into the annular groove of the backing plate.
摘要翻译：用于溅射室的溅射靶包括安装有溅射板的背板。在一个版本中，背板包括具有包括环形凹槽的前表面的圆形板。溅射板包括包括溅射表面的圆盘和具有圆形脊的后侧表面，该圆形脊的形状和尺寸适于装配到背板的环形槽中。

27. 发明授权

US07932671B2 Organic electroluminescent display device and method of fabricating the same 有权
标题翻译：有机电致发光显示装置及其制造方法
公开(公告)号：US07932671B2
公开(公告)日：2011-04-26
申请号：US11639169
申请日：2006-12-15
申请人： Kyung-Min Park , Seok-Jong Lee , Jae-Hee Park , Sang-Ho Yu
发明人： Kyung-Min Park , Seok-Jong Lee , Jae-Hee Park , Sang-Ho Yu
IPC分类号： H01J1/62
CPC分类号： H01L51/5088 , H01L27/3244 , H01L51/0078 , H01L51/5092 , H01L2251/5315
摘要： An organic electroluminescent display (OELD) device includes first substrate; a plurality of gate lines and a plurality of data lines crossing each other to define a plurality of pixel regions; a power line parallel to and separated from the gate lines; switching and driving elements connected to each other in each of the plurality of pixel regions on the first substrate; a first electrode on the first substrate and connected to one of the driving element; an injection layer on the first electrode; an organic luminescent layer on the injection layer; a second electrode of a transparent conductive material on the organic luminescent layer; and a second substrate attached to and facing the first substrate.
摘要翻译：有机电致发光显示器（OELD）器件包括第一衬底; 多个栅极线和多条数据线彼此交叉以限定多个像素区域; 与栅极线平行并与栅极线分离的电源线; 在所述第一基板上的所述多个像素区域中的每一个中彼此连接的开关和驱动元件; 所述第一电极在所述第一基板上并连接到所述驱动元件之一; 在第一电极上的注入层; 注入层上的有机发光层; 在有机发光层上的透明导电材料的第二电极; 以及附接到第一基板并面向第一基板的第二基板。

28. 发明授权

US07923916B2 Dual panel type organic electroluminescent display device and method of fabricating the same 有权
标题翻译：双面板型有机电致发光显示装置及其制造方法
公开(公告)号：US07923916B2
公开(公告)日：2011-04-12
申请号：US11639310
申请日：2006-12-15
申请人： Jung-Soo Heo , Jae-Hee Park , Sang-Ho Yu , Kyung-Min Park , Sung-Hoon Choi , Seok-Jong Lee
发明人： Jung-Soo Heo , Jae-Hee Park , Sang-Ho Yu , Kyung-Min Park , Sung-Hoon Choi , Seok-Jong Lee
IPC分类号： H05B33/00 , H01L51/50
CPC分类号： H01L27/3244 , H01L27/3248 , H01L27/3262 , H01L51/5088 , H01L2251/5315
摘要： An organic electroluminescent device including a switching element and a driving element connected to the switching element on a substrate including a pixel region, a cathode connected to the driving element, in which the cathode includes molybdenum (Mo), an emitting layer on the cathode, and an anode on the emitting layer.
摘要翻译：一种有机电致发光器件，包括开关元件和连接到基板上的开关元件的驱动元件，该基板包括像素区域，与驱动元件连接的阴极，阴极包括钼（Mo），阴极上的发光层，和发光层上的阳极。

29. 发明申请

US20080001529A1 Organic electroluminescent display device and method of fabricating the same 有权
标题翻译：有机电致发光显示装置及其制造方法
公开(公告)号：US20080001529A1
公开(公告)日：2008-01-03
申请号：US11639169
申请日：2006-12-15
申请人： Kyung-Min Park , Seok-Jong Lee , Jae-Hee Park , Sang-Ho Yu
发明人： Kyung-Min Park , Seok-Jong Lee , Jae-Hee Park , Sang-Ho Yu
IPC分类号： H01L51/00
CPC分类号： H01L51/5088 , H01L27/3244 , H01L51/0078 , H01L51/5092 , H01L2251/5315
摘要： An organic electroluminescent display (OELD) device includes first substrate; a plurality of gate lines and a plurality of data lines crossing each other to define a plurality of pixel regions; a power line parallel to and separated from the gate lines; switching and driving elements connected to each other in each of the plurality of pixel regions on the first substrate; a first electrode on the first substrate and connected to one of the driving element; an injection layer on the first electrode; an organic luminescent layer on the injection layer; a second electrode of a transparent conductive material on the organic luminescent layer; and a second substrate attached to and facing the first substrate.
摘要翻译：有机电致发光显示器（OELD）器件包括第一衬底; 多个栅极线和多条数据线彼此交叉以限定多个像素区域; 与栅极线平行并与栅极线分离的电源线; 在所述第一基板上的所述多个像素区域中的每一个中彼此连接的开关和驱动元件; 所述第一电极在所述第一基板上并连接到所述驱动元件之一; 在第一电极上的注入层; 注入层上的有机发光层; 在有机发光层上的透明导电材料的第二电极; 以及附接到第一基板并面向第一基板的第二基板。

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