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21. 发明授权

US09340413B2 Integrated acoustic transducer in MEMS technology, and manufacturing process thereof 有权
公开(公告)号：US09340413B2
公开(公告)日：2016-05-17
申请号：US14035798
申请日：2013-09-24
申请人： STMicroelectronics S.r.l.
发明人： Angelo Antonio Merassi , Sarah Zerbini , Luca Coronato
IPC分类号： H04R25/00 , B81C1/00 , B81B3/00 , H04R7/24 , H04R19/00 , H04R31/00 , H04R19/04
CPC分类号： B81C1/00182 , B81B3/0035 , B81B3/0072 , B81B2201/0257 , B81C1/00158 , H04R7/24 , H04R19/005 , H04R19/04 , H04R31/00 , Y10T29/49005
摘要： A MEMS acoustic transducer, for example, a microphone, includes a substrate provided with a cavity, a supporting structure, fixed to the substrate, a membrane having a perimetral edge and a centroid, suspended above the cavity and fixed to the substrate the membrane configured to oscillate via the supporting structure. The supporting structure includes a plurality of anchorage elements fixed to the membrane, and each anchorage element is coupled to a respective portion of the membrane between the centroid and the perimetral edge of the membrane.

22. 发明申请

US20140174183A1 DETECTION STRUCTURE FOR A Z-AXIS RESONANT ACCELEROMETER 有权
标题翻译： Z轴共振加速度计的检测结构
公开(公告)号：US20140174183A1
公开(公告)日：2014-06-26
申请号：US14193981
申请日：2014-02-28
申请人： STMicroelectronics S.r.l.
发明人： Claudia Comi , Alberto Corigliano , Sarah Zerbini
IPC分类号： G01P15/097
CPC分类号： G01P15/0975 , G01P15/097
摘要： A detection structure for a z-axis resonant accelerometer is provided with an inertial mass anchored to a substrate by means of elastic anchorage elements so as to be suspended above the substrate and perform an inertial movement of rotation about a first axis of rotation belonging to a plane of main extension of the inertial mass, in response to an external acceleration acting along a vertical axis transverse with respect to the plane; and a first resonator element and a second resonator element, which are mechanically coupled to the inertial mass by respective elastic supporting elements, which enable a movement of rotation about a second axis of rotation and a third axis of rotation, in a resonance condition. In particular, the second axis of rotation and the third axis of rotation are parallel to one another, and are moreover parallel to the first axis of rotation of the inertial mass.
摘要翻译：用于z轴共振加速度计的检测结构具有通过弹性锚定元件锚固到基底的惯性块，以便悬挂在基底上方，并且执行围绕属于属于第一轴的第一旋转轴的旋转的惯性运动响应于沿相对于平面横向的垂直轴作用的外部加速度，所述惯性质量的主延伸面; 以及第一谐振器元件和第二谐振器元件，其通过相应的弹性支撑元件机械耦合到惯性块，其使得能够在谐振条件下围绕第二旋转轴线和第三旋转轴线旋转。特别地，第二旋转轴线和第三旋转轴线彼此平行，并且还平行于惯性质量块的第一旋转轴线。

23. 发明授权

US08733172B2 Microelectromechanical gyroscope with rotary driving motion and improved electrical properties 有权
标题翻译：具有旋转驱动运动和改善电气特性的微机电陀螺仪
公开(公告)号：US08733172B2
公开(公告)日：2014-05-27
申请号：US13789476
申请日：2013-03-07
申请人： STMicroelectronics S.r.l.
发明人： Luca Coronato , Gabriele Cazzaniga , Sarah Zerbini
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , G01C19/5712 , Y10T29/49002
摘要： An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.
摘要翻译：集成的微机电结构设置有：具有衬底和框架的管芯，在其内部限定检测区域，并具有沿第一轴线延伸的第一侧面; 固定在基板上的驱动质量块，设置在检测区域中，并被设计成在垂直轴线的致动运动的平面内旋转; 以及第一对和第二对第一感测质量块，其通过弹性支撑元件悬挂在驱动质量块内，以便在致动运动中相对于其固定，以便执行从平面中的旋转检测移动响应于第一角速度; 其中第一对的第一感测质量和第二对的第一感测质量体在相对于第一轴线具有相反符号的非零倾斜的相应方向上对齐。

