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21. 发明申请

US20160138666A1 Micromechanical spring for an inertial sensor 审中-公开
标题翻译：用于惯性传感器的微机械弹簧
公开(公告)号：US20160138666A1
公开(公告)日：2016-05-19
申请号：US14924135
申请日：2015-10-27
申请人： Robert Bosch GmbH
发明人： Christian HOEPPNER , Benjamin Schmidt , Mirko Hattass , Odd-Axel Pruetz , Robert Maul , Friedjof Heuck , Rolf Scheben , Torsten Ohms , Reinhard Neul
IPC分类号： F16F1/02 , G01C19/56
CPC分类号： G01C19/56 , B81B2203/0163 , B81B2203/019 , B81C1/0019 , G01C19/5733
摘要： A micromechanical spring for an inertial sensor, including segments of a monocrystalline base material, the segments having surfaces which are situated at a right angle to one another with respect to a plane of oscillation of the spring and normal to the plane of oscillation of the spring, the segments being manufactured in a crystal-direction-dependent etching process and each having two different orientations normal to the plane of oscillation, in which the spring includes a defined number of segments situated in a defined manner.
摘要翻译：一种用于惯性传感器的微机械弹簧，包括单晶基材的段，所述段具有相对于弹簧的振荡平面彼此成直角的表面，并垂直于弹簧的摆动平面，所述片段以晶体方向依赖的蚀刻工艺制造，并且每个具有垂直于振荡平面的两个不同的取向，其中弹簧包括以限定的方式定位的限定数量的片段。

22. 发明申请

US20200370888A1 ONE-AXIS AND TWO-AXIS ROTATION RATE SENSOR 审中-公开
公开(公告)号：US20200370888A1
公开(公告)日：2020-11-26
申请号：US16636532
申请日：2018-07-30
申请人： Robert Bosch GmbH
发明人： Peter Degenfeld-Schonburg , Andreas Lassl , Burkhard Kuhlmann , Niels Bode , Nils Felix Kuhlmann , Reinhard Neul
IPC分类号： G01C19/5762 , G01C19/5712 , G01C19/5747
摘要： A sensor includes a substrate having a first electrode arrangement; a first mass oscillator having (a) a first mass, (b) a first mass centroid, and (c) a second electrode arrangement including a first area centroid coinciding with the first mass centroid; and a second mass oscillator having (a) a second mass equal to the first mass, (b) a second mass centroid coinciding with the first mass centroid, and (c) a third electrode arrangement including a second area centroid coinciding with the first area centroid. Areas of the second and third electrode arrangements are equal. The sensor detects respective rotation rates around axes parallel to and perpendicular to a substrate extension. The oscillators are oscillatorily connected to each other and to the substrate, are deflectable, and experience respective forces in the directions of extension of the axes upon respective rotations around the other of the axes.

23. 发明申请

US20200284583A1 MEMS DEVICE INCLUDING SPURIOUS MODE SUPPRESSION AND CORRESPONDING OPERATING METHOD 审中-公开
公开(公告)号：US20200284583A1
公开(公告)日：2020-09-10
申请号：US16645268
申请日：2018-09-20
申请人： Robert Bosch GmbH
发明人： Andreas Lassl , Matthias Kuehnel , Niels Bode , Nils Felix Kuhlmann , Peter Degenfeld-Schonburg , Reinhard Neul , Frank Schatz
IPC分类号： G01C19/5733 , G02B26/08
摘要： A MEMS device and a corresponding operating method. The MEMS device is equipped with an oscillatory micromechanical system, which is excitable in a plurality of useful modes, the oscillatory micromechanical system including at least one system component, which is excitable in at least one parasitic spurious mode by a superposition of the useful modes. An adjusting device is provided, which is configured in such a way that it counteracts the parasitic spurious mode by application of an electromagnetic interaction to the system component.

24. 发明授权

US09689676B2 Yaw-rate sensor 有权
公开(公告)号：US09689676B2
公开(公告)日：2017-06-27
申请号：US14737971
申请日：2015-06-12
申请人： ROBERT BOSCH GMBH
发明人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
IPC分类号： G01C19/56 , G01C19/574 , F16F1/02 , G01P3/44 , G01C19/5747
CPC分类号： G01C19/574 , F16F1/025 , G01C19/5747 , G01P3/44
摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

