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    • 25. 发明申请
    • METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
    • 制造半导体器件的方法
    • US20120135577A1
    • 2012-05-31
    • US13304936
    • 2011-11-28
    • Doo-Young LEEKi Il KimMyeong-Cheol KimDo-Hyoung KimDo-Hsing Lee
    • Doo-Young LEEKi Il KimMyeong-Cheol KimDo-Hyoung KimDo-Hsing Lee
    • H01L21/336H01L21/28
    • H01L29/78H01L21/76829H01L21/76832H01L21/76895H01L21/76897H01L29/66545
    • A method of manufacturing a semiconductor device, including the second sacrificial layer receiving a gate structure include a metal and a spacer on a sidewall of the gate structure therethrough being formed on a substrate. The second sacrificial layer is removed. A second etch stop layer and an insulating interlayer are sequentially formed on the gate structure, the spacer and the substrate. An opening passing through the insulating interlayer is formed to expose a portion of the gate structure, a portion of the spacer and a portion of the second etch stop layer on a portion of the substrate. The second etch stop layer being exposed through the opening is removed. The contact being electrically connected to the gate structure and the substrate and filling the opening is formed. The semiconductor device having the metal gate electrode and the shared contact has a desired leakage current characteristic and resistivity characteristics.
    • 包括接收栅极结构的第二牺牲层的半导体器件的制造方法包括在基板上形成的栅极结构的侧壁上的金属和间隔物。 去除第二牺牲层。 在栅极结构,间隔物和衬底上依次形成第二蚀刻停止层和绝缘中间层。 形成通过绝缘中间层的开口以暴露栅极结构的一部分,间隔物的一部分和第二蚀刻停止层的一部分在衬底的一部分上。 去除通过开口露出的第二蚀刻停止层。 形成与栅极结构和基板电连接并填充开口的触点。 具有金属栅电极和共用触点的半导体器件具有期望的漏电流特性和电阻率特性。