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    • 29. 发明授权
    • Semiconductor component with a channel stop zone
    • 具有通道停止区域的半导体部件
    • US07629665B2
    • 2009-12-08
    • US11428988
    • 2006-07-06
    • Reiner BarthelmessHans-Joachim Schulze
    • Reiner BarthelmessHans-Joachim Schulze
    • H01L23/58
    • H01L29/66325H01L29/0619H01L29/0638H01L29/66136H01L29/7395H01L29/8611H01L2924/0002H01L2924/00
    • A semiconductor component has a semiconductor body (100) having a basic doping and a first and second side, an inner region (103) arranged between the first and second sides, and an edge region (104) adjacent to the inner region in a lateral direction, at least one active component zone (12) which is arranged in the inner region (103) in the region of the first side (101) and is doped complementarily to the basic doping, and a channel stop zone (20), which is arranged in the edge region (104) in the region of the first side (101), is of the same conduction type as the basic doping and is doped more heavily than the basic doping, the doping concentration in the channel stop zone (20) decreasing continuously at least in sections in a lateral direction in the direction of the active component zone (12) at least over a distance (d1) of 10 μm.
    • 半导体部件具有基本掺杂的半导体本体(100)和第一和第二侧面,布置在第一和第二侧面之间的内部区域(103)以及与侧面的内部区域相邻的边缘区域(104) 在所述第一侧(101)的区域中布置在所述内部区域(103)中并且与所述基本掺杂互补地掺杂的至少一个活性组分区(12)和通道停止区(20),所述通道停止区 布置在第一侧(101)的区域中的边缘区域(104)中,具有与基本掺杂相同的导电类型,并且比基本掺杂更重的掺杂,沟道停止区域(20)中的掺杂浓度 至少在10m的距离(d1)上沿着横向方向在活动部件区域(12)的方向上至少连续地减小。