25. 发明申请

US20170081177A1 INTERPOSER FOR MOUNTING A VERTICALLY INTEGRATED HYBRID COMPONENT ON A COMPONENT CARRIER 审中-公开
公开(公告)号：US20170081177A1
公开(公告)日：2017-03-23
申请号：US15311253
申请日：2015-05-29
申请人： Robert Bosch GmbH
发明人： Reinhard Neul , Johannes Classen , Torsten Kramer , Jochen Reinmuth , Mirko Hattass , Lars Tebje , Daniel Christoph Meisel , Ralf Reichenbach , Friedjof Heuck , Antoine Puygranier
IPC分类号： B81B7/00
CPC分类号： B81B7/0048 , B81B2207/012 , B81B2207/07 , B81B2207/096 , H01L23/13 , H01L23/49827 , H01L2224/16225
摘要： An interposer is provided which is made up of a flat carrier substrate including at least one front wiring plane, in which front terminal pads are formed for mounting a component on the interposer, including at least one rear wiring plane, in which rear terminal pads are formed for mounting on a component carrier, the front terminal pads and the rear terminal pads being arranged offset from each other; and including vias for electrical connection of the at least one front wiring plane and the at least one rear wiring plane. The carrier substrate includes at least one edge section and at least one center section, which are at least largely mechanically decoupled via a stress-decoupling structure. The front terminal pads are arranged exclusively on the center section for mounting the component, while the rear terminal pads are arranged exclusively on the edge section for mounting on a component carrier.

26. 发明授权

US09593949B2 Yaw-rate sensor 有权
公开(公告)号：US09593949B2
公开(公告)日：2017-03-14
申请号：US14984153
申请日：2015-12-30
申请人： Robert Bosch GmbH
发明人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
IPC分类号： G01C19/56 , G01C19/574 , F16F1/02 , G01P3/44 , G01C19/5747
CPC分类号： G01C19/574 , F16F1/025 , G01C19/5747 , G01P3/44
摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

27. 发明授权

US09428378B2 Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component 有权
公开(公告)号：US09428378B2
公开(公告)日：2016-08-30
申请号：US14731032
申请日：2015-06-04
申请人： Robert Bosch GmbH
发明人： Friedjof Heuck , Lars Tebje , Heiko Stahl , Jullian Gonska , Reinhard Neul
IPC分类号： H01L23/00 , B81B7/00 , B81C1/00 , B81B7/02 , H01L23/02 , H01L23/10 , H01L21/50
CPC分类号： B81B7/0038 , B81B7/02 , B81B2203/0315 , B81C1/00285 , B81C2203/0145 , H01L21/50 , H01L23/02 , H01L23/10 , H01L2224/48463
摘要： For the targeted influencing of the internal pressure within a cavity between two elements of a component, a getter material or an outgassing material is situated in an additional cavity between the two elements. After the two elements are bonded to one another, the additional cavity is still to be joined via a connecting opening to the cavity. The getter material or the outgassing material is then activated so that gasses are bound in the additional cavity and in the connected cavity, or an outgassing takes place. Only when the sought internal pressure has established itself in the connected cavity is the connecting opening to the additional cavity closed. In this way, the getter material or the outgassing material is only used for establishing a defined internal pressure, but no longer has any influence on the internal pressure within the cavity during ongoing operation of the component.

28. 发明申请

US20160102980A1 Sensor Element and Method for Capturing a First and a Second Component of a Physical Variable 审中-公开
标题翻译：用于捕获物理变量的第一和第二分量的传感器元件和方法
公开(公告)号：US20160102980A1
公开(公告)日：2016-04-14
申请号：US14890747
申请日：2014-04-16
申请人： ROBERT BOSCH GMBH
发明人： Reinhard Neul
IPC分类号： G01C19/5776 , G01P15/02
CPC分类号： G01C19/5776 , G01C19/00 , G01P15/02 , G01P15/18
摘要： The disclosure relates to a sensor element for capturing a first and a second component of a physical variable. The sensor element comprises a first measuring transducer for measuring a first component, directed in a first measuring direction, of the physical variable. The sensor element further comprises a second measuring transducer for measuring a second component, directed in a second measuring direction, of the physical variable, wherein the first and second measuring transducers are formed or arranged on or in a carrier substrate, which contains a material on or in which measuring transducers can be produced during processing with a predefined processing method, said measuring transducers being formed to measure the physical variable in a first or second measuring direction, wherein a measuring angle between the first and the second measuring direction depends on the material of the carrier substrate.
摘要翻译：本公开涉及用于捕获物理变量的第一和第二分量的传感器元件。传感器元件包括用于测量物理变量的第一测量方向上的第一分量的第一测量传感器。传感器元件还包括用于测量物理变量的第二测量方向上的第二分量的第二测量传感器，其中第一和第二测量传感器形成或布置在载体衬底上或载体衬底上，或者其中可以用预定的处理方法在处理期间产生测量换能器，所述测量换能器被形成为在第一或第二测量方向上测量物理变量，其中第一和第二测量方向之间的测量角度取决于材料的载体衬底。

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