24. 发明申请

US20140077798A1 INTEGRATED TRIAXIAL MAGNETOMETER OF SEMICONDUCTOR MATERIAL MANUFACTURED IN MEMS TECHNOLOGY 有权
标题翻译： MEMS技术制造的半导体材料的集成三光子计
公开(公告)号：US20140077798A1
公开(公告)日：2014-03-20
申请号：US13905006
申请日：2013-05-29
申请人： STMicroelectronics S.r.l.
发明人： Lorenzo Baldo , Francesco Procopio , Sarah Zerbini
IPC分类号： G01R33/028
CPC分类号： G01R33/0286 , G01R33/0005 , G01R33/028 , G01R33/038
摘要： Two suspended masses are configured so as to be flowed by respective currents flowing in the magnetometer plane in mutually transversal directions and are capacitively coupled to lower electrodes. Mobile sensing electrodes are carried by the first suspended mass and are capacitively coupled to respective fixed sensing electrodes. The first suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a first horizontal direction. The second suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a second horizontal direction, and the first suspended mass is configured so as to be mobile in a direction parallel to the plane and transversal to the current flowing in the first suspended mass in presence of a magnetic field having a component in a vertical direction.
摘要翻译：两个悬挂质量被配置为使得在相互横向上在磁力计平面中流动的相应电流流动，并且电容耦合到下电极。移动感测电极由第一悬浮质量携带并且电容耦合到相应的固定感测电极。第一悬挂质量被配置为在存在具有在第一水平方向上的分量的磁场的情况下在横向于平面的方向上是可移动的。第二悬挂质量被配置为在存在具有在第二水平方向上的分量的磁场的情况下在横向于平面的方向上是可移动的，并且第一悬挂质量被配置为在平行于并且在存在具有在垂直方向上的分量的磁场的情况下横向于在第一悬浮质量块中流动的电流。

25. 发明申请

US20140015525A1 INTEGRATED MULTILAYER MAGNETORESISTIVE SENSOR AND MANUFACTURING METHOD THEREOF 有权
标题翻译：集成多层磁阻传感器及其制造方法
公开(公告)号：US20140015525A1
公开(公告)日：2014-01-16
申请号：US13929635
申请日：2013-06-27
申请人： STMicroelectronics S.r.l.
发明人： Dario Paci , Sarah Zerbini , Benedetto Vigna
IPC分类号： G01R33/09
CPC分类号： G01R33/096 , G01R33/0017 , G01R33/0052 , G01R33/0206
摘要： A magnetic-field sensor includes: a chip including a substrate having a first surface and an insulating layer covering the first surface; first and second magnetoresistors each extending into the insulating layer and having a main axis of magnetization and a secondary axis of magnetization; a first magnetic-field generator configured to generate a first magnetic field having field lines along the main axis of magnetization of the first magnetoresistor; a second magnetic-field generator configured to generate a second magnetic field having field lines along the main axis of magnetization of the second magnetoresistor. The main axes of magnetization extending transversely to each other and the secondary axes of magnetization extending transversely to each other. The first and second magnetoresistors extend into the insulating layer at a first distance and a second distance, respectively, that differ from one another, from the first surface.
摘要翻译：磁场传感器包括：芯片，其包括具有覆盖第一表面的第一表面和绝缘层的基板; 第一和第二磁阻器各自延伸到绝缘层中并且具有主轴的磁化和次级磁化轴; 第一磁场发生器，被配置为产生具有沿着所述第一磁电阻的主磁化轴的场线的第一磁场; 第二磁场发生器被配置为产生具有沿着第二磁阻的主磁化轴的场线的第二磁场。磁化的主轴线彼此横向延伸，磁化的副轴相互横向延伸。第一和第二磁阻器分别从第一表面延伸到彼此不同的第一距离和第二距离处的绝缘层。

26. 发明申请

US20130180334A1 MICROELECTROMECHANICAL GYROSCOPE WITH ROTARY DRIVING MOTION AND IMPROVED ELECTRICAL PROPERTIES 有权
标题翻译：具有旋转驱动运动的微电子陀螺仪和改进的电气特性
公开(公告)号：US20130180334A1
公开(公告)日：2013-07-18
申请号：US13789476
申请日：2013-03-07
申请人： STMICROELECTRONICS S.R.L.
发明人： Luca Coronato , Gabriele Cazzaniga , Sarah Zerbini
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , G01C19/5712 , Y10T29/49002
摘要： An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.
摘要翻译：集成的微机电结构设置有：具有衬底和框架的管芯，在其内部限定检测区域，并具有沿第一轴线延伸的第一侧面; 固定在基板上的驱动质量块，设置在检测区域中，并被设计成在垂直轴线的致动运动的平面内旋转; 以及第一对和第二对第一感测质量块，其通过弹性支撑元件悬挂在驱动质量块内，以便在致动运动中相对于其固定，以便执行从平面中的旋转检测移动响应于第一角速度; 其中第一对的第一感测质量和第二对的第一感测质量体在相对于第一轴线具有相反符号的非零倾斜的相应方向上对齐。

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